Vertically aligned silicon oxide nanowires can be synthesized over a large area by alow-temperature, ion-enhanced, reactive vapour–liquid–solid (VLS) method. Synthesis ofthese randomly ordered arrays begins with a thin indium film deposited on a Si orSiO2 surface. At theprocessing temperature of 190 °C, the indium film becomes a self-organized seed layer of molten droplets, receiving atomicsilicon from a DC magnetron sputtering source rather than from the gaseous precursorsused in conventional VLS growth. Simultaneous vigorous ion bombardment aligns theobjects vertically and expedites mixing of oxygen and silicon into the indium. Silicon oxideprecipitates from each droplet in the form of multiple thin strands having diameters assmall as 5 nm. These strands form a single loose bundle growing normal to the surface,eventually consolidating to form one nanowire. The vertical rate of growth can reach300 nm min−1 in an environment containing argon, hydrogen, and traces of water vapour. This paperdiscusses the physical and chemical factors leading to the formation of the nanostructures.It also demonstrates how the shape of the resulting nanostructures can be furthercontrolled by sputtering, during both VLS growth and post-VLS processing. Keytechnological advantages of the developed process are nanowire growth at low substratetemperatures and the ability to form aligned nanostructure arrays, without the use oflithography or templates, on any substrate onto which a thin silicon film can be deposited.
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