With the ever-growing demand for micro products, the influence of micro-features and the functional performance of component surfaces represent a high economical potential. A competitive process for the manufacture of micro products is using micro end mills and a desktop milling machine. Since the topography of machined surfaces affects e.g. the wetting interaction or the bacterial cell adhesion, all relevant finishing steps such as the generation of a plane surface parallel to the machining table and the structuring with micro end mills have to be concerned in order to create functional surfaces. In this paper the generation of plane surfaces and chosen tool paths is described first and then the use of ultra-small micro end mills for slot milling in cp-titanium and the influence of process parameters on bottom surface quality is discussed.