We present details of the fabrication and operating characteristics of quantum cascade distributed feedback lasers with lateral gratings. These devices emit light with a wavelength of ∼10 µm and operate with pulsed drive current above room temperature. InP-based material offers significant advantages over the GaAs system for mid-infrared quantum cascade lasers. High performance, single-mode lasers are achieved using InP-based material grown by metal organic vapor phase epitaxy and utilising double-sided lateral gratings. The deeply etched gratings were made possible by the development of a high aspect ratio, multi-stage, inductively coupled plasma (ICP) etch process, using Cl2/Ar and SiCl4/Ar gas mixtures. Threshold current density was measured to be ∼5.5 kA/cm2 at a temperature of 293 K. Side mode suppression ratios >20 dB and a tuning coefficient of -0.067 cm-1 K-1 were observed.
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