A 90° optical hybrid (OH) based on a 4×4 multimode interference (MMI) coupler is characterized and analyzed using the silica-based planar light circuit. The OH is designed to be polarization-insensitive with an extremely low polarization-dependent loss (<0.18d B) and phase error (w i t h i n±1.3∘). The fabricated chip exhibits an excess loss of 3.4dB and 3.8dB for TE and TM polarizations at 1550nm. The measured phase error is w i t h i n±7.2∘ over 50nm in the C+L band with a polarization-dependent error w i t h i n±3.5∘. The fabrication tolerance of the MMI width and waveguide sidewall angle is analyzed, which can well explain the deviation from the theoretical calculation.