Gas sensing characteristics of Fe-doped tungsten oxide thin films

Abstract

This study reports on the gas sensing characteristics of Fe-doped (10at.%) tungsten oxide thin films of various thicknesses (100–500nm) prepared by electron beam evaporation. The performance of these films in sensing four gases (H2, NH3, NO2 and N2O) in the concentration range 2–10,000ppm at operating temperatures of 150–280°C has been investigated. The results are compared with the sensing performance of a pure WO3 film of thickness 300nm produced by the same method. Doping of the tungsten oxide film with 10at.% Fe significantly increases the base conductance of the pure film but decreases the gas sensing response. The maximum response measured in this experiment, represented by the relative change in resistance when exposed to a gas, was ΔR/R=375. This was the response amplitude measured in the presence of 5ppm NO2 at an operating temperature of 250°C using a 400nm thick WO3:Fe film. This value is slightly lower than the corresponding result obtained using the pure WO3 film (ΔR/R=450). However it was noted that the WO3:Fe sensor is highly selective to NO2, exhibiting a much higher response to NO2 compared to the other gases. The high performance of the sensors to NO2 was attributed to the small grain size and high porosity of the films, which was obtained through e-beam evaporation and post-deposition heat treatment of the films at 300°C for 1h in air.