A novel technique for the nanofabrication of gold nanocones on top of atomic force microscopy cantilever tips is demonstrated. The modified tips are intended as near-field scanning optical microscopy probes. The fabrication process is composed of cutting the probe apex with a focused gallium ion beam to create a platform for the nanocone fabrication. Three thin films are deposited on the cantilever, where gold as the active plasmonic material is sandwiched between a titanium adhesion layer and an Al2O3 thin film. At the top of the cantilever the deposited thin films are partially structured by a ring shaped focused ion beam pattern, leaving behind a cylindrical pillar. Finally, the gold nanocone is produced by argon ion etching with the top thin film on the pillar acting as a hard mask.
Read full abstract