Single Element Detectors Research Articles

Development of silicon drift detectors for synchrotron radiation sources

Synchrotron radiation facilities are essential interdisciplinary research platforms, with performance and efficiency closely tied to detector technology. To meet future requirements, especially the High Energy Photon Source (HEPS), we have conducted key technological research and development on single-element and array Silicon Drift Detectors (SDDs). The research and testing were conducted at the Platform of Advanced Photon Source Technology (PAPS). The test results indicate that the single-element SDD has achieved an energy resolution of 143 eV@5.9 keV (−35 °C), and the 20-unit array-SDD has reached an energy resolution of better than 300 eV@13.96 keV (−40 °C).

Image scanning microscopy reconstruction by autocorrelation inversion

Abstract Confocal laser scanning microscopy (CLSM) stands out as one of the most widely used microscopy techniques thanks to its three-dimensional imaging capability and its sub-diffraction spatial resolution, achieved through the closure of a pinhole in front of a single-element detector. However, the pinhole also rejects useful photons, and beating the diffraction limit comes at the price of irremediably compromising the signal-to-noise ratio (SNR) of the data. Image scanning microscopy (ISM) emerged as the rational evolution of CLSM, exploiting a small array detector in place of the pinhole and the single-element detector. Each sensitive element is small enough to achieve sub-diffraction resolution through the confocal effect, but the size of the whole detector is large enough to guarantee excellent collection efficiency and SNR. However, the raw data produced by an ISM setup consists of a 4D dataset, which can be seen as a set of confocal-like images. Thus, fusing the dataset into a single super-resolved image requires a dedicated reconstruction algorithm. Conventional methods are multi-image deconvolution, which requires prior knowledge of the system point spread functions (PSFs), or adaptive pixel reassignment (APR), which is effective only on a limited range of experimental conditions. In this work, we describe and validate a novel concept for ISM image reconstruction based on autocorrelation inversion. We leverage unique properties of the autocorrelation to discard low-frequency components and maximize the resolution of the reconstructed image without any assumption on the image or any knowledge of the PSF. Our results push the quality of the ISM reconstruction beyond the level provided by APR and open new perspectives for multi-dimensional image processing.

Influence of anode/filtration setup on X-ray multimeter energy response in mammography applications

Quality control and assurance of mammography X-ray generators include the use of solid-state detectors and/or ionization chambers calibrated in standard reference radiation fields. The IEC 61267:2005 standard defines reference mammography radiation fields for Mo/Mo anode/filtration, while various anode/filtration combinations are encountered in clinical mammography X-ray units. Not all Secondary Standard Dosimetry Laboratories have an X-ray generator with Mo/Mo radiation setup. Thus, traceability can be established only for the available anode/filter combinations, commonly limited to W/Al. In this study, W/Al radiation fields were established under laboratory conditions by performing half-value layer measurements. Then, four solid-state detectors were characterized. X-ray multimeter performance was evaluated in terms of energy response in the W/Al radiation fields. In the laboratory conditions, the energy response of the dosimeters had a large deviation from unity for dosimeters without appropriate anode/filter combination selected in the software settings, even though most of the dosimeters had a uniform relative response. The discrepancy in the response was further investigated by examining its variation induced by available detector software settings, and it was determined that the dosimeter response can vary up to 20 %. In a clinical setup, the half-value layer was determined, and detector performance was examined. Dosimeters were tested in clinical fields with Mo/Mo, Mo/Rh, W/Rh, W/Ag anode/filter combinations in the X-ray tube voltage range from 25 kV to 35 kV. For most clinical radiation fields, multi-element detectors had energy response deviation within ±5 %. The single-element detector had one software setting available and exhibited strong energy dependence. Extensive testing of detector response, such as presented in this paper. allows for correction factor interpolation based on the half-value layer.

Enhancing in full-color single-pixel imaging: integrating variable density sampling with hyper-Laplacian priors

Full-color single-pixel imaging aims to restore chromatic images using a single detector element, such as a photodiode or a single-pixel camera. However, image quality is inevitably compromised at low sampling rates due to inefficient sampling methods or incomplete representation of spectrum information. To address these challenges, we meticulously consider the distribution of the image frequency spectrum and the correlation between multiple bands and make further improvements in sampling strategy and reconstruction methods. First, we propose a variable density random sampling strategy based on the exponential distribution to enhance image sampling efficiency. Second, we discover that in most cases, there exists a hyper-Laplacian distribution between spectral mixed images and monochromatic images. Building upon this observation, we designed a hyper-Laplacian prior and seamlessly integrated it into our reconstruction method to enhance the performance of full-color images. Experimental results demonstrate that our method significantly improves the quality of reconstructed full-color images compared to state-of-the-art methods.

Ultrafast longitudinal imaging of haemodynamics via single-shot volumetric photoacoustic tomography with a single-element detector.

Techniques for imaging haemodynamics use ionizing radiation or contrast agents or are limited by imaging depth (within approximately 1 mm), complex and expensive data-acquisition systems, or low imaging speeds, system complexity or cost. Here we show that ultrafast volumetric photoacoustic imaging of haemodynamics in the human body at up to 1 kHz can be achieved using a single laser pulse and a single element functioning as 6,400 virtual detectors. The technique, which does not require recalibration for different objects or during long-term operation, enables the longitudinal volumetric imaging of haemodynamics in vasculature a few millimetres below the skin's surface. We demonstrate this technique in vessels in the feet of healthy human volunteers by capturing haemodynamic changes in response to vascular occlusion. Single-shot volumetric photoacoustic imaging using a single-element detector may facilitate the early detection and monitoring of peripheral vascular diseases and may be advantageous for use in biometrics and point-of-care testing.

Iterative Image Reconstruction Methodology in Optical CT Radiochromic Gel Dosimetry

Modern advancements in radiation therapy require paralleled advancements in the dosimetric tools used to verify dose distributions. Optical computed tomography (CT) imaged radiochromic gel dosimeters provide comprehensive, tissue equivalent, 3D dosimetric information with high spatial resolution and low imaging times. Traditional CT image reconstruction methods (filtered backprojection) do not account for light refraction within the optical CT system reducing the image quality. Iterative reconstruction methods make use of a system matrix that describes this light refraction thus, improving the reconstructed image quality. However, use of iterative reconstruction methods is not widespread, largely due to the impractical storage size of the required system matrix. Furthermore, current iterative reconstruction methods do not address the issue of image degradation due to a single detector element collecting light from multiple raypaths. For optical CT radiochromic gel dosimetry to be used effectively as a radiation therapy treatment plan verification tool, the system must be both practical and accurate. Thus, this work has two main objectives: (i) reduce the size of system matrices by means of polar coordinate discretization in lieu of the traditional Cartesian coordinate discretization, and (ii) reduce image degradation due to multiple raypaths by a novel approach to populating the system matrix that accounts for multiple raypaths.

Single-detector double-beam modulation for high-sensitivity infrared spectroscopy

Balanced detection based on double beams is widely used to reduce common-mode noises, such as laser intensity fluctuation and irregular wavelength scanning, in absorption spectroscopy. However, employing an additional detector can increase the total system noise due to added non-negligible thermal noise of the detector, particularly with mid-infrared (IR) detectors. Herein, we demonstrate a new optical method based on double-beam modulation (DBM) that uses a single-element detector but keeps the advantage of double-beam balanced detection. The sample and reference path beams were modulated out-of-phase with each other at a high frequency, and their average and difference signals were measured by two lock-in amplifiers and converted into absorbance. DBM was coupled with our previously reported solvent absorption compensation (SAC) method to eliminate the IR absorption contribution of water in aqueous solutions. The DBM-SAC method enabled us to acquire IR absorption spectra of bovine serum albumin solutions down to 0.02 mg/mL. We investigated the noise characteristics of DBM measurements when the wavelength was either fixed or scanned. The results demonstrate that DBM can lower the limit of detection by ten times compared to the non-modulation method.

Deep learning on photoacoustic tomography to remove image distortion due to inaccurate measurement of the scanning radius.

Photoacoustic tomography (PAT) is a non-invasive, non-ionizing hybrid imaging modality that holds great potential for various biomedical applications and the incorporation with deep learning (DL) methods has experienced notable advancements in recent times. In a typical 2D PAT setup, a single-element ultrasound detector (USD) is used to collect the PA signals by making a 360° full scan of the imaging region. The traditional backprojection (BP) algorithm has been widely used to reconstruct the PAT images from the acquired signals. Accurate determination of the scanning radius (SR) is required for proper image reconstruction. Even a slight deviation from its nominal value can lead to image distortion compromising the quality of the reconstruction. To address this challenge, two approaches have been developed and examined herein. The first framework includes a modified version of dense U-Net (DUNet) architecture. The second procedure involves a DL-based convolutional neural network (CNN) for image classification followed by a DUNet. The first protocol was trained with heterogeneous simulated images generated from three different phantoms to learn the relationship between the reconstructed and the corresponding ground truth (GT) images. In the case of the second scheme, the first stage was trained with the same heterogeneous dataset to classify the image type and the second stage was trained individually with the appropriate images. The performance of these architectures has been tested on both simulated and experimental images. The first method can sustain SR deviation up to approximately 6% for simulated images and 5% for experimental images and can accurately reproduce the GTs. The proposed DL-approach extends the limits further (approximately 7% and 8% for simulated and experimental images, respectively). Our results suggest that classification-based DL method does not need a precise assessment of SR for accurate PAT image formation.

Multiple scatter correction for single plane Compton camera imaging in nuclear decommissioning

AbstractThis paper focuses on the application of Compton cameras in nuclear decommissioning, aiming to develop efficient and affordable radiological characterization methods. Compton cameras offer advantages over traditional Anger cameras, including increased sensitivity and a larger field of view. We showcase the use of monolithic scintillation detectors in a Compton camera setup to compute two‐dimensional reconstructions of the source location of incident gamma rays. The presence of multiple scattering effects in the large, spatially non‐resolved detectors can lead to spatial artifacts in the reconstructed source activity. To address this, the paper proposes an extended forward model that accounts for double scattering interactions within a single detector element. Experimental and simulation results demonstrate the effectiveness of the proposed approach.

An oscillator-driven, time-resolved optical pump/NIR supercontinuum probe spectrometer.

We present a novel, to the best of knowledge, time-resolved, optical pump/NIR supercontinuum probe spectrometer suitable for oscillators. A NIR supercontinuum probe spectrum (850-1250 nm) is generated in a photonic crystal fiber, dispersed across a digital micromirror device (DMD), and then raster scanned into a single element detector at a 5Hz rate. Dual modulation of pump and probe beams at disparate frequencies permits simultaneous measurement of both the bare reflectance R and its photoinduced change ΔR through lock-in detection, allowing for continuously self-normalized measurement of ΔR/R. Example data are presented on a germanium wafer sample that demonstrate for signals of order ΔR/R ∼ 10-3, a 2.87nm spectral resolution and ≲400fs temporal resolution pre-recompression, and comparable sensitivity to standard time-resolved, amplifier-based pump-probe techniques.

Space-resolved chemical information from infrared extinction spectra

A new method is presented for the extraction of the complex index of refraction from the extinction efficiency, Q_{ext} {({tilde{nu }})}, of homogeneous and layered dielectric spheres that simultaneously removes scattering effects and corrects measured extinction spectra for systematic experimental errors such as baseline shifts, tilts, curvature, and scaling. No reference spectrum is required and fit functions may be used that automatically satisfy the Kramers–Kronig relations. Thus, the method yields the complex refractive index of a sample for unambiguous interpretation of the chemical information of the sample. In the case of homogeneous spheres, the method also determines the radius of the sphere. In the case of layered spheres, the method determines the substances within each layer. Only a single-element detector is required. Using numerically computed Q_{ext}({tilde{nu }}) data of polymethyl-methacrylate and polystyrene homogeneous and layered spheres, we show that the new reconstruction algorithm is accurate and reliable. Reconstructing the complex refractive index from a published, experimentally measured raw absorbance spectrum shows that the new method simultaneously corrects spectra for scattering effects and, given shape information, corrects raw spectra for systematic errors that result in spectral distortions such as baseline shifts, tilts, curvature, and scaling.

Wide-field photoacoustic imaging in a snap with a single-element detector

Photoacoustic imaging has increasing biomedical applications, from fundamental research to clinical translations, due to its high optical absorption contrast and high acoustic resolution in deep tissue

Real-time single-pixel imaging using a system on a chip field-programmable gate array

Unlike conventional imaging, the single-pixel imaging technique uses a single-element detector, which enables high sensitivity, broad wavelength, and noise robustness imaging. However, it has several challenges, particularly requiring extensive computations for image reconstruction with high image quality. Therefore, high-performance computers are required for real-time reconstruction with higher image quality. In this study, we developed a compact dedicated computer for single-pixel imaging using a system on a chip field-programmable gate array (FPGA), which enables real-time reconstruction at 40 frames per second with an image size of 128 × 128 pixels. An FPGA circuit was implemented with the proposed reconstruction algorithm to obtain higher image quality by introducing encoding mask pattern optimization. The dedicated computer can accelerate the reconstruction 10 times faster than a recent CPU. Because it is very compact compared with typical computers, it can expand the application of single-pixel imaging to the Internet of Things and outdoor applications.

Challenging Point Scanning across Electron Microscopy and Optical Imaging using Computational Imaging

Solving challenges of enhanced imaging (resolution or speed) is a continuously changing frontier of research. Within this sphere, ghost imaging (and the closely related single-pixel imaging) has evolved as an alternative to focal plane detector arrays owing to advances in detectors and/or modulation devices. The interest in these techniques is due to their robustness to varied sets of patterns and applicability to a broad range of wavelengths and compatibility with compressive sensing. To achieve a better control of illumination strategies, modulators of many kinds have long been available in the optical regime. However, analogous technology to control of phase and amplitude of electron beams does not exist. We approach this electron microscopy challenge from an optics perspective, with a novel approach to imaging with non-orthogonal pattern sets using ghost imaging. Assessed first in the optical regime and subsequently in electron microscopy, we present a methodology that is applicable at different spectral regions and robust to non-orthogonality. The distributed illumination pattern sets also result in a reduced peak intensity, thereby potentially reducing damage of samples during imaging. This imaging approach is potentially translatable beyond both regimes explored here, as a single-element detector system.

Snapshot photoacoustic topography through an ergodic relay of optical absorption in vivo.

Photoacoustic tomography (PAT) has demonstrated versatile biomedical applications, ranging from tracking single cells to monitoring whole-body dynamics of small animals and diagnosing human breast cancer. Currently, PAT has two major implementations: photoacoustic computed tomography (PACT) and photoacoustic microscopy (PAM). PACT uses a multi-element ultrasonic array for parallel detection, which is relatively complex and expensive. In contrast, PAM requires point-by-point scanning with a single-element detector, which has a limited imaging throughput. The trade-off between the system cost and throughput demands a new imaging method. To this end, we have developed photoacoustic topography through an ergodic relay (PATER). PATER can capture a wide-field image with only a single-element ultrasonic detector upon a single laser shot. This protocol describes the detailed procedures for PATER system construction, including component selection, equipment setup and system alignment. A step-by-step guide for in vivo imaging of a mouse brain is provided as an example application. Data acquisition, image reconstruction and troubleshooting procedures are also elaborated. It takes ~130 min to carry out this protocol, including ~60 min for both calibration and snapshot wide-field data acquisition using a laser with a 2-kHz pulse repetition rate. PATER offers low-cost snapshot wide-field imaging of fast dynamics, such as visualizing blood pulse wave propagation and tracking melanoma tumor cell circulation in mice in vivo. We envision that PATER will have wide biomedical applications and anticipate that the compact size of the setup will allow it to be further developed as a wearable device to monitor human vital signs.

Herriott cell spot imaging increases the performance of tunable laser spectrometers.

With the availability of high-power (milliwatts) single-mode tunable laser sources that operate at room temperature across the infrared (IR) region, tunable laser spectrometers have seen an explosion of growth in applications that include commercial, Earth and planetary science, and medical and industrial sensing. While the laser sources themselves have shown steady improvement, the detection architecture of using a single-element detector at one end of a multipass cell has remained unchanged over the last few decades. We present here an innovative new approach using a detector array coupled to an IR-transmissive mirror to image all or part of the multipass spot pattern of the far mirror and record spectra for each pixel. This novel approach offers improved sensitivity, increased dynamic range, laser power normalization, contaminant subtraction, resilience to misalignment, and reduces the instrument power requirement by avoiding the need for "fringe-wash" heaters. With many tens of pixels representing each spot during the laser spectral scan, intensity and optical fringe amplitude and phase information are recorded. This allows selection and manipulation (e.g., co-addition, subtraction) of the pixel output spectra to minimize optical interference fringes thereby increasing sensitivity. We demonstrate a factor of ∼20 sensitivity improvement over traditional single-element detection. Dynamic range increase of a factor of ∼100 is also demonstrated through spot selection representing different pathlengths. Additionally, subtracting the spectrum of the first spot from that of the higher pass normalizes the laser power and removes the contribution of contaminant gas and fringes in the fore-optics region. These initial results show that this imaging method is particularly advantageous for multi-channel laser spectrometers, and, once the image field is analyzed, pixel selection can be used to minimize data rate and volume collection requirements. This technique could be beneficial to enhanced-cavity detection schemes.

Demonstration of MOCVD-Grown Long-Wavelength Infrared InAs/GaSb Superlattice Focal Plane Array

High-performance InAs/GaSb type-II superlattice infrared detectors and focal plane arrays (FPAs) are normally grown by molecular beam epitaxy (MBE). In this work, we demonstrate the first long-wavelength infrared InAs/GaSb superlattice FPA grown by metalorganic chemical vapor deposition (MOCVD) with clear image. High-quality superlattice material was obtained evidenced by sharp X-ray diffraction peaks and atomic flat surface. Electrical and optical measurements performed on single element detectors showed a 50% cut-off wavelength of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim 10.1~\mu \text{m}$ </tex-math></inline-formula> , a dark current density of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$2.5\times 10^{-5}$ </tex-math></inline-formula> A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , a peak responsivity of 0.88 A/W and a peak detectivity of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$1.7\times 10^{11}$ </tex-math></inline-formula> cm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\cdot $ </tex-math></inline-formula> Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> /W at 80 K. A <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$320\times256$ </tex-math></inline-formula> FPA with <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$30~\mu \text{m}$ </tex-math></inline-formula> pixel pitch was then fabricated. With an integration time of 1.9 ms and an applied bias of -0.1 V, the FPA shows an average operability of 96.96%, a non-uniformity of 4.97%, a noise equivalent temperature difference of 51.1 mK and a peak detectivity of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$2.3\times 10^{10}$ </tex-math></inline-formula> cm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\cdot $ </tex-math></inline-formula> Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> /W at 80 K without thinning down the substrate.

Beamforming for large-area scan and improved SNR in array-based photoacoustic microscopy

Beamforming enhances the performance of array-based photoacoustic microscopy (PAM) systems for large-area scan. In this study, we quantify the imaging performance of a large field-of-view optical-resolution photoacoustic-microscopy system using an phased-array detector. The system combines a low-cost pulsed-laser diode with a 128-element linear ultrasound probe. Signal-to-noise ratio (SNR) and generalized contrast-to-noise ratio (gCNR) are quantified using the phased-array detector and applying three beamforming strategies: a no-beamforming method equivalent to a single-element flat transducer, a fixed focus beamforming method that mimics a single-element focused transducer, and a dynamic focus beamforming using a delay-and-sum (DAS) algorithm. The imaging capabilities of the system are demonstrated generating high-resolution images of tissue-mimicking phantoms containing sub-millimetre ink tubes and an ex vivo rabbit’s ear. The results show that dynamic focus DAS beamforming increases and homogenizes SNR along 1-cm2 images, reaching values up to 15 dB compared to an unfocused detector and up to 30 dB compared to out-of-focus regions of the fixed focus configuration. Moreover, the obtained values of gCNR using the DAS beamformer indicate an excellent target visibility, both on phantoms and ex vivo. This strategy makes it possible to scan larger surfaces compared to standard configurations using single-element detectors, paving the way for advanced array-based PAM systems.

A Passive, Fully Staring THz Video Camera Based on Kinetic Inductance Bolometer Arrays

Current state-of-the-art security video cameras operating in the THz regime employ up to a few hundred detectors together with optomechanical scanning to cover an adequate fieldof-view for practical concealed object detection. As a downside, the scanning reduces the integration time per pixel compromising sensitivity, increases the complexity, and reduces the reliability of the system. In contrast to this, we demonstrate a video camera, for the first time, basing its operation on the concept of a fully staring 2-D detector array with a single detector element responsible for a single imaged pixel. The imaging system is built around the detector technology of kinetic inductance bolometers, allowing the operation in the intermediate temperature range >5K and the scale-up of the detector count into multikilo-pixel arrays and beyond. The system is designed for a field-of-view of 2 × 1 m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and an imaging distance of 2.5 m. We describe the main components of the system and show images from concealed object experiments performed at a near-video rate of 9 Hz.

Fabrication of Pixelated GaAs Detectors for Ultrafast Hard X-Ray Imaging

Sandia National Laboratories is developing GaAs photodiode arrays compatible with the Ultra-Fast X-ray Imager (UXI) platform for sub-nanosecond hard x-ray diagnostics. These 25 µm pitch pixelated detector arrays are particularly useful in the diagnostics of high energy density (HED) experiments to capture spatial variations as they evolve. Existing UXI sensors consist of a backside illuminated Si detector array bonded to a read-out integrated circuit (ROIC), which offers peak sensitivity to soft (<10keV) x-rays [1]. Substituting the Si detector with materials with higher atomic numbers Z, such as GaAs and CdTe, the sensitivity of the imager can be improved for higher x-ray energies [2]. The integration of these higher Z materials at useful pixel sizes and appropriate thicknesses (10s of µm) is challenging due to less mature processing and integration techniques. Here, we report on the fabrication of small pixel arrays using epitaxially-grown GaAs p-i-n diodes, integrated onto Si fanout packages with sub-nanosecond response times.We have previously reported on discrete fast, hard x-ray GaAs detectors [3]. This paper focuses on transferring this prior work on single-element detectors to fine-pitch pixelated imaging arrays. Fabrication of the backside-illuminated detector array begins with the separate fabrication of the Si readout and GaAs detector chips, continues with In bump flip-chip bonding, and is then completed by removing the GaAs substrate and making backside contact to bias the detectors. A cross-sectional schematic of the fabricated device is given in Fig. 1.The Si fanouts were fabricated in the Sandia MESA SiFab facility. Each fanout chip has a series of 1x1 mm2 bonding sites with 25 µm pitch pixels arrays ranging in size from 3x3 to 36x36. Growth and fabrication of the GaAs detectors was carried out in the Sandia MESA MicroFab facility. Molecular beam epitaxy is used to grow a series of wafers with GaAs p-i-n diode structures on commercial n-type GaAs wafers. The epitaxial structure consists of, from the substrate up, 200 nm of undoped GaAs, 400 nm of undoped Al0.4Ga0.6As to serve as an etch stop, 1 µm of n-type GaAs, 4 to 40 µm of undoped GaAs, and 400 nm of p-type GaAs.The GaAs devices are fabricated using standard III-V semiconductor processing techniques. The bond-side (p-contact) metal contact is made with a Ti/Pt/Au metal stack. Next, the pixels are electrically isolated by wet etching through the p-GaAs and into the undoped GaAs region. A silicon nitride passivation is then deposited by PECVD and patterned to reduce dark current [3]. Finally, underbump metal and In bumps are deposited on both the Si fanout and GaAs detector chips. After In deposition, the chips are singulated and flip-chip bonded. After bonding, the parts are underfilled with a low viscosity epoxy to provide additional mechanical stability. The left chip in Fig. 2(a) shows a bonded pair after flip-chip bonding.After bonding, the GaAs substrate is removed to allow backside metallization and illumination. The bulk of the substrate is first removed by mechanical lapping to thin the detector chip from approximately 630 µm to 70 µm. Next, a selective wet etch (5:1 citric acid:H2O2) is used to uniformly etch to the stop layer. Finally, a timed wet etch is used to remove the etch stop layer and expose the backside n-contact. These thinning steps are shown in Figs. 2(a) and (b). Backside metal contacts are formed using a low-temperature process to prevent melting the In bumps [4]. After fabrication, devices are packaged onto a custom PCB designed to allow for flexible readout as shown in Fig. 2(d).Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International, Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA-0003525. This paper describes objective technical results and analysis. Any subjective views or opinions that might be expressed in the paper do not necessarily represent the views of the U.S. Department of Energy or the United States Government.SAND2020-5273AREFERENCES[1] L. Claus, et al., “Design and characterization of an improved, 2 ns, multi-frame imager for the Ultra-Fast X-ray Imager (UXI) program at Sandia National Laboratories,” Proc. SPIE, 10390, 2017.[2] Q. Looker, et al., “Synchrotron characterization of high-Z, current-mode x-ray detectors,” Rev. Sci. Instrum. 91, 023509, 2020.[3] Q. Looker, et al., “GaAs x-ray detectors with sub-nanosecond temporal response,” Rev. Sci. Instrum. 90, 113505, 2019.[4] M. G. Wood, et al., “Formation of Ohmic contacts to n-GaAs at temperatures compatible with indium flip-chip bonding,” Proc. Electrochem. Soc., 881, 2019. Figure 1