Ultrafast Laser Processing Research Articles

Investigation of ablation threshold and microchannel fabrication on stainless steel using ultrafast laser

ABSTRACT Ultrafast laser processing is a highly versatile tool for creating microscale structures in many materials. The ablation and micromachining characteristics of AISI 304 stainless steel were examined using a femtosecond-pulsed laser. Parameters such as power, scanning speed, transverse overlap, scanning strategies, and shielding gases were systematically varied. The ablation threshold fluence for SS 304 was calculated as 0.16 J/cm2. Two ablation regimes were observed: the gentle regime, where smooth crater walls were formed under low pulse energy (below 20 µJ), and the strong regime, characterized by rough walls created under high pulse energy (above 20 µJ). The optimal parameters for fabricating microchannels on SS 304 surfaces comprised a laser power of 100 mW, a scanning speed of 30 mm/s, a line-to-line distance of 5 µm, and a parallel scan strategy along the major axis. This study provides a practical approach for enhancing the microchannel fabrication process on stainless steel.

The influence of ultrafast laser processing on morphology and optical properties of Au-GaAs composite structure

The results of direct femtosecond laser structuring of GaAs wafer coated with continuous semitransparent gold (Au) film are presented. The obtained structures demonstrate a combination of different features, namely laser-induced periodic surface structures (LIPSS) on semiconductor and metal film, nanoparticles, Au islands, and fragments of exfoliated Au film. The properties of Au-GaAs samples are studied with scanning electron microscopy (SEM), Raman scattering, and photoluminescence (PL) spectroscopy. The behaviour of phonon modes and enhancement of band-edge PL of Au-GaAs composite sample are discussed. The Raman spectra of Au-GaAs sample processed at different levels of irradiation pulse energy reveal forbidden TO and allowed LO phonon modes for selected geometry of experiment, as well as the manifestation of GaAs surface oxidation and amorphization. A 12-fold increase of PL intensity for Au-GaAs sample with LIPSS compared to initial GaAs surface is observed. The detected PL enhancement is caused by an increase of absorption in GaAs due to the light field enhancement near the Au nanoislands and a decrease of nonradiative surface recombination. The blue shift of PL band is caused by the quantum size effect in GaAs nano-sized features at laser processed surface. The combination of GaAs substrate with surface micro- and nanostructures with Au nanoparticles can be useful for photovoltaic and sensorics applications.

Ultrafast Laser Processing for High-Aspect-Ratio Structures.

Over the past few decades, remarkable breakthroughs and progress have been achieved in ultrafast laser processing technology. Notably, the remarkable high-aspect-ratio processing capabilities of ultrafast lasers have garnered significant attention to meet the stringent performance and structural requirements of materials in specific applications. Consequently, high-aspect-ratio microstructure processing relying on nonlinear effects constitutes an indispensable aspect of this field. In the paper, we review the new features and physical mechanisms underlying ultrafast laser processing technology. It delves into the principles and research achievements of ultrafast laser-based high-aspect-ratio microstructure processing, with a particular emphasis on two pivotal technologies: filamentation processing and Bessel-like beam processing. Furthermore, the current challenges and future prospects for achieving both high precision and high aspect ratios simultaneously are discussed, aiming to provide insights and directions for the further advancement of high-aspect-ratio processing.

Substrate‐Free Terahertz Metamaterial Sensors With Customizable Configuration and High Performance

AbstractMetamaterials based on quasi‐bound states in the continuum (qBICs) with manipulable resonance quality (Q) factors have provided a standout platform for cutting‐edge terahertz (THz) sensing applications. However, most so far have been implemented as conventional metal patch structures with adjacent substrate layers, incurring the limitation of insufficient light‐matter interaction due to substrate effects. Here, qBIC‐driven metamaterials with substrate‐free metallic aperture structures for tailoring light‐matter interactions and exhibiting near‐ideal sensing performance is introduced. Specifically, it is incorporated ultrafast femtosecond laser processing technology to fabricate H‐type metallic aperture metamaterials with accessible high‐contrast Q factor resonances allowed by in‐plane symmetry breaking. Correspondingly, stronger light field energies are applied to the interactions due to completely eliminating the confinement of the substrate effect, enabling experimental sensitivity of up to 0.86 THz RIU−1 for the qBIC resonance, 1.9 times that of the conventional dipole resonance. Moreover, a high Q qBIC resonance achieved by optimized asymmetry parameter is exploited for detecting ultrathin layers of L‐proline molecules as low as 0.87 nmol. It is envisioned that this approach will deliver insights for real‐time, precise, and high‐performance detection of trace biomolecules, and open new perspectives for realizing ideal performance metadevices.

Combining Ultrafast Laser Texturing and Laser Hardening to Enhance Surface Durability by Improving Hardness and Wear Performance

Aluminum alloy 7075 is utilized widely across marine, aerospace, and automotive sectors. However, its surface wear resistance has hindered its application in certain tribological environments. Addressing this challenge, the current study examines a hybrid laser method to increase surface wear resistance by combining two techniques: ultrafast laser texturing and laser‐based surface hardening. Ultrafast laser processing is conducted using 3 W laser power, 100 kHz pulse repetition rate, 4 mm s−1 scanning speed, and three different scan patterns. After the texturing operation, laser‐based surface hardening is then performed on these textures using a continuous wave laser. The laser heat treatment is conducted using laser powers of 400 and 500 W with three different scan speeds of 1, 2, and 3 mm s−1. Microhardness evaluations show a notable increase in hardness, with the hardest sample exhibiting a 17.8% increase compared to the pristine sample. The laser‐textured and laser heat‐treated samples exhibit a significant reduction in the average coefficient of friction and wear volumes compared to samples that were laser‐textured but not laser heat‐treated. The investigated laser processing strategy offers a promising approach for surface modification, enhancing both mechanical properties and wear resistance of aluminum alloy 7075 surfaces.

A Review of an Investigation of the Ultrafast Laser Processing of Brittle and Hard Materials.

Ultrafast laser technology has moved from ultrafast to ultra-strong due to the development of chirped pulse amplification technology. Ultrafast laser technology, such as femtosecond lasers and picosecond lasers, has quickly become a flexible tool for processing brittle and hard materials and complex micro-components, which are widely used in and developed for medical, aerospace, semiconductor applications and so on. However, the mechanisms of the interaction between an ultrafast laser and brittle and hard materials are still unclear. Meanwhile, the ultrafast laser processing of these materials is still a challenge. Additionally, highly efficient and high-precision manufacturing using ultrafast lasers needs to be developed. This review is focused on the common challenges and current status of the ultrafast laser processing of brittle and hard materials, such as nickel-based superalloys, thermal barrier ceramics, diamond, silicon dioxide, and silicon carbide composites. Firstly, different materials are distinguished according to their bandgap width, thermal conductivity and other characteristics in order to reveal the absorption mechanism of the laser energy during the ultrafast laser processing of brittle and hard materials. Secondly, the mechanism of laser energy transfer and transformation is investigated by analyzing the interaction between the photons and the electrons and ions in laser-induced plasma, as well as the interaction with the continuum of the materials. Thirdly, the relationship between key parameters and ultrafast laser processing quality is discussed. Finally, the methods for achieving highly efficient and high-precision manufacturing of complex three-dimensional micro-components are explored in detail.

Selective removal of variable thickness multilayer materials based on photoelectric detection

An ultrafast laser processing system with near-axis monochromatic photoelectric detection for selective removal of variable thickness multilayer materials is proposed. The correlation between signal evolution and ablation progress of silver layer with the variable thickness is established, and a signal attenuation threshold is determined to ensure non-removal of the substrate, providing criteria for the processing strategy combining high and low energies. The proposed strategy is experimentally validated, which balances the quality of low-energy removal and the efficiency of high-energy removal.

Coating-assisted picosecond laser ablation for microstructure fabrication of SiC ceramics

Silicon carbide (SiC) ceramics have emerged as critical materials in the production of high-precision components. Ultrafast laser processing is deemed the optimal technique for micro-nano manufacturing of SiC. However, the permanent deposition layer induced by laser ablation can critically impact the precision of the component. In this work, a coating-assisted picosecond laser ablation (CAPLA) method was proposed, in which sacrificial photoresist coating was utilized to improve surface quality without efficiency loss. The coating serves to prevent the uncooled plasma from contacting with the substrate, thereby preventing the formation of a permanent deposition layer. By comparing the CAPLA method with laser direct ablation, the influence of laser parameters and photoresist coating characteristics on the deposition layer was investigated systematically. A processed surface devoid of deposition layers can be achieved by CAPLA with low pulse energy and a high number of scans. The uniformity is critical to ensure the transmission of the laser beam, and a larger thickness can improve the processing efficiency by increasing the limit of pulse energy capacity. Pin arrays and vacuum grooves for SiC ceramic vacuum chucks were fabricated to demonstrate the superiority of the CAPLA method. These results suggest that this method can be a novel and promising approach for high-precision component manufacturing.

Ultrafast Laser Hyperdoped Black Silicon and Its Application in Photodetectors: A Review

Based on the ultrafast and extremely strong interaction between laser pulses and materials, ultrafast laser irradiation can break the solid solubility constraints and enable hyperdoping of impurities. This process overcomes the bandgap constraints of crystalline silicon, resulting in heightened absorption across a broad spectral range spanning from ultraviolet to infrared wavelengths, therefore commonly referred to as black silicon (b‐Si). The b‐Si demonstrates significant changes in optoelectronic properties, making it highly promising for applications in silicon photonics. Specifically, b‐Si photodetectors exhibit distinct advantages in terms of high photoelectric gain at low voltage, ultrabroadband spectral responsivity, large dynamic range, and suitability for operation over a wide temperature range. These properties address the limitations of traditional silicon photodetectors, showcasing great potential for applications in optoelectronic integration, artificial intelligence, information technology, energy devices, and beyond. This review focuses on b‐Si achieved through ultrafast laser processing, with a special emphasis on its applications in photodetectors. The mechanism of ultrafast laser irradiation and the properties of hyperdoped silicon are discussed. Then, the research progresses and state‐of‐the‐art b‐Si photodetectors are introduced, as well as working mechanism and potential application expansion. Finally, the development prospects of b‐Si photodetectors based on ultrafast laser hyperdoping are predicted.

Construction of microstructures on the Cu substrate using ultrafast laser processing to enhance the bonding strength of sintered Ag nanoparticles

Silver nanoparticle (Ag NP) pastes become a potential die-attachment material with the increased electronic power density. However, the weakness of bonding interface between sintered Ag NPs and bare Cu substrate limits the applications of the Ag NPs paste, thereby reducing the shear strength of the sintered joint. In this work, ultrafast laser processing is utilized to enhance the bonding strength of the sintered Ag joint by fabricating a microstructure interface. The microstructure dimensions are tunable by controlling laser parameters, and then high-strength joints could be obtained. Different substrate microstructures were constructed, and the enhanced bonding mechanism was analyzed by characterizing the cross section and fracture surface morphologies of joints. The ultrafast laser processing could increase the surface energy of Cu substrates to form a more reliable connection with Ag NPs and more energy required for crack extension with the increasing connection area, thereby resulting in a significant improvement in the shear strength of the Ag NP joints. The patterned microstructures on the Cu substrate using this technique showed improved surface energy and increased number of connection areas on the substrate, showing potential for the use in third-generation semiconductors for highly reliable packaging.

Ultrafast Laser Processing of 2D Materials: Novel Routes to Advanced Devices.

Ultrafast laser processing has emerged as a versatile technique for modifying materials and introducing novel functionalities. Over the past decade, this method has demonstrated remarkable advantages in the manipulation of 2D layered materials, including synthesis, structuring, functionalization, and local patterning. Unlike continuous-wave and long-pulsed optical methods, ultrafast lasers offer a solution for thermal heating issues. Nonlinear interactions between ultrafast laser pulses and the atomic lattice of 2D materials substantially influence their chemical and physical properties. This paper highlights the transformative role of ultrafast laser pulses in maskless green technology, enabling subtractive, and additive processes that unveil ways for advanced devices. Utilizing the synergetic effect between the energy states within the atomic layers and ultrafast laser irradiation, it is feasible to achieve unprecedented resolutions down to several nanometers. Recent advancements are discussed in functionalization, doping, atomic reconstruction, phase transformation, and 2D and 3D micro- and nanopatterning. A forward-looking perspective on a wide array of applications of 2D materials, along with device fabrication featuring novel physical and chemical properties through direct ultrafast laser writing, is also provided.

Ultrafast laser processing of camouflaged metals by topography inherited multistep removal for information encryption

Ultrafast laser processing of camouflaged metals by topography inherited multistep removal for information encryption

Study on the Wettability and Abrasion Resistance of Ultrafast-Laser-Textured Ti Surface

Titanium (Ti) materials are highly valued in the medical field for their outstanding biocompatibility and corrosion resistance. However, challenges such as suboptimal wettability and wear resistance can impact the tribological properties of titanium implants, potentially leading to implant failure. This study explores the application of ultrafast pulsed laser processing to create two distinct structures, circular pits and grooves, on the surface of titanium materials. The samples underwent low-surface-energy treatment, after which the wettability and wear resistance of the textured surfaces were evaluated. The findings indicate that the textured surfaces exhibit improved hydrophobic properties and reduced surface wear. Specifically, the textured surfaces demonstrated a remarkable 73.68% reduction in wear compared to the untextured surfaces. These results underscore the potential of etching textured structures onto titanium surfaces to enhance their wear resistance, thereby offering promising implications for the improvement of titanium implant performance.

Crackless high-aspect-ratio processing of a silica glass with a temporally shaped ultrafast laser.

In this Letter, we propose a crackless high-aspect-ratio processing method based on a temporally shaped ultrafast laser. The laser pulse is temporally split into two sub pulses: one with smaller energy is used to excite electrons but without ablation so that the applied pressure to the sample is weak, and the other one is used to heat the electrons and achieve material removal after it is temporally stretched by a chirped volume Bragg grating (CVBG). Compared with the conventional ultrafast laser processing, the crack generation is almost suppressed by using this proposed method. The hole depth increases more than 3.3 times, and the aspect ratio is improved at least 2.2 times. Moreover, processing dynamics and parameter dependence are further experimentally studied. It shows that the processing highly depends on the density of electrons excited by the first pulse (P1) and the energy of the second pulse (P2). This novel, to the best of our knowledge, method provides a new route for the precise processing of wide-bandgap materials.

Ultrafast laser one-step construction of 3D micro-/nanostructures achieving high-performance zinc metal anodes

Aqueous zinc-ion batteries provide a most promising alternative to the existing lithium-ion batteries due to their high theoretical capacity, intrinsic safety, and low cost. However, commercializing aqueous zinc-ion batteries suffer from dendritic growth and side reactions on the surface of metallic zinc, resulting in poor reversibility. To overcome this critical challenge, here, we report a one-step ultrafast laser processing method for fabricating three-dimensional micro-/nanostructures on zinc anodes to optimize zinc nucleation and deposition processes. It is demonstrated that the three-dimensional micro-/nanostructure with increased specific surface area significantly reduces nucleation overpotential, as well as preferentially absorbs zinc ions to prevent dendritic protuberances and corrosion. As a result, the presence of three-dimensional micro-/nanostructures on the zinc metal delivers stable zinc plating/stripping beyond 2500 h (2 mA cm-2/1 mAh cm-2) in symmetric cells, a high Coulombic efficiency (99.71%) in half cells, and moreover an improved capacity retention (71.8%) is also observed in full cells. Equally intriguingly, the pouch cell with three-dimensional micro-/nanostructures can operate across various bending states without severely compromising performance. This work provides an effective strategy to construct ultrafine and high-precision three-dimensional micro-/nanostructures achieving high-performance zinc metal anodes and is expected to be of immediate benefit to other metal-based electrodes.

Simulation of laser-induced ionization in wide bandgap solid dielectrics with a particle-in-cell code.

Modeling the laser-plasma interaction within solids is crucial in controlling ultrafast laser processing of dielectrics, where the pulse propagation and plasma formation dynamics are highly intricate. This is especially important when dealing with nano-scale plasmas where specific phenomena of plasma physics, such as resonance absorption, can significantly impact the energy deposition process. In this article, we report on adapting of a Particle-In-Cell code, EPOCH, to model the laser-plasma interaction within solids. This is performed by implementing a background permittivity and by developing and validating adapted field ionization and impact ionization modules. They are based on the Keldysh ionization theory and enable the modeling of ionization processes within solids. The implementation of these modules was validated through comparisons with a hydrodynamic code and existing literature. We investigate the necessary number of super-particles per cell to model realistic ionization dynamics. Finally, we apply the code to explore the dynamics of plasma formation in the regime of of quantized structuring of transparent films. Our study elucidates how a stack of nano-plasma layers can be formed by the interference of a pulse with its reflection on the exit surface of a high refractive index material.

Self-Shielding of X-ray Emission from Ultrafast Laser Processing Due to Geometrical Changes of the Interaction Zone.

Materials processing with ultrashort laser pulses is one of the most important approaches when it comes to machining with very high accuracy. High pulse repetition rates and high average laser power can be used to attain high productivity. By tightly focusing the laser beam, the irradiances on the workpiece can exceed 1013 W/cm2, and thus cause usually unwanted X-ray emission. Pulsed laser processing of micro holes exhibits two typical features: a gradual increase in the irradiated surface within the hole and, with this, a decrease in the local irradiance. This and the shielding by the surrounding material diminishes the amount of ionizing radiation emitted from the process; therefore, both effects lead to a reduction in the potential X-ray exposure of an operator or any nearby person. The present study was performed to quantify this self-shielding of the X-ray emission from laser-drilled micro holes. Percussion drilling in standard air atmosphere was investigated using a laser with a wavelength of 800 nm a pulse duration of 1 ps, a repetition rate of 1 kHz, and with irradiances of up to 1.1·1014 W/cm. The X-ray emission was measured by means of a spectrometer. In addition to the experimental results, we present a model to predict the expected X-ray emission at different angles to the surface. These calculations are based on raytracing simulations to obtain the local irradiance, from which the local X-ray emission inside the holes can be calculated. It was found that the X-ray exposure measured in the surroundings strongly depends on the geometry of the hole and the measuring direction, as predicted by the theoretical model.

Probing nonlinear excitation conditions: photoluminescence and nonlinear absorption studies in laser-irradiated dielectrics

Understanding the fundamentals of laser-matter interactions is crucial for developing and optimizing ultrafast laser processing strategies. In optically transparent solids, the key event by which energy is deposited in the material is through the generation of an electron–hole plasma via nonlinear excitation mechanisms. As the energy stored in the plasma relaxes, local distortions of the lattice may occur, such as point defects. These defects give rise to new discrete energy states located in the bandgap. In this study, we investigate how the presence of these energy states influences the transmission of ultrashort near-infrared laser pulses in fused silica. Experimental results of laser pulse transmission and photoluminescence from defects are correlated with optical microscopy of the irradiated spots, allowing us to identify different nonlinear interaction regimes. Numerical simulations indicate that photo-induced defects influence the nonlinear losses of ultrashort laser pulses and explain why a non-destructive damage regime with detectable excitation is only observed for a narrow intensity range in multipulse experiments.

Merging of Bi-Modality of Ultrafast Laser Processing: Heating of Si/Au Nanocomposite Solutions with Controlled Chemical Content.

Ultrafast laser processing possesses unique outlooks for the synthesis of novel nanoarchitectures and their further applications in the field of life science. It allows not only the formation of multi-element nanostructures with tuneable performance but also provides various non-invasive laser-stimulated modalities. In this work, we employed ultrafast laser processing for the manufacturing of silicon-gold nanocomposites (Si/Au NCs) with the Au mass fraction variable from 15% (0.5 min ablation time) to 79% (10 min) which increased their plasmonic efficiency by six times and narrowed the bandgap from 1.55 eV to 1.23 eV. These nanostructures demonstrated a considerable fs laser-stimulated hyperthermia with a Au-dependent heating efficiency (~10-20 °C). The prepared surfactant-free colloidal solutions showed good chemical stability with a decrease (i) of zeta (ξ) potential (from -46 mV to -30 mV) and (ii) of the hydrodynamic size of the nanoparticles (from 104 nm to 52 nm) due to the increase in the laser ablation time from 0.5 min to 10 min. The electrical conductivity of NCs revealed a minimum value (~1.53 µS/cm) at 2 min ablation time while their increasing concentration was saturated (~1012 NPs/mL) at 7 min ablation duration. The formed NCs demonstrated a polycrystalline Au nature regardless of the laser ablation time accompanied with the coexistence of oxidized Au and oxidized Si as well as gold silicide phases at a shorter laser ablation time (<1 min) and the formation of a pristine Au at a longer irradiation. Our findings demonstrate the merged employment of ultrafast laser processing for the design of multi-element NCs with tuneable properties reveal efficient composition-sensitive photo-thermal therapy modality.

Application of Light Field Modulation Technology in Ultrafast Laser Processing (Invited)

Application of Light Field Modulation Technology in Ultrafast Laser Processing (Invited)