GHz surface waves in Al/LiTaO3/Si composite: Effect of the Drude electrode on dispersion, attenuation and mode shapes

Abstract

In fifth generation (5G) mobile communication, radio frequency is in the super high frequency range (3–30 GHz). Thus, different from Ohm law, electrode loss at GHz frequency becomes frequency-dependent. As such, many properties, especially attenuation of piezoelectric acoustic devices, should be reevaluated. In this paper, the attenuation of GHz surface wave propagating in composite structure made of metal electrode, piezoelectric film and elastic half space is investigated based on the loss model of Drude electrode. Specifically, the Al/LiTaO3/Si composite is considered where Rayleigh mode and SH mode are fully coupled. Based on the Stroh-type formalism, the dispersion equations of the composite with the Drude electrode are derived, and compared with the traditional perfect conductor electrode which is under the short circuit boundary condition. The phase velocity, attenuation and wave mode shapes are obtained successfully by the multidimensional moduli ratio convergence method. Numerical results are presented to reveal some interesting intrinsic features, which include two analytical upper bounds of phase velocity, nonexistent validation of intersection points in dispersion curves, and relations among veering, attenuation jumps and wave-mode conversions. These features and relations provide an in-depth insight for GHz wave motion properties in piezoelectric composites.