The technology problems of fabricating different, nanometers sized gold particles in the layered composites like light-sensitive chalcogenide glass/gold nanoparticles/transparent substrate or titanium/titanium oxide/gold nanoparticles were investigated in our work. Combination of ion implantation, plasma deposition with annealing processes results physical routes for creation of gold nanoparticles in the mentioned structures, which possess plasmon effects. These functionalized structures are planned to use for investigations of optical recording processes, biocompatibility of titanium implants.