Ag Film Thickness Research Articles

Mechanistic Insights into Plasma Oxidation of Ag Nanofilms: Experimental and Theoretical Studies.

Plasma oxidation of metals has been studied extensively to fabricate nanoporous oxides with the merits of room temperature treatment and facile control of the oxidation rate. Plasma oxidation of Ag, motivated by studies on atomic oxygen corrosion of Ag, is one of the most studied systems. However, several important questions remain unaddressed and even overlooked traditionally: the critical role played by atomic O in promoting oxidation, evolution of microstructures during plasma exposure, and a sound framework for quantitative oxidation kinetic analyses. In this paper, the O2 plasma oxidation behavior of Ag films deposited on Si substrates was systematically studied both experimentally and theoretically. The effects of plasma pressure and power on the microstructural evolution and oxidation kinetics of Ag films of various thicknesses were investigated using comprehensive characterization, as well as numerical analysis of plasma chemistry for deriving atomic O concentration. The findings here provide a full picture and deep mechanistic insights into the morphology and microstructure evolution of Ag films and the growth of dense or porous Ag2O and AgO oxide layers by plasma oxidation, revealing the intricate interplay between atomic O, vacancy creation, Ag ion diffusion, Kirkendall effect, formation of pores, and interfacial void coalescence. The methodology developed here can be easily transferred to help understand the plasma oxidation behavior of other metals.

Deposition and nanoindentation study of a novel TiNi/Ag bi-layer shape memory film

Compositions, surface morphologies and mechanical properties of a novel designed TiNi/Ag bi-layer film grown by DC magnetron sputtering at various processes have been investigated. Ar pressure and sputtering power had significant effects on quality and composition of TiNi/Ag bi-layer films. The TiNi/Ag bi-layer film processed by sputtering under high Ar pressure (0.36 Pa) was porous, while better density films can only be obtained at low pressure (0.12 Pa). The composition of TiNi/Ag bi-layer films can be adjusted by sputtering power. The load-displacement curves show the multiple “pop-ins”along nanoindentation loading, as indentation depth does not exceed the pure Ag film thickness (∼340 nm). At the maximum loading of 140 mN, martensitic transformation induced by nanoindentation in TiNi/Ag bi-layer films was not found, and depth recovery ratio was 39%. Moreover, based on the load displacement curve analysis, the hardness and elastic modulus values of TiNi/Ag bi-layer films were 4 ± 0.2 Gpa and 79 ± 2 Gpa, respectively. Comparing with martensitic phase of single-layer TiNi thin films at room temperature, the coexistence of parent phase and martensitic phase of TiNi/Ag bi-layer films were mainly due to strong confinement effect of Ag layer deposition on TiNi thin film. The residual stress calculated by using conventional sin2ψ method was around −0.458 GPa. The present study provided an important theoretical basis for the preparation of TiNi/Ag bi-layer film with higher quality and performance.

In‐situ elemental reaction‐regulated Ag2S films enable the best thermoelectric performances

AbstractSilver sulfide thin film, with excellent thermoelectric properties, is few reported due to the complex and time‐consuming high‐temperature or high‐pressure synthesis process. Here, a fast ionic conductor n‐type Ag2S film with good crystallinity and uniform density is prepared by sputtering metal Ag films of different thicknesses on glass and then reacting in S precursor solution at low temperature. At 450 K, β‐Ag2S films can be obtained and underwent a phase transition from α‐Ag2S monoclinic, which had a significant effect on their electrical and thermal properties. The grain size of Ag2S films increases with the increase of film thickness. Before and after the phase transition, the carrier concentration and mobility cause obvious changes in the electrical properties of Ag2S. The carrier concentration of body‐centered cubic phase β‐Ag2S is about three orders of magnitude higher than that of monoclinic phase α‐Ag2S, and the mobility is also 2–3 times that of the latter. Especially, after the phase transition, the conductivity of β‐Ag2S rises exponentially from the zero conductivity of α‐Ag2S and increases with the increase of temperature. The Ag2S film shows the highest figure of merit of 0.83 ± 0.30 at 600 K from the sample with ∼1600 nm thickness, which is the highest record among Ag2S‐based thermoelectric materials reported so far.

Bimetal Thin Film, Semiconductors, and 2D Nanomaterials in SPR Biosensors: An Approach to Enhanced Urine Glucose Sensing.

This work introduces a systematic approach for the development of Kretschmann configuration-based biosensors designed for non-invasive urine glucose detection. The methodology encompasses the utilization of various semiconductors, including Silicon (Si), Germanium (Ge), Gallium Nitride (GaN), Aluminum Nitride (AlN), and Indium Nitride (InN), in combination with a bimetallic layer (comprising Au and Ag films of equal thickness) to enhance the biosensor sensitivity. Additionally, 2D nanomaterials, such as Black Phosphorus and Graphene, are integrated into the semiconductor layers to enhance performance further. These configurations are meticulously optimized through the application of the transfer matrix method (TMM), and the sensing parameters are assessed using the angular modulation method. Among the semiconductors, AlN and GaN exhibit superior results. On these substrates, Graphene and Black phosphorous (BP) layers are applied, resulting in four final structures (thicknesses in nm): BK7/Au(26)/Ag(26)/Si(6)/BP(0.53)/Biosample, BK7/Au(26)/Ag(26)/AlN(14)/BP(0.53)/Biosample, BK7/Au(26)/Ag(26)/GaN(12)/BP(0.53)/Biosample, and BK7/Au(26)/Ag(26)/GaN(12)/Graphene(0.34)/Biosample. These biosensors achieve Sensitivity(° /RIU) and Figure of Merit (FoM) (1/RIU) of 380, 360, 440, 400, and 58.5, 90, 90.65, and 82.4, respectively. Subsequently, these high-performing sensors undergo testing with actual urine glucose samples. Among them, two biosensors, BK7/Au(26)/Ag(26)/AlN(14)/BP (0.53)/Biosample and BK7/Au(26)/Ag(26)/GaN(14)/Graphene(0.34)/Biosample, exhibit outstanding performance, with sensitivities (° /RIU) and FoM (1/RIU) of 394.44 & 294.44, and 112.6 & 92.01 respectively. A comparison is also made with relevant previously published work, revealing improved performance in glucose detection.

Hollow Microcavity Electrode for Enhancing Light Extraction.

Luminous efficiency is a pivotal factor for assessing the performance of optoelectronic devices, wherein light loss caused by diverse factors is harvested and converted into the radiative mode. In this study, we demonstrate a nanoscale vacuum photonic crystal layer (nVPCL) for light extraction enhancement. A corrugated semi-transparent electrode incorporating a periodic hollow-structure array was designed through a simulation that utilizes finite-difference time-domain computational analysis. The corrugated profile, stemming from the periodic hollow structure, was fabricated using laser interference lithography, which allows the precise engineering of various geometrical parameters by controlling the process conditions. The semi-transparent electrode consisted of a 15 nm thick Ag film, which acted as the exit mirror and induced microcavity resonance. When applied to a conventional green organic light-emitting diode (OLED) structure, the optimized nVPCL-integrated device demonstrated a 21.5% enhancement in external quantum efficiency compared to the reference device. Further, the full width at half maximum exhibited a 27.5% reduction compared to that of the reference device, demonstrating improved color purity. This study presents a novel approach by applying a hybrid thin film electrode design to optoelectronic devices to enhance optical efficiency and color purity.

Effect of metal seed layer on the critical thickness and photoelectric properties of ultrathin Ag films

To decrease the critical thickness for Ag to form a continuous film and improve the photoelectric properties of the transparent conductive film, the metal seed layer was introduced as a wetting layer, and the metal seed/Ag/AZO composite film was prepared on K9 glass substrates by the magnetron sputtering equipment. The effects of the metal seed layer on both the critical thickness of continuous Ag layer and the photoelectric properties of composite film were investigated. The Al seed layer reduces the critical thickness of the Ag layer to 10 nm, and the square resistance of the Al/Ag (10 nm)/AZO composite film decreases by 5.53 Ω/sq compared to the Ag(10 nm)/AZO bilayer film, while its average transmittance of visible light (380–780 nm) increases by 2.33 %. The Cu seed layer further reduces the critical thickness of the Ag film to 8 nm, and the square resistance of the Cu/Ag(8 nm)/AZO composite film decreases to 9.26 Ω/sq, of which average visible light transmittance reaches 69.34 %. The square resistance of the Cu/Ag (10 nm)/AZO composite film is as low as 7.43 Ω/sq, which is 8.48 Ω/sq lower than that of the Ag (10 nm)/AZO bilayer film.

Plasmon mediated extra-ordinary optical transmission through an apertureless plasmonic metagrating

Extra-ordinary optical transmission (EOT) through subwavelength plasmonic nanoapertures is possible due to the funneling of light via surface plasmons (SPs) at the resonant wavelengths through the apertures. In this Letter, we experimentally demonstrate EOT through a plasmonic metagrating which does not have any open apertures. The plasmonic metagrating was fabricated by deposition of silver (Ag) on a one-dimensionally patterned flexible and transparent polydimethylsiloxane grating obtained via pattern imprinting and subsequent peeling off a commercially available blue ray disk. For normal incidence of transverse magnetic-polarized light on the top surface of plasmonic metagrating, transmission of light through it was obtained in the visible wavelength range of electromagnetic spectrum. Control experiments on variation of Ag film thickness were performed to attain optimal parameters for maximum transmission, followed by polarization and refractive index (RI) dependent performance of the plasmonic metagrating. Electric fields and Poynting vector profiles were simulated using a finite element method to explain the interaction of light with the plasmonic metagrating and the mechanism of plasmon mediated optical transmission. Such a large optical transmission is possible because the SP modes generated at metal–air interface penetrate through metagrating and couple with those supported by the metal–substrate interface. As a model application, RI sensing using the plasmonic metagrating was demonstrated. The present study shows that optical transmission is possible from apertureless structures and enriches literature with better understanding of EOT. Moreover, it opens avenues for development of flexible, cost-effective plasmonic metagratings for sensors, spectral filters, polarizers, etc.

The effect of substrate vibration on Ag nanoparticle formation on SiO2 via thermally-induced dewetting: A molecular dynamics study

Thermally-induced metallic film dewetting on a substrate has huge advantages in paralleled nanofabrication. Although various regulation method of the dewetting process have been investigated, a mobile supporting substrate has been rarely considered. This work investigates how the vertical vibration of a SiO2 substrate affects the thermally-induced silver (Ag) film dewetting by molecular dynamics (MD) simulation. It is revealed that the substrate vibration can significantly promote the dewetting, which dramatically decreases the characteristic dewetting time. This principle of dewetting promotion remains for a tested range of film thickness from 0.2 nm to 0.6 nm. During the substrate vibration, the inertance of Ag film amplifies the film instability and thus promote the dewetting. For a 0.4 nm thick Ag film, the MD simulation shows that appropriate vibration period (T) and vibration amplitude (A) to achieve the promoted dewetting are approximately 2 ∼ 100 ps and 0.1 ∼ 0.4 Å, respectively.

Atomic insights into thickness-dependent deformation mechanism and mechanical properties of Ag/PMMA ultra-thin nanofilms.

In this work, the nanoindentations on bilayer composite nanofilms composed of metal Ag and polymer PMMA were simulated using molecular dynamics. The effects of the thickness of Ag and PMMA on the elastic moduli of the composite films were analyzed from Hertz contact theory, dislocation evolution and atomic migration. The results show that the maximum penetration depth that the Hertz model could well describe is about 6 Å, and this limiting value is almost independent on the film thickness. The deformation mode of the Ag films gradually changes from bending mode to indentation mode with an increase in Ag thickness, which improves the elastic modulus of the composite films. The rule of mixtures could give a theoretical prediction about the elastic modulus of the composite film close to the nanoindentation, and Hertz theory could also be used as long as the thickness of Ag films exceeded a certain value. The introduction of a PMMA layer impedes the development of dislocation in the Ag layer and improves the elastic limit of the composite films. This work provides an important basis for experimentally measuring the overall elastic modulus of metal/polymer composite film based on nanoindentation or extracting the elastic modulus of metal film from the overall indentation response of the composite film.

Ion-imprinted-polymer coated fiber-optic SPR sensor for detection of trace Cr3+ in water

A fiber-optic surface plasmon resonance (SPR) sensor based on the trivalent chromium-ion imprinted polymer (Cr3+-IIP) was proposed and fabricated. A small core-diameter fiber (SCF) with a length of 1 cm is spliced between two multimode fibers (MMFs) to form the MMF-SCF-MMF sensing structure. A 67-nm thick Ag film was evaporated on the outside surface of the SCF, and then Cr3+-IIP and nonionic imprinted polymer materials were respectively coated on the surface of the Ag film and then the fiber-optic SPR sensor was obtained. The results show that with the increase of Cr3+ concentration in the range of 0–1.1 µM, the SPR peak indicates redshift with 80.5 nm. The sensitivity and linearity of the sensor are 71.7 nm/µM and 0.994, respectively. The limit of detection of the sensor is about 0.041 μM (2.145 ppb). The fiber-optic SPR sensor is expected to be applied to the detection of trace Cr3+ ions in water.

LSPR Tunable Ag@PDMS SERS Substrate for High Sensitivity and Uniformity Detection of Dye Molecules.

At present, the use of efficient and cost-effective methods to construct plasmonic surface-enhanced Raman scattering (SERS) substrates of high sensitivity, uniformity and reproducibility is still crucial to satisfy the practical application of SERS technology. In this paper, a localized surface plasmonic resonance (LSPR) tunable flexible Ag@PDMS substrate was successfully constructed by the low-cost bio-template-stripping method and magnetron sputtering technology. The theory proves that the local electromagnetic field enhancement and "hot spot" distribution is adjustable by modifying the size of the optical cavity unit in the periodicity nanocavity array structure. Experimentally, using rhodamine 6G (R6G) as the target analyte, the SERS performance of optimal Ag@PDMS substrate (Ag film thickness for 315 nm) was researched in detail, which the minimum detection limit was 10-11 M and the enhancement factor was calculated as 8.03 × 108, indicating its high sensitivity. The relative standard deviation (RSD) was calculated as 10.38%, showing that the prepared substrate had excellent electromagnetic field enhancement uniformity. At last, the trace detection of Crystal violet (CV, LOD = 10-9 M) and the simultaneous detection of three common dyes (R6G, CV and Methylene blue (MB) mixture) were also realized. This result suggests that the SERS substrate has a good application prospect in the quantitative and qualitative detection of dye molecules.

3D silver metallized nanotrenches fabricated by nanoimprint lithography as flexible SERS detection platform

We report the development of highly sensitive substrates with great potential as Surface-enhanced Raman scattering (SERS) spectroscopy detection platforms, consisting of nanoimprint lithography (NIL) fabricated nanotrenches in plastic and covered by nanostructured silver (Ag) films with thicknesses in the 10–100 nm range deposited by direct current (DC) sputtering. The Ag film thickness was increased by using sequential deposition times and its contribution to the obtained enhancement factor was determined. The morphological and structural properties of the metalized nanotrenches were assessed by scanning electron microscopy (SEM) and atomic force microscopy (AFM) techniques. Crystal violet (CV) was used as analyte to test the SERS activity of the substrates prepared with or without the nanoimprinted pattern. Our original approach was to determine the resulted SERS enhancement from the synergy of three key aspects: the Ag metallization of cheap, flexible substrates, the effect of increasing the Ag film thickness and the periodic nanotrenches imprinted by NIL as substrate. We found a dramatical contribution in the SERS signal of the periodical Ag nanopattern in comparison to the Ag film quantified by a calculated enhancement factor (EF) up to 107 in case of the SERS detection platform with a 25 nm Ag layer on top of the periodic nanotrenches. The contribution of plasmonic nanostructures contained in the Ag films as well as the contribution of the periodical nanopatterned trenches was assessed, as a cumulative effect to the first contribution.This substrate showed a considerably lower limit of detection (LOD) for SERS, down to 10 pM, much better uniformity as well as more reproducible signals in comparison with the other thicknesses of the metallic film.

Optical optimization and thermal stability of SiN/Ag/SiN based transparent heat reflecting coatings

SiN/Ag/SiN heat reflecting coatings were prepared by radio frequency reactive magnetron sputtering on glass substrates. Properties of the coatings were comprehensively investigated in terms of optical property, surface morphology, microstructure and element distribution. It shows that SiN/Ag/SiN coating with the thickness of 30/15/55 nm exhibits a high visible transmittance of 74.6%, and a low infrared emittance of 3.0%. The thickness of Ag film has a significant effect on the spectral selectivity, while the thicknesses of SiN layers affect diffraction position or intensity of the spectrum weakly. The optical property of coating is basically unchanged after annealing in air at 200 ° C for 48 h, but fails over 300 ° C because of the mutual diffusion between Ag film and SiN layers. The high visible transmittance and low infrared emittance of the SiN/Ag/SiN coating makes it a promising candidate for energy conservation coatings.

A CMOS Image Sensor Based Refractometer without Spectrometry.

The refractive index (RI), an important optical property of a material, is measured by commercial refractometers in the food, agricultural, chemical, and manufacturing industries. Most of these refractometers must be equipped with a prism for light dispersion, which drastically limits the design and size of the refractometer. Recently, there have been several reports on the development of a surface plasmon resonance (SPR)-based RI detector, which is characterized by its high sensitivity and simplicity. However, regardless of the prism, an expensive spectrometer is required to analyze the resonance wavelength or angle of incidence. This paper proposes a method that eliminates the need for the prism and other conventional spectrometer components. For this purpose, total internal reflection SPR technology was used on an Ag thin film, and RI analysis was combined with a lens-free CMOS image sensor or a smartphone camera. A finite-difference time-domain (FDTD) numerical simulation was performed to evaluate the relationship between the output power intensity and Ag film thickness for different RIs at three wavelengths of commercial light-emitting diodes (LEDs). The maximum sensitivity of −824.54 RIU−1 was achieved with AG20 at an incident wavelength of 559 nm. Due to its simple design and cost effectiveness, this prism-less, SPR-based refractometer combined with a lens-free CMOS image sensor or a smartphone could be a superior candidate for a point-of-care device that can determine the RIs of various analytes in the field of biological or chemical sensing.

Greatly enhanced hole collection of MoO x with top sub-10 nm thick silver films for gridless and flexible crystalline silicon heterojunction solar cells.

Greatly enhanced hole collection of MoOx is demonstrated experimentally with a top sub-10 nm thick Ag film, allowing for an efficient dopant-free contacted crystalline silicon (c-Si) heterojunction solar cell without a front grid electrode. With the removal of shadows induced by the front grid electrode, the gridless solar cell with the MoOx/Ag hole-selective contact (HSC) shows an increment of ∼8% in its power conversion efficiency (PCE) due to the greatly improved short-circuit current density (Jsc) as well as the almost undiminished fill factor (FF) and open-circuit voltage (Voc), while the gridless solar cells with the conventional MoOx/ITO and pure MoOx HSCs exhibit ∼20% and ∼43% degradations in PCE due to the overwhelming decrease in their FF and Jsc, respectively. Through systematic characterizations and analyses, it is found that the ultrathin Ag film (more conductive than ITO) provides an additional channel for photogenerated holes to transport on MoOx, contributing to the great enhancement in the hole collection and the great suppression of the shunt loss in the gridless solar cells. A 50 μm thick gridless c-Si heterojunction solar cell with the MoOx/Ag HSC is 75% thinner but is 86% efficient compared to its 200 μm thick counterpart (while the 50 μm thick gridless solar cell with the MoOx/ITO HSC is much less efficient). It is over 82% efficient after being bent to a curvature radius as small as 4 mm, also showing superior mechanical flexibility to its counterpart with the MoOx/ITO HSC. Our MoOx/Ag double-layer HSC can be easily fabricated through thermal evaporation without breaking the vacuum, saving both the time and cost of the fabrication of the whole device. Therefore, this work provides a guide for the design of efficient HSCs for high-efficiency, low-cost, and flexible solar cells.

Effect of sputtered silver thin film thickness towards morphological and optical properties of black silicon fabricated by two-step silver-assisted wet chemical etching for solar cells application

Effect of sputtered silver (Ag) thin film thickness towards morphological and optical properties of black silicon (b-Si) fabricated by two-step silver-assisted wet chemical etching for solar cells applications is investigated. The method involves low temperature annealing of crystalline silicon (c-Si) coated with Ag thin films of 10 nm, 15 nm, and 25 nm. This is followed by an etching in a solution of HF:H2O2:DI H2O (1:5:10 volume ratio) at room temperature for 70 s. Dense and spherical Ag NPs with an average diameter of 203 ± 17.8 nm and surface coverage of about 72.5% are achieved on a sample with Ag film thickness of 15 nm prior to the annealing process. After the etching, the average nanopores’ height of ~420 nm with an average diameter of ~200 nm owing to denser Ag NPs on the c-Si surface before the etching are obtained. Optical absorption enhancement due to low weight average reflection (WAR) within wavelength region of 300–1100 nm is observed on the b-Si wafers. Sample with 15 nm of Ag thin film prior to annealing, demonstrates WAR of 7.7% compared 40.0% of the reference planar c-Si. The low WAR is due to the efficient light coupling effect of the b-Si nanopores. The fabricated b-Si nanopores can be used in b-Si solar cells for enhanced optical absorption and high photocurrent in the future.

Improvements in the efficiency of p-type bifacial Si solar cells with a rear Cu electrode using galvanic replacement reactions

A novel method for fabricating the base metal Cu in an air atmosphere was successfully developed based on thick film screen printing of Al pastes and galvanic replacement reactions. The first thick film screen printed Cu electrode with high conductivity (<10−6 Ω-cm), which is comparable to thick film Ag electrode, was successfully made in air firing instead of reducing atmosphere firing.

Импульсная проводимость в Ag-Pd-резисторах, индуцированная импульсами лазера

Pulsed EMF in resistive thick-film Ag - Pd elements is experimentally studied when their surface is irradiated with a laser beam. The dependences of the pulsed EMF on the coordinate of the action of the laser beam on the film surface are obtained. It is shown that applying a constant bias voltage to a thick-film resistive element can significantly increase the amplitude of unipolar EMF pulses induced by laser pulses. It was found that the amplitude and frequency of the EMF signals depend, respectively, on the power and frequency of laser pulses. It is shown that by the value of the pulsed EMF it is possible to control the parameters of the high-power laser radiation incident on the surface in real time. The design of a receiver for recording the parameters of laser radiation based on an Ag - Pd sensitive element has been developed. The sensitivity of the device for measuring the power and pulse repetition rate is estimated.

Fabrication of periodic microscale stripes of silver by laser interference induced forward transfer and their SERS properties

The micro-stripe structure was prepared by laser interference induced forward transfer technique, composed of Ag nano-particles (NPs). The effects of the film thickness with the carbon nano-particles mixed polyimide (CNPs@PI), Ag film thickness, and laser fluence were studied on the transferred micro-stripe structure. The periodic Ag micro-stripe with good resolution was obtained in a wide range of CNPs@PI film thickness from ∼0.5 to ∼1.0 μm for the Ag thin film ∼20 nm. The distribution of the Ag NPs composing the micro-stripe was compact. Nevertheless, the average size of the transferred Ag NPs was increased from ∼41 to ∼197 nm with the change of the Ag donor film from ∼10 to ∼40 nm. With the increase of the laser fluence from 102 to 306 mJ·cm−2 per-beam, the transferred Ag NPs became aggregative, improving the resolution of the corresponding micro-stripe. Finally, the transferred Ag micro-stripe exhibited the significant surface enhanced Raman scattering (SERS) property for rhodamine B (RhB). While the concentration of the RhB reached 10–10 mol·L−1, the Raman characteristic peaks of the RhB were still observed clearly at 622, 1359 and 1649 cm−1. These results indicate that the transferred Ag micro-stripe has potential application as a SERS chip in drug and food detection.

Locally enhanced light–matter interaction of MoS2 monolayers at density-controllable nanogrooves of template-stripped Ag films

Transition metal dichalcogenide (TMD) monolayers, such as MoS2, possess a direct optical bandgap are useful for emerging ultrathin optoelectronics in the visible light range, whereas their thin thickness limits light absorption and emission properties. To address this drawback, one promising approach is to hybridize plasmonic nanostructures with monolayer TMDs to utilize local field enhancement effects owing to localized surface plasmon resonance (LSPR). Herein, we propose a strong enhancement of the local light–matter interaction in MoS2 monolayers on naturally generated nanoscale grooves. The nanogrooves are formed at grain boundaries (GBs) of template-stripped metal film substrates that are fabricated by mechanically stripping Ag films deposited on an ultra-flat Si substrate, wherein the nanogroove densities are systematically modulated by the Ag film thickness. We observe an effective photoluminescence enhancement factor of 758 and a Raman spectroscopy intensity enhancement of approximately 5 times in MoS2 on the subwavelength-scale nanogrooves, compared with that on grain planes, which is attributed to a strong local field enhancement of the LSPR effect. Moreover, this plasmonic enhancement effect is elucidated by dark-field scattering spectroscopy and optical simulations. Our results can facilitate the utilization of density-controllable plasmonic nanogrooves synthesized without nanopatterning techniques for plasmonic hybrids on 2D semiconductors.