Chemischer InformationsdienstVolume 12, Issue 12 Physical Inorganic Chemistry ChemInform Abstract: CHEMICAL VAPOR DEPOSITION OF SINGLE CRYSTALLINE β-SILICON CARBIDE FILMS ON SILICON SUBSTRATE WITH SPUTTERED SILICON CARBIDE INTERMEDIATE LAYER S. NISHINO, S. NISHINOSearch for more papers by this authorY. HAZUKI, Y. HAZUKISearch for more papers by this authorH. MATSUNAMI, H. MATSUNAMISearch for more papers by this authorT. TANAKA, T. TANAKASearch for more papers by this author S. NISHINO, S. NISHINOSearch for more papers by this authorY. HAZUKI, Y. HAZUKISearch for more papers by this authorH. MATSUNAMI, H. MATSUNAMISearch for more papers by this authorT. TANAKA, T. TANAKASearch for more papers by this author First published: March 24, 1981 https://doi.org/10.1002/chin.198112008Read the full textAboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat No abstract is available for this article. Volume12, Issue12March 24, 1981 RelatedInformation
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