Abstract
In this paper, a compact, low-loss and good-uniformity 1×8 optical power splitter with new Y-branch structure is demonstrated using silica-based PLC technology on quartz substrate. Broadening waveguide and transition waveguide of the new Y-branch are optimized by using 3D BPM. The measurement results show that the insertion loss (IL) and the uniformity (UNIF) of the splitters are less than 9.5dB and 0.35dB, respectively, in the wavelength range from 1.26μm to 1.65μm, and the total product ratio of premium grade in a whole 6in. wafer is more than 95%. The results mean that our technology completely satisfies the need of mass manufacture.
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