This paper presents an innovative approach for forming crystallized selenium (c-Se) using a Se/Te/Se stacked precursor. The aim is to enhance the adhesion between the TiO2 and Se layers to improve the power conversion efficiency of TiO2/Se heterojunction photovoltaic devices. Our previous study revealed that the accumulation of Te near the TiO2/Se interface resulted in insufficient shunt resistance, leading to increased dark leakage current. This issue arises because Te possesses a high carrier density (∼1018 cm−3) and narrow bandgap energy (0.26 eV). However, a Te additive layer remains necessary to passivate the unbonded TiO2/Se interface and to maximize the adhesion between the absorber and the substrate. Previous research on Se-based photovoltaic devices demonstrated that an extremely thin (∼0.5 nm) and homogeneous Te adhesion layer could be formed beneath the Se photo-absorbing layer and subsequently crystallized through air-annealing post-deposition. However, achieving precise and homogeneous sub-nanometer Te films using a compact resistance heating evaporation system in a laboratory setting proved challenging so far. To address these limitations, we propose a novel technique for forming the Se absorber layer by post-annealing a stacked 1st-Se/Te/2nd-Se precursor on a TiO2 window layer. Through experimentation, we achieved the highest power conversion efficiency of 4.49 % without antireflective coating, accompanied by Voc 0.795V, JSC 11.13 mA/cm2, and FF 0.507 when the 1st-Se thickness was 5 nm. Furthermore, the impact of decreasing Te/(Te + Se) near the TiO2 window layer on photovoltaic performance was theoretically predicted using modelling by SCAPS-1D. Overall, this work introduces a promising method for enhancing the formation of c-Se, improving adhesion between TiO2 and Se layers, and enhancing the power conversion efficiency of TiO2/Se heterojunction photovoltaic devices.
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