Abstract
SiN/Ag/SiN heat reflecting coatings were prepared by radio frequency reactive magnetron sputtering on glass substrates. Properties of the coatings were comprehensively investigated in terms of optical property, surface morphology, microstructure and element distribution. It shows that SiN/Ag/SiN coating with the thickness of 30/15/55 nm exhibits a high visible transmittance of 74.6%, and a low infrared emittance of 3.0%. The thickness of Ag film has a significant effect on the spectral selectivity, while the thicknesses of SiN layers affect diffraction position or intensity of the spectrum weakly. The optical property of coating is basically unchanged after annealing in air at 200 ° C for 48 h, but fails over 300 ° C because of the mutual diffusion between Ag film and SiN layers. The high visible transmittance and low infrared emittance of the SiN/Ag/SiN coating makes it a promising candidate for energy conservation coatings.
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