The subject of the study was thermodiffusion nitrided and silicified layers on steels obtained after plastic deformation. The influence of preliminary plastic deformation on the low-temperature nitriding process and cyclic plastic deformation on the high-temperature silicification process is studied. The results obtained are of interest for accelerating the production processes of chemical-thermal treatment of steels. It is established that preliminary surface plastic deformation contributes to the intensification of the process of ion-plasma nitriding of structural steel. The presence of high-temperature cyclic plastic deformation ensures the intensification of diffusion processes during the resorption of the diffusion silicified layer on structural steel.