Thin Sensors Research Articles

Manufacturing of soft capacitive strain sensor based on dielectric elastomer material for an elastic element of a jaw coupling

In this work, we present a procedure for manufacturing a soft capacitive strain sensor in the form of a multi-layer electrical capacitor for further integration into the elastic gear rim of a jaw coupling. The dielectric elastomer sensor (DES) is based on an elastomeric substrate with alternating layers of conductive carbon black based ink as electrode layers and elastomeric film as a dielectric and electrical insulation. A variety of thin multi-layer sensors were produced to evaluate the manufacturing process. Additionally, using an LCR meter and a tensile test machine, the equivalent electrical capacitance (C) at the two sensor contacts and the applied force are measured, respectively. It is shown that C varies depending on the amount of sample strain caused by the applied force. By testing two versions of DES, a maximum change in capacitance of ΔC = 1.55 pF was achieved. The obtained characteristics show that the presented manufacturing process for the DES can be used as a soft strain sensor to measure the strain caused by the force applied to the elastic element between the jaw couplings.

First experimental validation of silicon-based sensors for monitoring ultra-high dose rate electron beams

Monitoring Ultra-High Dose Rate (UHDR) beams is one of the multiple challenges posed by the emergent FLASH radiotherapy. Technologies (i.e., gas-filled ionization chambers) nowadays used in conventional radiotherapy are no longer effective when applied to UHDR regimes, due to the recombination effect they are affected by, and the time required to collect charges. Exploiting the expertise in the field of silicon sensors’ applications into clinics, the medical physics group of the University and INFN Torino is investigating thin silicon sensors as possible candidates for UHDR beam monitoring, exploiting their excellent spatial resolution and well-developed technology. Silicon sensors of 30 and 45 µm active thicknesses and 0.25, 1 and 2 mm2 active areas were tested at the SIT ElectronFlash machine (CPFR, Pisa) on 9 MeV electron beams, featuring a pulse duration of 4 µs, a frequency of 1 Hz, and a dose-per-pulse ranging from 1.62 to 10.22 Gy/pulse. The silicon sensors were positioned at the exit of the ElectronFlash applicator, after a solid water build-up slab, and were readout both with an oscilloscope and with a multi-channel front-end readout chip (TERA08). A response linearity extending beyond 10 Gy/pulse was demonstrated by comparison with a reference dosimeter (FlashDiamond), thus fulfilling the first requirement of a potential application in UHDR beam monitoring.

Automatic rehabilitation assessment method of upper limb motor function based on posture and distribution force.

The clinical rehabilitation assessment methods for hemiplegic upper limb motor function are often subjective, time-consuming, and non-uniform. This study proposes an automatic rehabilitation assessment method for upper limb motor function based on posture and distributed force measurements. Azure Kinect combined with MediaPipe was used to detect upper limb and hand movements, and the array distributed flexible thin film pressure sensor was employed to measure the distributed force of hand. This allowed for the automated measurement of 30 items within the Fugl-Meyer scale. Feature information was extracted separately from the affected and healthy sides, the feature ratios or deviation were then fed into a single/multiple fuzzy logic assessment model to determine the assessment score of each item. Finally, the total score of the hemiplegic upper limb motor function assessment was derived. Experiments were performed to evaluate the motor function of the subjects' upper extremities. Bland-Altman plots of physician and system scores showed good agreement. The results of the automated assessment system were highly correlated with the clinical Fugl-Meyer total score (r = 0.99, p < 0.001). The experimental results state that this system can automatically assess the motor function of the affected upper limb by measuring the posture and force distribution.

A high-performance infrared photoacoustic sensor with improved low-frequency response microphone

Infrared photoacoustic gas sensors with the advantages of good selectivity, low interference, fast response speed, good stability, high accuracy, good explosion-proof performance, high signal-to-noise ratio, and long service life, have developed rapidly in recent years. In order to solve the problem of poor low-frequency response performance of the MEMS piezoelectric thin film microphone sensor prepared with AlN and Mo thin films in infrared photoacoustic gas sensors, this article analyzes its principle and tests an improved solution. The internal stress distribution was changed through hot tempering experiments, significantly improving its structure. The article qualitatively and quantitatively analyzes the inherent mechanism of this phenomenon. The experimental results confirm that the improved scheme improves its response performance under low-frequency signals, with good stability and repeatability.

Investigation of ambient vibration sources for direct energy harvesting by optimizing resonant frequency using proof mass

Ambient mechanical sources typically vibrate below the frequency of 200 Hz, posing challenges for thin film piezoelectric sensors, including low power, high resonant frequency, and small bandwidth. To optimize the electrical energy harvesting from the ambient sources, it is crucial to reduce the resonant frequency of the energy harvester to match that of the ambient sources. In this study, the energy harvester’s resonant frequency dependency on proof mass is thoroughly investigated using the finite element method (FEM). Further, the FEM results are experimentally validated through a custom-designed vibration set-up. Different ambient vibration energy sources, their vibrating frequencies, and accelerations are examined to harness direct mechanical energy and convert it into electric energy using the piezoelectric sensor. Further, the effective proof mass and position are determined to achieve the targeted frequency obtained from ambient sources. Consequently, the harvester is utilized for direct energy harvesting from the ambient sources. The addition of proof mass can lower the resonant frequency of the harvester from 160 Hz to 40 Hz allowing the harvester to vibrate at maximum amplitude to obtain maximum output voltage. Significant enhancement of output power is observed after the tuning of harvester resonant frequency, harvesting a maximum output power of 19.29 μW when mechanically sourced from the bike mirror, measured at an acceleration of 4.50 g at 43 Hz.

A freestanding ferroelectric thin film-based soft strain sensor

Flexoelectric and photo-flexoelectricity are scientifically intriguing and hold considerable potential for various applications such as soft strain sensing, photovoltaics, energy harvesting, etc. Among flexoelectric materials, freestanding ferroelectric thin films are believed to have huge flexoelectricity and tunability due to their excellent lattice regulatory freedom and sustainability to larger strain gradients. In this work, we demonstrated a freestanding BiFeO3(BFO) thin film-based soft strain sensor and explored their flexoelectric coefficient and flexoelectric photovoltaic effect under different strain gradients. Under different bending scales, the photocurrent of the thin film exhibits a step-like variation, indicating that the sensor can measure strain gradient with high sensitivity. These results show the potential application of freestanding ferroelectric films in flexible devices.

Shape detection of thin diameter flexible sensors with non-uniform gratings

Flexible intelligent medical device shape feedback has a very important application prospect in intelligent structure detection. Due to the error accumulation effect, the distribution of gratings is also an important factor affecting the reconstruction error of shape sensors. A grating positions optimization method based on the fusion of adaptive mutation particle swarm optimization algorithm and shape reconstruction algorithm is proposed in the paper. The curves with 10 measurement points arranged at a sensing length of 810 mm and 4 measurement points arranged at a sensing length of 200 mm are simulated and calculated. After multiple optimization training, the sparse optimal distribution of gratings with the smallest shape error is obtained. Package sensors with uniform and non-uniform distribution of grating points based on the obtained point positions, and conduct planar shape reconstruction experiments. After multiple shape reconstruction experiments, the shape errors of the sensor shape reconstruction endpoint for uniform gratings are 2.76% and 2.94%, respectively, and the reconstruction accuracy for non-uniform gratings is 1.94% and 2.71%. The optimized shape sensor has good performance, thus proving the effectiveness of the fiber grating sensing grid point optimization method in flexible medical device deformation monitoring.

Real‐Time and Continuous Monitoring of Brain Deformation

AbstractResearchers have typically studied the brain by monitoring characteristic signals, such as electrophysiology and neurotransmitters by implanted electronics. Here, real‐time monitoring of dynamic deformations of the brain tissue in vivo, is demonstrated, as a new characteristic parameter that is reflective of brain states. As a proof of concept, a thin capacitive deformation sensor is fabricated and implanted between the skull and cortex, and the sensor is shown to effectively monitor dynamic deformations of the cortical surface in the rat brain as induced by respiration and heartbeat under different degrees of anesthesia. This brain monitoring approach based on deformation signals opens up a new direction for understanding the brain.

Vibration Characteristics of FML Cylindrical Shell Bonded by Thin Piezoelectric Actuator and Sensor Layer with and Without Fluid–Structure Interaction Resting on Pasternak Elastic Foundation

The present study investigates the vibration analysis of cylindrical shells composed of fiber metal laminate (FML) with embedded piezoelectric layers, undergoing fluid-structure interaction (FSI) and resting on a Pasternak elastic foundation based on the principles of three-dimensional elasticity theory. Using the state space approach, the equations of motion were derived under simply supported boundary conditions. The natural frequencies of the FML cylindrical shell, accounting for the presence of a moving fluid, were computed by solving the eigenfrequency equations. The study examined the influence of various parameters, including boundary conditions, length-to-radius ratio, fluid type, fluid velocity, circumferential wave number, and radius-to-thickness ratio, on glass-reinforced aluminum laminate (GLARE), aramid-reinforced aluminum laminate (ARALL), and carbon-reinforced aluminum laminate (CARALL). A constant composite/metal volume ratio was assumed. The results obtained were validated by comparing with natural frequency values from the existing literature, confirming the agreement and convergence with previous studies. The results confirm that the highest natural frequency values are assigned to the CARALL, ARALL and GRALE structures in descending order. Furthermore, an increase in fluid flow velocity through the cylindrical shell correlates with a reduction in natural frequency.

Ca3Co4O9-based transverse thermoelectric heat flux sensors with high sensitivity and fast response time

High-temperature thin film heat flux sensors have been fabricated by growing c-axis tilted epitaxial Ca3Co4O9 (CCO) thin films on 5° vicinal cut LaAlO3 (001) single crystal substrates. The layered structure of Ca3Co4O9 yields the significant Seebeck coefficient anisotropy between the ab-plane and c-axis, which could generate a voltage of the heat flux sensor via the transverse thermoelectric (TTE) effect of thin films. A sensitivity of 27.7 μV/(kW/m2) has been determined in such 5° tilted Ca3Co4O9 thin films, which is much larger than other reported ones based on the TTE effect from various materials. After a thermal treatment at 900 °C in air for 10 min, the sensitivity of such heat flux sensors is almost non-variable, which indicates that the temperature resistance of the CCO-based TTE heat flux sensor is as high as 900 °C. In addition, a fast response time of 45 μs has been identified in such CCO-based TTE heat flux sensors. These results demonstrate that the CCO is a promising candidate to manufacture the TTE heat flux sensors with the superiorly comprehensive performance, including the high temperature resistance, high sensitivity, and fast response.

Fiber-optic thin film chemical sensor of 2,4 dinitro-1-chlorobenzene and carbon quantum dots for the point-of-care detection of hydrazine in water samples

The development of DNCB-CQD thin film-based chemical sensors for the rapid and specific detection of hydrazine in various water resources.

Thin film-based chemical sensors of Carbon Quantum Dots (CQDs)-Dithizone for the specific detection of Lead ions in water resources

Abstract Lead (Pb2+) toxicity is one of the scourges that pose hazardous and severe risks to human health and the environment globally. Lead toxicity issues can be addressed primarily by...

Effect of SILAR cycle on gas sensing properties of In2O3 thin films for CO gas sensor

In2O3 thin films were deposited via Successive Ionic Layer Adsorption and Reaction (SILAR) method on glass substrates at 20, 30, 40, and 50 SILAR cycles. The effect of SILAR cycle on the general and CO gas sensing properties of the films was investigated. The GIXRD and FE-SEM results indicated that the films had cubic phase and porous morphology. As a function of temperature and gas concentration, CO gas sensing measurements of In2O3 thin film-based sensors were made, and the detection limit and operating temperature values were determined. The optimal operating temperature was found to be 222 °C for all sensors. The CO sensing results demonstrated that the sensor with 30 SILAR cycle had higher sensitivity for 1–100-ppm gas concentration values at 222 °C operating temperature than the others. The sensing responses of the sensors increased from 12 to 29% for 1-ppm CO gas and from 52 to 91% for 100-ppm CO gas at 222 °C, depending on the SILAR cycle. The detection limit of the sensors toward CO gas at 222 °C reached 1 ppm, and the response and recovery times of the sensor with 30 SILAR cycle were found to be 54.2 s and 49 s for 1-ppm CO, and 47.4 and 62.5 s for 100-ppm CO gas at 222 °C, respectively. The activation energy (Ea) values of the sensors were found to change between 0.08 and 0.15 eV in the temperature range of 300–340 K and between 0.700 and 0.749 eV in the temperature range of 350–520 K, with SILAR cycle number. Finally, in this study, it was revealed that SILAR cycle number changed the structural, morphological, and CO gas sensing properties of the In2O3 thin films, and SILAR cycle optimization was performed for the highly sensitive In2O3 thin film-based CO gas sensor.

Post transition metal substituted Keggin-type POMs as thin film chemiresistive sensors for H2O and CO2 detection.

Chemiresitive sensing allows the affordable and facile detection of small molecules such as H2O and CO2. Herein, we report a novel class of Earth-abundant post transition metal substituted Keggin polyoxometalates (POMs) for chemiresistive sensing applications, with conductivities up to 0.01 S cm-1 under 100% CO2 and 65% Relative Humidity (RH).

Thermal-assisted resistive sensor based on the PdCr alloy thin film for sensitive detection of hydrogen isotopes in helium atmosphere

The detection of hydrogen isotopes is not only the premise of ensuring safety of hydrogen energy, but also has very important application value and scientific significance in the field of fusion energy. Therefore, it is imperative to develop efficient and reliable hydrogen isotope sensors. Herein, a thermal-assisted resistive sensor is constructed based on the hydrogen isotope effect of PdCr alloy thin film for sensitive detection of hydrogen isotopes in helium atmosphere. The permeation of hydrogen isotopes in palladium lattice is facilitated through thermal effect to improve the dynamic response capability of sensor. The research results show that the response time of sensor to hydrogen and deuterium is reduced from 192 s to 113 s–17 s and 10 s respectively. However, the sensitivity deteriorated by about 40% at 110 °C compared with room temperature. Meanwhile, the PdCr alloy thin film resistive sensor represents a remarkable linear response in a range of 0.1%–4% hydrogen and deuterium, with correlation coefficients of 0.9971 and 0.9998 respectively. And the response difference of hydrogen and deuterium may be utilized to discriminate hydrogen isotopes. Furthermore, the sensor exhibits prominent selectivity, extraordinary working stability and a wide range of 100ppm-100%. Therefore, this work presents a feasible approach to design high-performance resistive hydrogen isotope sensors for the development of hydrogen energy and fusion energy.

An Ultrasensitive Laser-Induced Graphene Electrode-Based Triboelectric Sensor Utilizing Trapped Air as Effective Dielectric Layer.

Air, a widely recognized dielectric material, is employed as a dielectric layer in this study. We present a triboelectric sensor with a laser-induced graphene (LIG) electrode and an air-trapped pad using silicone rubber (SR). A very thin device with a thickness of 1 mm and an effective gap for contact-separation between the films of silicone rubber and polyimide (PI) of 0.6 mm makes the device extremely highly sensitive for very low amplitudes of pressure. The fabrication of LIG as an electrode material on the surface of PI is the key reason for the fabrication of the thin sensor. In this study, we showed that the fabricated air-trapped padded sensor (ATPS) has the capability to generate an output voltage of ~32 V, a short-circuit current of 1.2 µA, and attain a maximum power density of 139.8 mW m-2. The performance of the ATPS was compared with a replicated device having a hole on the pad, allowing air to pass through during contact-separation. The observed degradation in the electrical output suggests that the trapped air in the pad plays a crucial role in enhancing the output voltage. Therefore, the ATPS emerges as an ultra-sensitive sensor for healthcare sensing applications.

Plasmon enhanced luminescence of Tb/Eu co-doped film by Au NRs-PVA nanocomposite film.

Plasmonic nanostructures have great potential for improving the radiation properties of emitters. Here, the plasmonic Au nanorods-PVA nanocomposite films are used to uniformly improve the photoluminescence of Tb/Eu co-doped PMMA film within the local micro-region. Under the excitation of 292 nm, the maximum enhancement factor is 37.2-fold for emission at 612 nm and 21.6-fold for emission at 545 nm. Moreover, the finite different time domain simulations are developed to further explain the experimental results. It is indicated that the modulation of luminescence can be attributed to the increase of the local density of optical states through the Purcell effect and the improvement of the energy transfer efficiency between Tb and Eu. Under the excitation of 360 nm, the maximum enhancement factor is about 71.5-fold. In this case, the Au nanorods are mainly used for modulating the emission process at 612 nm, which deduced a greater enhancement factor at 612 nm. This study provides a deep understanding of the interactions between rare earth ions co-doped materials and plasmonic nanostructures, building a bridge to fabricate a useful platform for several applications, such as thin film-based detectors and sensors.

Designed multifunctional sensor to monitor resin permeation and thickness variation in liquid composite molding process

Process monitoring of resin permeation in fiber preform and fabric thickness variation in liquid composite molding (LCM) is important to ensure the quality of the composite parts. However, existing technologies cannot monitor both of them by a single sensor and may disrupt resin flow patterns or fiber deformation inside the part due to their large thickness or rigidity. To achieve accurate monitoring of the signals within the part during the LCM process, a thin and flexible Pt-coated film capacitive sensor was designed to minimize the effect of sensor on flow behaviour. The accuracy of the embedded sensor was verified by the consistent resin flow front and the negligible fiber deformation around the sensor. Moreover, the flow front, thickness variation and curing inside composites preform in LCM can be captured based on the variation of the capacitance curve and its second derivative. These results demonstrated that this multifunctional sensor offers a new solution to obtain signals accurately in the part in LCM.

Inkjet‐Printed Flexible Spin Seebeck Thermopile Device for Low‐Cost Spintronics Device Fabrication

Spin‐momentum‐mediated heat–charge conversion technologies for developing thin thermoelectric generators and heat flow sensors have been extensively studied. The thermoelectric generation (TEG) based on the spin Seebeck (SSE) effect is a promising technology. In this study, a flexible SSE thermopile device is fabricated using inkjet printing with Fe3O4 and Ag nanoparticle (NP) ink. A square Fe3O4 NP and a wire‐shaped Ag NP layer are used as the first and second layers, respectively. These layers are overlaid using inkjet printing twice. To obtain the SSE voltage (VSSE), a thin Pt film is deposited on a printed thermopile device. SSE generators consisting of a Pt thin film/Fe3O4 NP layer are connected through a Ag NP wire to form a thermopile structure. The saturated VSSE of the SSE thermopile device increases with the number of SSE generators. In addition, the SSE‐TEG of an SSE thermopile device is observed using a heat source with a curved surface. In these results, it is indicated that the inkjet‐printing fabrication method holds great potential in both the SSE thermopile devices and the flexible spintronic devices because it is a simple and fast process that does not require lithography.

A thin film resistive humidity sensor based on polymer and carbon black nanoparticle composites

This paper proposes a resistive humidity sensor that uses a carbon-black and polyvinyl alcohol composites thin film, fabricated with a unique film coating method for thinner thickness and higher sensitivity. Improving the sensitivity of sensing films is still of great importance in the research field of gas sensors. The humidity sensor devices with thin composite film and microelectrode structure are fabricated on the glass substrate for a low cost and a simple fabrication process. The sensor gives a rapid response for humidity levels from 10.9% relative humidity (RH) to 73.7% RH, and the response time is about 5.77 s. Experimental results reveal that the sensor has good sensitivity, reproducibility, fast reaction time, and wide range. In addition to humidity, the sensor also responds well to gases such as ethanol. The proposed gas sensor in this paper can be applied to the other combinations of polymers and nanoparticles to form new gas sensors, which have the potential to be used as a gas sensor array for detecting the composition of complex gases such as volatile organic components.