Single ZnO nanowire metal-oxide-semiconductor field-effect transistors (MOSFETs) were fabricated using nanowires grown by site selective molecular-beam epitaxy. When measured in the dark at 25°C, he depletion-mode transistors exhibit good saturation behavior, a threshold voltage of ∼−3V, and a maximum transconductance of order 0.3mS∕mm. Under ultraviolet (366nm) illumination, the drain–source current increase by approximately a factor of 5 and the maximum transconductance is ∼5mS∕mm. The channel mobility is estimated to be ∼3cm2∕Vs, which is comparable to that reported for thin film ZnO enhancement mode MOSFETs, and the on∕off ratio was ∼25 in the dark and ∼125 under UV illumination.