Abstract This study presents a first shear horizontal (SH1) mode plate acoustic wave resonator on a −27°YX LiTaO3 (LT) thin plate. The SH1 wave is generated when a backside electrode is formed on the opposite side of an interdigital transducer (IDT). Two resonators, one with Cu and the other with an Al backside electrodes, along with a Cu IDT were simulated and fabricated. Both fabricated SH1 resonators exhibited high phase velocities of 12 km s−1 and bandwidth (BW) of around 4.5%. The temperature coefficient of frequency is −38 ppm °C−1 at resonance and −56 ppm °C−1 at anti-resonance on a 0.13λ thick LT plate. Although the backside electrode is necessary for high coupling of the SH1 wave, it increases the clamp capacitance of the devices, resulting in low impedance characteristics of around 10 Ω and low impedance ratios around 30 dB. Additionally, the suppression of spurious responses is necessary for filter application.
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