In this research, indium tin oxide (ITO) thin films of various thickness (200, 250, 300, 350, 400nm) were deposited on polycarbonate polymer substrates using a magnetron sputtering technique. The structure, morphology, surface composition, optical and electrical properties of the thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning Electron Microscopy (FE-SEM), X-ray Photoelectron Spectroscopy (XPS), UV-VIS-NIR spectrophotometer and four point probe method, respectively. The results indicated that grain size increased as the thickness increased. The transmittance and sheet resistance of the ITO thin films showed that ITO thin films with 200nm thickness had the highest transmission whereas ITO thin film with 400nm had the best conductivity.
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