TiO2 Thin Films Research Articles

Synthesis and Characterization of TiO2 Thin Films Modified with Anderson-Type Polyoxometalates (Ni, Co, and Fe)

In this work, TiO2 and Anderson-type polyoxometalates (Ni, Co, and Fe) thin-film composites were fabricated. The composites were characterized by FTIR and Raman spectroscopy, diffuse reflectance, and scanning electronic microscopy. The methylene blue (MB) photocatalytic degradation on the composites under UV irradiation was studied. Spectroscopic results verified the modification of TiO2 thin films. Optical and morphological properties changed after TiO2 modification. The largest change in the optical band gap was observed for the FePOM/TiO2 system, which reported a value of 3.05 eV. The POM/TiO2 systems were more efficient in methylene blue (MB) adsorption than bare TiO2. Furthermore, the modified films were more efficient than bare TiO2 during MB photodegradation tests. The NiPOM/TiO2 and the CoPOM/TiO2 were the most efficient in the MB adsorption, reaching ~20%. The NiPOM/TiO2 and the CoPOM/TiO2 composites were the most efficient in the photodegradation process, reaching ~50% of MB removal. The stability tests indicated that composite films were moderately stable after the three performed reusability cycles. Thus, these results suggest that POM modification of TiO2 can improve the adsorption and photodegradation capacity of semiconductors.

The Effect of Radiation on the Optical properties of TiO2 thin films as Solar Cell Application

The Effect of Radiation on the Optical properties of TiO2 thin films as Solar Cell Application

Fabrication and electrical properties of flexible polymer-based MIM capacitors of high-k nanolaminate dielectrics of HfO2–SnO2–TiO2 with ultrathin Al2O3 insertion layer by plasma-enhanced atomic layer deposition

Abstract Flexible metal–insulator–metal (MIM) capacitors of high-k nanolaminate HfO2–SnO2–TiO2 thin films were fabricated on several polymer substrates of polyethylene terephthalate, polyimide and epoxy resin at 80 °C by plasma-enhanced atomic layer deposition. The electrical properties were optimized by adjusting the sub-cycle ratio of Hf: Sn: Ti to 6: 5: 4. In order to reduce the leakage current density of flexible capacitors, the ultrathin Al2O3 layer varying from 0.5 to 1.5 nm was inserted to form Al2O3/HfO2–SnO2–TiO2/Al2O3 stacking capacitors. The effect of the Al2O3 insertion layer thickness and the super-cycle number of HfO2–SnO2–TiO2 on the capacitance density, leakage, and quadratic voltage linearity was investigated. Under optimal processing, flexible MIM capacitors could stand 40 000 bending cycles at curvature radius of 8.2 mm, indicative of better electrical stability. Moreover, compared with the polymer-based HfO2–SnO2–TiO2 capacitors, the introduction of 1 nm Al2O3 ultrathin layer greatly decreases the leakage current density by 4 orders of magnitude (10−8 A cm−2) with relative lower voltage linearity (350–540 ppm V−2), but the capacitance density also declines (∼3 fF μm−2) simultaneously. Despite this, the method of inserting Al2O3 ultra-thin layer is still an effective method to improve the electrical performances of polymer-based HfO2–SnO2–TiO2 nanolaminate capacitors for flexible electronics.

Effect of Tungsten Doping on the Properties of Titanium Dioxide Dye-Sensitized Solar Cells

Tungsten-doped TiO2 thin films were prepared by sol–gel method on fluorine-doped tin oxide-coated substrates as working electrodes of dye-sensitized solar cells. The influences of different W doping (0, 2, 4, 6, and 8 at%) on the microstructure, optical, and photovoltaic properties of the W-TiO2 thin-film DSSCs were studied by the measurement of X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), Brunauer–Emmett–Teller (BET) analysis, and electrochemical impedance spectroscopy (EIS). An optimal DSSCs performance was observed with a 6 at% W-doped TiO2 thin film, resulting in a Voc of 0.68 V, a Jsc of 20.2 mA/cm2, an FF of 68.6%, and an efficiency (η) of 9.42%. The efficiency of DSSCs with 6 at% W-doped TiO2 photoanode improved by 75%. This is because the 6 at% W-doped TiO2 thin film increases the specific surface area and electron transfer rate.

Measurement and Analysis of Surface Temperature Gradients on Magnetron Sputtered Thin Film Growth Studied Using NiCr/NiSi Thin Film Thermocouples.

In the general analysis of thin-film growth processes, it is often assumed that the temperature of the film growth surface is the same as the temperature of the film growth substrate. However, a temperature gradient exists between the film growth surface and film growth substrate. Using the growth surface of TiO2 thin films as an example, the temperature gradient of the film growth surface is tested and analyzed. A NiCr/NiSi thin-film thermocouple is fabricated using the direct-current pulse magnetron sputtering method. A three-layer NiCr/NiSi thin-film thermocouple temperature measurement system is established to measure the temperature gradient of the film growth surface. The growth surface temperature and substrate temperature of the TiO2 thin films are measured. For a sputtering power density of 0.83W cm- 2, the temperature difference between the first and second layers is 104.79°C, while the temperature difference between the second and third layers is 39.92°C. A standard K-type thermocouple is used to measure the substrate temperature, which is recorded to be 132.05°C, consistent with common measurements of substrate temperature. The heat conduction on the film growth surface in the vacuum chamber is examined and a model for the temperature measurement device during film growth is constructed.

2-Axis controlled spray pyrolysis deposition device for Dye-sensitized Solar Cell (DSSC)

Dye-sensitized solar cells (DSSCs) are a promising alternative to traditional silicon-based photovoltaic systems due to their efficient light-to-electricity conversion. A critical component of DSSCs is titanium dioxide (TiO2), responsible for converting light into electrical energy. Spray pyrolysis was one of the methods for fabricating TiO2 thin films. However, there are several drawbacks, such as challenges in particle size control, maintaining homogeneity of the thin film, and scalability issues during the deposition process. Modifications to the manufacturing process are necessary to achieve optimal performance in DSSCs, particularly with the thickness of the cell. This work focuses on the 2-axis spray pyrolysis process, a cost-effective way to create thin and thick films. In particular, it focuses on TiO2 thin films utilized as working electrodes in DSSC applications. The method was performed at different motor speeds, namely MS80, MS100, and MS120. The X-ray diffraction (XRD) spectrum showed that the dominance of the anatase phase appeared in an MS100. The UV-Vis results depict that the band gap value is 3.02 eV. The surface profiler analysis indicates that sample MS100 has an optimal thickness of 15.17 µm. The DSSC achieved 9.4% efficiency with sample MS100. This finding demonstrates that using 2-axis controlled spray pyrolysis deposition improves DSSC performance with an optimal motor speed.

Optimizing deposition parameters and characterizing TiO2 thin films for future memristor applications

Titanium dioxide (TiO2) thin films were deposited on glass substrates using Spray Pyrolysis technique, with variations in multiple deposition parameters. The molarity of the precursor was altered within a small range from 0.09 M–0.15 M. The deposition temperature was systematically adjusted from 200 °C to 400 °C while the ratio between precursor and chelating agent varied between 1:1,1:2 and 1:3. The thickness of TiO2 films were found to be in the range of 216 nm to 14.9 μm. Structural analysis conducted by XRD confirmed the formation of anatase TiO2 thin films. Optical studies using UV-Visible spectrophotometer determined the absorption and indirect bandgap ranging from 299 nm to 326 nm and 3.08 eV to 3.44 eV respectively. Electrical studies carried out evaluated the leakage currents and DC resistivity for all individual films with the input voltage applied from ± 0.5 V to ± 5V. Impedance studies were conducted by varying input voltages from 0.2V–3V for each film, so as to examine the resultant impedance, dielectric constant, dielectric loss, conductivity, admittance and modulus spectra. The obtained results were analysed to optimise the deposition parameters for designing future memristors with specific individual or combined characteristics, such as high ON/OFF, switching speed, endurance and retention.

Structural, Morphological, and Optical Properties of TiO2/CdS Core-Shell System Prepared by Two Method for Photoelectrocatalytic Application

Abstract The present study utilized the hydrothermal technique to carry out the deposition of films of TiO2. The deposition of CdS on the TiO2 films was accomplished using the chemical bath deposition (CBD) and successive ionic layer adsorption and reaction (SILAR) methods. The morphological and structural characteristics of the TiO2/CdS thin films were investigated using a combination of XRD, SEM, EDX, and AFM techniques. Additionally, the optical properties of the nanostructures were examined using UV-Visible and PL spectroscopic techniques. The X-Ray Diffraction pattern of all TiO2 films revealed the formation of the anatase phase. The CdS present in the Ti/TiO2/CdS samples exhibited a hexagonal structure. The hydrothermal technique employed in the preparation of the TiO2 thin films resulted in the formation of nanofiber morphology, which was evident from the SEM images. The absorption edge data for the TiO2/CdS films demonstrated a shift towards the visible region, indicating a decrease in the bandgap as compared to the TiO2 nanostructure. Significantly improved photoelectrocatalytic performance was observed in the Ti/TiO2/CdS samples prepared using the CBD method, surpassing that of the Ti/TiO2/CdS samples prepared using the SILAR method.

Preparation and characterization of axially substituted silicon phthalocyanine-modified nano TiO2 thin films

Nowadays, reaching of industrial wastes containing durable organic pollutants to water resources is one of the important environmental problems. Cost-effective, nontoxic, thermally and chemically stable, light-sensitive photocatalysts are being developed for the removal of these wastes from water resources. Our aim in this study is to synthesize newly bis-[(4-pyrenebutoxy)]phthalocyaninato silicon (Pyrn-C4-SiPc) and bis-[n-(9-anthrylmethyl)-n-methylamino]phthalocyaninato silicon (Anthr-C3-SiPc) molecules and then modify onto TiO2 nanoparticles. The sol-gel method was used during the modification process to achieve synthesis at lower temperatures to obtain nano TiO2 crystals in the anatase form. 10% and 25% concentrations of silicon phthalocyanine-modified TiO2 nanoparticles which are approximately around 5 nm the particle sizes were added to the preparated hybride organic-inorganic polymer network, and were applied to the glass surface by spray method. The resulting coatings’ thicknesses, photocatalytic activities, and optical, physical, morphological, and mechanical properties were tested. The adhesion of the coatings sprayed onto the glass surface was measured as 5B The coatings created were found to have high hardness and resistance in the tests conducted. This research successfully developed photocatalytic hybrid nanocomposite films that are highly transparent with 90% light transmittance exhibit robust photocatalytic activity, and remain color-stable.

Deposition of Nb-doped TiO2 thin films for electrochromic applications with high durability and stability

Although pure TiO2 has no significant electrochromic properties, it is used to investigate the electrochromic properties after the doping process. In this paper, TiO2 thin film was doped with Nb, and its surface and electrochromic properties were subsequently investigated. A thermionic vacuum arc deposition system was used to deposit the doped thin film, which was then annealed. Field emission scanning electron microscopy and atomic force microscopy were employed to obtain the surface morphology of the films. The Ti/Nb ratio was found to be 0.033. After annealing, the transparency value of the thin film increased to 85 %. The coloration efficiency was determined to be 375 cm2/C. The band gap of Nb2O5 was found to be in the range of 3.1–4.0 eV. For TiO2, the band gap was found to be 3.2 eV. Transmittance variation is about 3 %, and band gap variation in colouring and bleaching states is about 0.5 eV. During the colouring and bleaching states, the band gap value of the sample changed from 3.5 eV to 3.0 eV. The specific capacitance is 3 F/g for the thin film. Finally, the results show that Nb-doped TiO2 is a promising candidate for high-performance and long-life electrochromic material.

Optical and microstructural studies of erbium-doped TiO2 thin films on silicon, SrTiO3, and sapphire

Optical and microstructural studies of erbium-doped TiO2 thin films on silicon, SrTiO3, and sapphire

Photo-electrochemical study of TiO2/Co3O4 thin films in polluted electrolyte: A promising route for coupling hydrogen production with water remediation

The use of a photo-electrochemical cell (PEC) to produce hydrogen from wastewater is a promising innovation. In this context, this study investigates the impact of a pollutant on the photo-electrochemical properties of sol-gel synthesized TiO2 and TiO2–Co3O4 thin films for hydrogen production in a polluted electrolyte. Combining the photocatalytic properties of TiO2 with the electronic properties of Co3O4 offers an effective solution for achieving effective photo-electrochemical properties in polluted environments. Nevertheless, despite the lowest photocatalytic activity, the hybrid thin film TiO2–Co3O4 with the highest Ti/Co ratio (1:0.5) shows the most promising performance with simultaneous 11.4 μmol cm−2 h−1 H2 production and 12% acid orange 7 degradation after 3 h irradiation under xenon light without the use of any sacrificial agent. This indicates that the electronic conductivity provided by the presence of Co3O4 is a critical property for achieving optimal performance in PEC coupling for hydrogen production and wastewater treatment.

Trends Research Synthesis of TiO2 Thin Films as Solar Cell Materials (2015-2024): A Systematic Review

Research in the field of solar cells continues to increase along with the development of the times and human needs for renewable energy sources. One of the fields of study that is often used as a research topic is the development of Thin Film Solar Cells or known as Thin Film Solar Cells (TFSC). This research aims to identify and analyze research trends of synthesis of TiO2 thin films as solar cell materials. This research method is descriptive and analytical. The data used in this research was obtained from documents indexed by Google Scholar from 2015-2024 using Publish or Perish and Dimension.ai. Research procedures use PRISMA guidelines. The data identified and analyzed are the type of publication, publication source, and the title of research on synthesis of Ti02 thin films as solar cell materials that is widely cited. The data analysis method uses bibliometric analysis assisted by VOS viewer software. The results of the analysis show that research trend on synthesis of TiO2 thin films as solar cell materials indexed by Google Scholar from 2015 to 2024 has experienced increases and decreases. There are many documents in the form of articles, proceedings, chapters, preprints, monograph and edited books that discuss research about synthesis of TiO2 thin films as solar cell materials. Key words that are often used in research about it are dye sensitized cell, electrode, electron, characterization, etc.

Preparation and Photodegradation of TiO2 Thin Films on the Inner Wall of Quartz Tubes.

Titanium dioxide thin films on the inner wall of quartz tubes were prepared in situ by the sol-gel method. Meanwhile, copper and cerium were loaded onto the surface of the titanium dioxide thin films to enhance photocatalytic activity and broaden the range of light absorption. X-ray diffractometer, X-ray photoelectron spectroscopy, scanning electron microscopy, energy dispersive X-ray spectrum, N2 gas adsorption, UV diffuse reflectance spectroscopy, electron paramagnetic resonance, photoluminescene spectroscopy, and so on were used to characterize the structure, morphology, chemical composition, and optical properties of the prepared photocatalyst. Methylene blue (MB) was used as a simulated organic pollutant to study the photocatalytic performance of the photocatalyst, which was a translucent, structurally stable, and reusable high-efficiency photocatalytic catalyst. Under UV lamp irradiation, the MB photodegradation efficiency was 94.5%, which reached 91.2% after multiple cycles.

Metal-semiconductor-metal UVA photodetector based on TiO2 thin films synthesized via liquid phase deposition method

In this work, titanium dioxide (TiO2) thin film-based metal-semiconductor–metal (MSM) ultraviolet (UV) photodetectors (PDs) were fabricated on glass substrates via liquid phase deposition (LPD) technique at various deposition time in the range of 3–6 h. Varying deposition time significantly impacted the physical properties of the films. Increasing the deposition time revealed a mixture of clusters and hexagonal-like structures in film’s morphology. The energy band gap of the TiO2 films decreased from 3.30 to 3.09 eV upon increasing the deposition time. Photodetection characteristics were examined by exposing the MSM UV PD to 390 nm UV light with an intensity of 1.6 mW cm−2 and a bias voltage of 5 V. The fabricated PDs implied characteristics of I-V ohmic contact. The optimum photodetection characteristics were achieved for TiO2 film deposited at 6 h which exhibited 36.9 μA maximum photocurrent, 20080.3% sensitivity, 201.80 gain, 225 mA W−1 responsivity, 81.07% external quantum efficiency, 0.276 s response time, and 0.274 s recovery time. The photoelectric properties of the films were strongly affected by the increased grain size and improved crystallinity of the films due to the prolonged deposition time. The optimum film demonstrated its potential to be a promising candidate for UV PD applications.

Efficient CO2 reduction to C2 products in a Ce-TiO2 photoanode-driven photoelectrocatalysis system using a Bnanometer Cu2O cathode

Excessive emission of CO2 into the atmosphere has caused significant environmental issues. Photoelectrocatalytic (PEC) reduction of CO2 is an effective method that combines the benefits of both photo- and electrocatalysis. This process effectively minimizes CO2 emissions, enhances the efficiency of CO2 reduction, and diminishes energy consumption during the reduction process. In this work, we have successfully developed a photoelectrochemical (PEC) system, integrating a Ce-doped TiO2 film as the photoanode and Cu2O as the dark cathode, in which the 4 % Ce-TiO2 film photoanode demonstrated the best performance. Electrochemical performance data revealed that the Cu2O catalysts, characterized by their octahedral geometry that optimally presents active sites for CO2 reduction, displayed superior activity in converting CO2. Through a straightforward hydrothermal synthesis, we crafted three-dimensional, flower-like TiO2 thin films. The strategic incorporation of cerium into the TiO2 matrix not only enhanced the material's crystallinity but also resulted in a uniform and compact morphology. This modification significantly narrowed the band gap of TiO2, thereby boosting its photocatalytic capabilities. In the system where a 4 % Ce-TiO2 thin film photoanode was used to drive the PEC reduction of CO2, the octahedral Cu2O catalyst demonstrated the highest selectivity for C2 products. This occurred at a reaction voltage of −1.4 V vs. RHE, resulting in a total Faraday efficiency of 67.33 %. Notably, this Faraday efficiency is double the one produced from the electrocatalytic (EC) system. This work demonstrates that the use of a 4 % Ce-TiO2 film as a photoanode is able to solve the photocorrosion problem of the Cu2O catalyst while employing a photovoltaic combination to enhance the selectivity to C2 products.

Structural, morphological, and optical properties of CuO nanoblade-decorated TiO2 nanotubular photoelectrodes

Titania (TiO2) nanotubular photoelectrodes are a competitive component of titania-based photoelectrochemical water splitting systems. However, TiO2 actively absorbs light in the UV region, which limits its usefulness in solar water splitting, a fast-growing clean energy alternative. In this study, the structural, morphological and optical properties of CuO/TiO2 nanostructures on conductive transparent F-doped SnO2 (FTO) coated glass substrates are engineered for potential application in solar water splitting. The efficacy of a three-step anodization synthesis process to develop free-standing high-fidelity nanotubular TiO2 thin films (∼8μm) is demonstrated. CuO nanoblades were deposited on TiO2/FTO by a successive ionic layer adsorption reaction (SILAR). An increase in the precursor concentration and number of immersion cycles influenced the adsorption of CuO and the resultant red shift in the absorption range. SEM and TEM analyses confirm the formation of a heterostructure, with evidence of CuO nanostructures within the TiO2 nanotubular arrays and on the top of the tubes.

Self-Aligned Ionic Doping of TiO2 Thin-Film Transistors for Enhanced Current Drivability via Postfabrication Superacid Treatment.

Oxide semiconductor thin-film transistors (TFTs) have shown great potential in emerging applications such as flexible displays, radio-frequency identification tags, sensors, and back-end-of-line compatible transistors for monolithic 3D integration beyond their well-established flat-plane display technology. To meet the requirements of these appealing applications, high current drivability is essential, necessitating exploration in materials science and device engineering. In this work, we report for the first time on a simple solution-based superacid (SA) treatment to enhance the current drivability of top-gate TiO2 TFTs with a gate-offset structure. The on-current of these transistors is limited by the relatively low mobility of TiO2 due to its d-orbital conduction nature. It is found that the on-current of TiO2 TFTs is nearly doubled via a quick dip in a SA solution at room temperature in ambient air. A series of experiments, including comparative I-V measurements of TFTs with different treatments and gate structures, C-V measurements, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, and device simulation, were performed to uncover the underlying reason for the current enhancement. It is believed that the protons (H+) from SA are doped into the offset region of TiO2 TFTs, forming an electron double layer and thus boosting the on-current, with the top gate serving as a self-aligned mask for ionic doping. Furthermore, the ionic size and the proportion of the offset region to the channel play crucial roles in the effectiveness of ionic doping, while the position of the incorporated ions, whether in the channel or dielectric, may result in distinct shifts in the turn-on voltage (VON) and affect the functionality of ionic doping. This study provides a pathway for enhancing the current drivability of TiO2 TFTs via selective ionic doping enabled by SA treatment and deepens our understanding of ion incorporation in electronic devices. This approach could be applicable to other material systems and may also benefit TFTs with miniaturized dimensions, thus opening up unprecedented opportunities for TiO2 TFTs in future applications requiring high current drivability.

Flexible transparent conductors with a percolated Ag nanostructure and its application as efficient self-bias plasmonic photodetector

A percolated silver (Ag) nanostructured-based transparent conductor has been deposited by physical vapor deposition (PVD) technique where lateral growth of Ag has been enhanced by a pre-deposited Ag-TiO2 thin film. This Ag-TiO2 film has embedded Ag nanoparticles (NPs) within TiO2 thin film which is grown in a low temperature (100 °C) solution processed technique. This process includes Li4Ti5O12 (LTO) thin film deposition by a sol–gel method followed by ion-exchange (Li+ → Ag+) process to yield an Ag-TiO2 thin film. The percolated Ag network has appeared as soon film mass-thickness reaches close to 10 nm, resulting in an abrupt drop of electrical resistivity of the film. This percolated Ag nanostructured thin film (10 nm Ag/Ag-TiO2/plastic) has resistivity of ∼50 Ω/□ and an average visual transmittance of >70 % up to 450 nm. In higher wavelength range, transparency gradually reduces, and it reaches to ∼50 % at 600 nm which is mostly due to the plasmon absorption of this film. By utilizing its combined optical transparency and surface plasmon absorption, this film has been used to develop plasmonic hot electron photodetectors where Ag-thin film works as transparent electrode as well as plasmon induced photo-excited hot electron generation. Device has been fabricated on a heavily doped n type Si (n++-Si) with a metal–semiconductor-metal (M−S−M) device geometry. External quantum efficiency (EQE) data reveal that photocurrent of this device is mostly generated in the plasmonic absorption region with a peak detectivity of 2.84 × 1012 Jones at 510 nm under −3V external bias. Besides, the device shows fast response with a response time of ∼25 ms.

Quantitative piezoelectric measurements of partially released Pb(Zr, Ti)O3 structures

The effective large signal longitudinal piezoelectric coefficient (d33,f∗) of piezoelectric thin films on rigid substrates has been widely investigated. Unclamped piezoelectric thin films are predicted to have a higher d33,f∗ coefficient due to reduced constraints on piezoelectric strain, domain reorientation, and domain wall motion, but quantitative measurements of this coefficient have been limited. This study uses microfabrication techniques along with double-beam laser interferometry (DBLI) to accurately determine the longitudinal piezoelectric coefficient of Pb(Zr,Ti)O3 thin films in partially released piezomicroelectromechanical structures. A two-step backside release process was used: first, deep reactive ion etching to create backside vias and second, wet etching of the ZnO sacrificial layer to release the area beneath the Pb(Zr,Ti)O3 thin films. Post wet etching, optical profilometry showed concavely deformed diaphragms resulting from asymmetrical stress profiles through the diaphragm thickness. DBLI was then used to examine diaphragm deflection under an applied unipolar voltage ranging from 0 to 10 V. Devices with 50% and 75% of the area beneath the top electrode released exhibited large signal d33,f∗ values of 410 ± 6 and 420 ± 8 pm/V, respectively, more than three times higher than the d33,f∗ value of the clamped samples: 126 ± 13 pm/V. The reasons contributing to the large d33,f∗ include (i) the change in stress levels due to the release process, (ii) the elimination of mechanical constraints from substrate clamping, and (iii) enhanced domain reorientation. These findings confirm that substrate declamping significantly boosts the piezoelectric coefficient, bringing d33,f∗ closer to the bulk longitudinal piezoelectric coefficient (d33).