Resonant Scanning Research Articles

On the design of piezoelectric actuator for 1D MEMS scanning mirror applications

This study presents the design, implementation, and characterization of 1D resonant type micro-electro-mechanical-systems (MEMS) piezoelectric scanning mirrors with different actuator designs to investigate their influences on the figure of merits (FoMs) for automotive light detection and ranging application. The MEMS scanning mirrors are driven by lead zirconate titanate (PZT) thin film in this study owing to its outstanding piezoelectric properties. Three different beam-type piezoelectric actuators are designed, including the reference meander straight-beam actuator design, and the proposed meander curved-beam and straight-curved tapered beam actuator designs. Simulations show the scan angle enhancement for two proposed designs, yet the resonant scanning frequency of meander curved-beam design dropped to below the 2 kHz requirement. To evaluate the designs, scanning mirrors with two proposed actuators are fabricated and tested. Measurements show that the resonant frequencies for the two proposed MEMS scanning mirrors are 1735 Hz and 2578 Hz, respectively. Two proposed designs respectively have the maximum optical angles of 48.1° and 50.6° at the 20 Vpp driving voltage. Due to the much higher stress on the beam structure induced by the misalignment of PZT film, the actuator could not reach the predicted scanning angle of near 80°. In comparison of the two proposed designs, the straight-curved tapered beam actuator design could enhance the FoM for about 56%. In summary, the performances of piezoelectric MEMS scanning mirror can be improved by varying the designs of length and shape of actuator, and the distribution of PZT film on the suspended actuator is also a critical design concern.

Design and development of 1D torsional spring resonant scanner

This paper presents the design and dynamic response of a proposed non- Micro-Electro Mechanical Systems (MEMS) 1D torsional spring resonant scanner. The torsional spring was selected as the compliant structure of the device, and it was fabricated using aluminum with dimensions of 49 x 3.50 x 0.18 mm (L x W x T). An Analysis of Variance (ANOVA) test was performed to determine the difference in mean between the operating resonant frequency and the three types of materials, which are aluminum, stainless steel, and carbon steel. The device operates at a resonant frequency of 80.65 Hz, yielding a maximum scanning angle of 58.06 ˚. Hysteresis was observed from the frequency response chart of the system. By comparing the resonant frequency of the experimental results with the dynamic analysis of this device, the percentage error of the resonant frequency and optical scanning angle was found to be 6.67% and 16.84%, respectively.

On-Chip Frequency Tuning of Fast Resonant MEMS Scanner

The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan angles of 10° and 6° for two orthogonal movement modes with 40 V actuation. On-chip frequency tuning is achieved through electrothermal actuators fabricated adjacent to the mirror main suspension. The electrothermal actuators produce a global and local temperature increase which changes the suspension stiffness and therefore the resonant frequency. A resonance frequency tuning range of up to 5.5 kHz is achieved, with tuning dominant on only one of the two orthogonal scan movement modes. This opens the possibility for precise tuning of a 2D Lissajous scan pattern using a single resonant MEMS scanner with dual orthogonal resonant modes producing full frame update rates up to 20 kHz while retaining the full angular range of both resonant movement modes.

Dynamic Deformation Calculation of Articular Cartilage and Cells Using Resonance-Driven Laser Scanning Microscopy.

The deformation of articular cartilage and its cells at the micro-scale during dynamic activities such as gait has high mechanoregulatory importance. Measuring the cellular geometries during such dynamics has been limited by the rate of microscopic image acquisition. The introduction of resonating mirrors for image rasterization (resonant scanning), rather than the conventional servo control (galvano scanning), has significantly improved the scanning rate by more than 100×. However, the high scanning rate comes at the cost of image quality, thereby posing challenges in image processing. Here, resonance-driven 3-D laser microscopy is used to observe the transient, micro-scale deformation of articular cartilage and its cells under osmotic challenge conditions. Custom image segmentation and deformable registration software were implemented for analysis of the resonance-scanned microscopy data. The software exhibited robust and accurate performance on the osmotic swelling measurements, as well as quantitative validation testing. The resonance-scanning protocol and developed analysis software allow for simultaneous strain calculation of both the local tissue and cells, and are thus a valuable tool for real-time probing of the cell-matrix interactions that are highly relevant in the fields of orthopedic biomechanics, cell mechanobiology, and functional tissue engineering.

Triple‐mode resonant null frequency scanning antenna with positive scanned slope

A novel design approach to triple-mode resonant null frequency scanning antenna (NFSA) with positive scanned slope is proposed. Firstly, a circular sector patch radiator with short-circuited circumference is introduced to generate multiple TM0m (m = 1, 2, …) mode resonances. Then, as theoretically predicted and numerically proved, the first three TM0m (m = 1, 2, 3) modes can be effectively combined to yield null frequency scanning functionality with positive scanned slopes. Next, a prototype antenna is designed, fabricated, and measured. As numerically demonstrated and experimentally validated, the proposed NFSA can exhibit a null frequency scanning functionality in xz-plane with positive scanned slope ranging from θ = −90° to +45° (for null depth smaller than −10 dB) within a fractional impedance bandwidth of about 34.3% (i.e., 2.97‑4.20 GHz).

Frequency-phase shift correction of interlaced lissajous trajectories for precise imaging in endoscopic scanning microscopy

Endoscopic scanners with a resonant scanning fibre cantilever have gained popularity in the biomedical field as optical imaging tools. However, precise characterisation of fibre cantilever-based scanners remains challenging, as the system is susceptible to dynamic discrepancies. To date, discussions regarding the dynamical influence of frequency and phase shift on reconstructed images in the Lissajous scanning system are limited. By looking into the theory behind the dynamic discrepancies, we have formulated mathematical expressions that describe the behaviour of frequency and phase shift on the frequency and phase response of the resonant scanning system. Phase drift occurs as a result of a mismatch between the driving signal and the resonance frequency, which modifies both the actual phase response and the Lissajous trajectory. The Lissajous trajectory shifts as a function of dynamical phase shift and slope. As a result, the coordinate for the Lissajous trajectory shifts in both vertical and horizontal coordinates, thereby causing image distortion and interlacing artifacts during image reconstruction. We verify the mathematical formulation by simulation and experimental confocal imaging of target samples with distinct features. A frequency shift of 0.1 Hz is sufficient to produce the interlacing artifacts. Our results establish that an accurate phase control in the Lissajous scanning system is required for clear, precise reconstructed images. The findings can be extended to non-resonant scanning systems and other scanning patterns. With the phase kept under control, any dynamical issues with a handheld endoscopic scanner can be mitigated to ensure distortion-free image reconstruction. More importantly, the main outcome of this study has proven the ability to reconstruct images precisely on target samples of various feature sizes without any interlacing effect.

Real-time correction of transverse dislocation and distortion in probe-based confocal laser endomicroscopy imaging

High speed scanning system based on resonant scanner can improve the imaging speed of probe-based confocal laser endomicroscopy (pCLE), which makes pCLE be a very effective tool to observe cell tissue morphology in vivo. However, since the speed of resonant scanner changes nonlinearly, transverse distortion will occur when the digitizer collects the image data at a constant rate. Moreover, accurate turning time is hard to be obtained due to the limitation of scanner hardware, although synchronous square wave signals are used for reference. Therefore, it is difficult to accurately segment the bidirectional scanned data into two adjacent lines of the image, which results in image dislocation. In this work, the offset value of each line is obtained by estimating the overall dislocation and local dislocation of the image respectively. Then, the start time of the sampling and sampling interval are adjusted based on the scanner speed to correct the image in real-time by FPGA. As a result, the dislocation and distortion of the image are corrected at video rates.

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner.

Laser scanners with mechanically driven mirrors have exhibited increasing potential for various applications, such as displays and laser radar. Resonant scanners are the predominantly used scanners; however, non-resonant scanners are required for applications where point-to-point driving is desirable. Because a non-resonant drive cannot amplify the drive angle owing to the resonance phenomenon, high values are difficult to achieve for the main performance metrics of the scanners: mirror area, drive angle, and operating frequency. In this paper, we present a two-axis scanner with a piezoelectric actuator made of a piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 as the actuation force source. The scanner contains a circular mirror with a diameter of 7 mm and achieves an average static mechanical deflection angle amplitude of 20.8° in two axes with a resonant frequency of 559 Hz. It is equipped with a transmission mechanism that can decouple each axis to achieve high linearity; in our study, the nonlinearity error was less than 1°.

Single nephron glomerular filtration rate measured by linescan multiphoton microscopy compared to conventional micropuncture

Renal micropuncture, which requires the direct access to the renal tubules, has for long time been the technique of choice to measure the single nephron glomerular filtration rate (SNGFR) in animal models. This approach is challenging by virtue of complex animal preparation and numerous technically difficult steps. The introduction of intravital multiphoton microscopy (MPM) offers another approach to the measure of the SNGFR by mean of the high laser-tissue penetration and the optical sectioning capacity. Previous MPM studies measuring SNGFR in vivo relied on fast full-frame acquisition during the filtration process obtainable with high performance resonant scanners. In this study, we describe an innovative linescan–based MPM method. The new method can discriminate SNGFR variations both in conditions of low and high glomerular filtration, and shows results comparable to conventional micropuncture both for rats and mice. Moreover, this novel approach has improved spatial and time resolution and is faster than previous methods, thus enabling the investigation of SNGFR from more tubules and improving options for data-analysis.

Dual-Axis MEMS Resonant Scanner Using 128∘Y Lithium Niobate Thin-Film

The micro-electro-mechanical systems (MEMS) resonant scanners are in great demand for numerous light scanning applications. Recently, the development of LiDAR in micro-robotics and mobile devices has led to the requirement of ultra-small systems with low driving voltage, low power, compact size and high performance. We have first proposed the dual-axis MEMS scanner using the lithium niobate (LN) thin-film platform, which is expected to fulfill the requirement. This paper describes the actuation principle and scanner structure, meanwhile develops the analytical model for the scanner. The analytical model is later validated by the finite element analysis. The performance of the proposed scanner is improved with the optimization of the orientation of LN and layer thickness. The proposed scanner achieves the θopt·D·f up to 937.8∘·mm·kHz in simulation. The simulated optical angle in the x-axis and y-axis are 50∘ and 42∘ at 1 V, corresponding to resonant frequencies of 79.9 kHz and 558.2 kHz, respectively. With the superior performance of large deflection, high scanning frequency, high figure of merit and low voltage, the proposed MEMS scanner is a promising candidate for fast scanner applications (e.g., wavelength-selective switches and submicron biomedical system), especially the application of LiDAR in mobile devices or micro-robotics.

Diamond Raman laser and Yb fiber amplifier for in vivo multiphoton fluorescence microscopy.

Here we introduce a fiber amplifier and a diamond Raman laser that output high powers (6.5 W, 1.3 W) at valuable wavelengths (1060 nm, 1250 nm) for two-photon excitation of red-shifted fluorophores. These custom excitation sources are both simple to construct and cost-efficient in comparison to similar custom and commercial alternatives. Furthermore, they operate at a repetition rate (80 MHz) that allows fast image acquisition using resonant scanners. With our system we demonstrate compatibility with fast resonant scanning, the ability to acquire neuronal images, and the capability to image vasculature at deep locations (>1 mm) within the mouse cerebral cortex.

High-Repetition-Rate Transient Absorption Spectroscopy of Respiratory Supercomplexes.

Hemeproteins are frequent subjects for ultrafast transient absorption spectroscopy (TAS) because of biological importance, strong UV-vis absorption, high photostability, and interesting transient dynamics that depend on redox, conformation, and ligand binding. TAS on hemeproteins is usually performed on isolated, purified proteins, though their response is likely to be different in their native molecular environment, which involves the formation of protein complexes and supercomplexes. Recently, we reported a transient absorption microscopy (TAM) experiment which elicited a transient response from hemeproteins in intact biological tissue using a visible-wavelength pump (530 nm) and probe (490 nm). Here, we find that adaptive noise canceling plus resonant galvanometer scanning enables a high-repetition-rate fiber laser source to make redox-sensitive measurements of cytochrome c (Cyt-c). We investigate the origins of the visible-wavelength response of biological tissue through TAS of intact mitochondrial respiratory supercomplexes, separated via gel electrophoresis. We find that each of these high-molecular-weight gel bands yields a TAS response characteristic of cytochrome hemes, implying that the TAS response of intact cells and tissue originates from not just Cyt-c but a mixture of respiratory cytochromes. We also find differences in excited-state lifetime between wild-type (WT) and a tafazzin-deficient (TAZ) mouse model of mitochondrial disease.

Evaluation of resonant scanning as a high-speed imaging technique for two-photon imaging of cortical vasculature.

We demonstrate a simple, low-cost two-photon microscope design with both galvo-galvo and resonant-galvo scanning capabilities. We quantify and compare the signal-to-noise ratios and imaging speeds of the galvo-galvo and resonant-galvo scanning modes when used for murine neurovascular imaging. The two scanning modes perform as expected under shot-noise limited detection and are found to achieve comparable signal-to-noise ratios. Resonant-galvo scanning is capable of reaching desired signal-to-noise ratios using less acquisition time when higher excitation power can be used. Given equal excitation power and total pixel dwell time between the two methods, galvo-galvo scanning outperforms resonant-galvo scanning in image quality when detection deviates from being shot-noise limited.

Dual-Band Transceiver High Impedance Coil Array for Ultrahigh Field Magnetic Resonance Imaging

A novel approach for designing an element of an arrayed radio frequency coil for ultrahigh field magnetic resonance imaging (UHF MRI) is presented. The purpose of this approach is to achieve the dual-band transceiver regime in a compact array of magnetic antennas. Our work qualitatively develops the concept of the so-called high-impedance coil (HIC), combined with the adequate interfacing circuitry, which offers the decoupling of the HICs in the array due to the very high self-impedance compared to the mutual impedance. This concept has not been previously thought applicable to dual-band transceiver arrays. We show that, by slightly modifying only the cable shield, we achieve a dual-band transceiver high-impedance coil (dual-band TRHIC). The needed modification implies two asymmetric gaps granting two useful eigenmodes to the cable loop. The resonant excitation of these modes will allow the magnetic resonant scanning of both hydrogen and Phosphorus in the 7 T dc magnetic field. To verify our ideas, we simulated and measured a single TRHIC in both transmitting and receiving regimes and similarly studied two linear arrays made of two and three proposed TRHICs. The method of asymmetric gaps, in our opinion, allows one to engineer the targeted multifrequency operation of arrayed TRHICs decoupled at these frequencies.

Correction of non-uniform angular velocity and sub-pixel jitter in optical scanning.

Optical scanners are widely used in high-resolution scientific, medical, and industrial devices. The accuracy and precision of these instruments are often limited by angular speed fluctuations due to rotational inertia and by poor synchronization between scanning and light detection, respectively. Here we demonstrate that both problems can be mitigated by recording scanner orientation in synchrony with light detection, followed by data resampling. This approach is illustrated with synthetic and experimental data from a point-scanning microscope with a resonant scanner and a non-resonant scanner. Fitting of the resonant scanner orientation data to a cosine model was used to correct image warping and sampling jitter, as well as to precisely interleave image lines collected during the clockwise and counterclockwise resonant scanner portions of the rotation cycle. Vertical scanner orientation data interpolation was used to correct image distortion due to angular speed fluctuations following abrupt control signal changes.

Dynamic wavefront distortion in resonant scanners.

Dynamic mirror deformation can substantially degrade the performance of optical instruments using resonant scanners. Here, we evaluate two scanners with resonant frequencies >12kHz with low dynamic distortion. First, we tested an existing galvanometric motor with a novel, to the best of our knowledge, mirror substrate material, silicon carbide, which resonates at 13.8 kHz. This material is stiffer than conventional optical glasses and has lower manufacturing toxicity than beryllium, the stiffest material currently used for this application. Then, we tested a biaxial microelectromechanical (MEMS) scanner with the resonant axis operating at 29.4 kHz. Dynamic deformation measurements show that wavefront aberrations in the galvanometric scanner are dominated by linear oblique astigmatism (90%), while wavefront aberrations in the MEMS scanner are dominated by horizontal coma (30%) and oblique trefoil (27%). In both scanners, distortion amplitude increases linearly with deflection angle, yielding diffraction-limited performance over half of the maximum possible deflection for wavelengths longer than 450 nm and over the full deflection range for wavelengths above 850 nm. Diffraction-limited performance for shorter wavelengths or over larger fractions of the deflection range can be achieved by reducing the beam diameter at the mirror surface. The small dynamic distortion of the MEMS scanner offers a promising alternative to galvanometric resonant scanners with desirable but currently unattainably high resonant frequencies.

Resonant scanning design and control for fast spatial sampling

Two-dimensional, resonant scanners have been utilized in a large variety of imaging modules due to their compact form, low power consumption, large angular range, and high speed. However, resonant scanners have problems with non-optimal and inflexible scanning patterns and inherent phase uncertainty, which limit practical applications. Here we propose methods for optimized design and control of the scanning trajectory of two-dimensional resonant scanners under various physical constraints, including high frame-rate and limited actuation amplitude. First, we propose an analytical design rule for uniform spatial sampling. We demonstrate theoretically and experimentally that by expanding the design space, the proposed designs outperform previous designs in terms of scanning range and fill factor. Second, we show that we can create flexible scanning patterns that allow focusing on user-defined Regions-of-Interest (RoI) by modulation of the scanning parameters. The scanning parameters are found by an optimization algorithm. In simulations, we demonstrate the benefits of these designs with standard metrics and higher-level computer vision tasks (LiDAR odometry and 3D object detection). Finally, we experimentally implement and verify both unmodulated and modulated scanning modes using a two-dimensional, resonant MEMS scanner. Central to the implementations is high bandwidth monitoring of the phase of the angular scans in both dimensions. This task is carried out with a position-sensitive photodetector combined with high-bandwidth electronics, enabling fast spatial sampling at sim 100 Hz frame-rate.

Optical Identification of the Resonance-Stabilized para-Ethynylbenzyl Radical

We report the spectroscopic observation of the jet-cooled para-ethynylbenzyl (PEB) radical, a resonance-stabilized isomer of C9H7. The radical was produced in a discharge of p-ethynyltoluene diluted in argon and probed by resonant two-color two-photon ionization (R2C2PI) spectroscopy. The origin of the D0(2B1)-D1(2B1) transition of PEB appears at 19,506 cm-1. A resonant two-color ion-yield scan reveals an adiabatic ionization energy (AIE) of 7.177(1) eV, which is almost symmetrically bracketed by CBS-QB3 and B3LYP/6-311G++(d,p) calculations. The electronic spectrum exhibits pervasive Fermi resonances, in that most a1 fundamentals are accompanied by similarly intense overtones or combination bands of non-totally symmetric modes that would carry little intensity in the harmonic approximation. Under the same experimental conditions, the m/z = 115 R2C2PI spectrum of the p-ethynyltoluene discharge also exhibits contributions from the m-ethynylbenzyl and 1-phenylpropargyl radicals. The former, like PEB, is observed herein for the first time, and its identity is confirmed by measurement and calculation of its AIE and D0-D1 origin transition energy; the latter is identified by comparison with its known electronic spectrum (J. Am. Chem. Soc., 2008, 130, 3137-3142). Both species are found to co-exist with PEB at levels vastly greater than might be explained by any precursor sample impurity, implying that interconversion of ethynylbenzyl motifs is feasible in energetic environments such as plasmas and flames, wherein resonance-stabilized radicals are persistent.

Multimodal nonlinear endomicroscopic imaging probe using a double-core double-clad fiber and focus-combining micro-optical concept

Multimodal non-linear microscopy combining coherent anti-Stokes Raman scattering, second harmonic generation, and two-photon excited fluorescence has proved to be a versatile and powerful tool enabling the label-free investigation of tissue structure, molecular composition, and correlation with function and disease status. For a routine medical application, the implementation of this approach into an in vivo imaging endoscope is required. However, this is a difficult task due to the requirements of a multicolour ultrashort laser delivery from a compact and robust laser source through a fiber with low losses and temporal synchronization, the efficient signal collection in epi-direction, the need for small-diameter but highly corrected endomicroobjectives of high numerical aperture and compact scanners. Here, we introduce an ultra-compact fiber-scanning endoscope platform for multimodal non-linear endomicroscopy in combination with a compact four-wave mixing based fiber laser. The heart of this fiber-scanning endoscope is an in-house custom-designed, single mode, double clad, double core pure silica fiber in combination with a 2.4 mm diameter NIR-dual-waveband corrected endomicroscopic objective of 0.55 numerical aperture and 180 µm field of view for non-linear imaging, allowing a background free, low-loss, high peak power laser delivery, and an efficient signal collection in backward direction. A linear diffractive optical grating overlays pump and Stokes laser foci across the full field of view, such that diffraction-limited performance is demonstrated for tissue imaging at one frame per second with sub-micron spatial resolution and at a high transmission of 65% from the laser to the specimen using a distal resonant fiber scanner.

Dual-foci fast-scanning photoacoustic microscopy with 3.2-MHz A-line rate

We report fiber-based dual-foci fast-scanning OR-PAM that can double the scanning rate without compromising the imaging resolution, the field of view, and the detection sensitivity. To achieve fast scanning speed, the OR-PAM system uses a single-axis water-immersible resonant scanning mirror that can confocally scan the optical and acoustic beams at 1018 Hz with a 3-mm range. Pulse energies of 45∼100-nJ are sufficient for acquiring vascular and oxygen-saturation images. The dual-foci method can double the B-scan rate to 2036 Hz. Using two lasers and stimulated Raman scattering, we achieve dual-wavelength excitation on both foci, and the total A-line rate is 3.2-MHz. In in vivo experiments, we inject epinephrine and monitor the hemodynamic and oxygen saturation response in the peripheral vessels at 1.7 Hz over 2.5 × 6.7 mm2. Dual-foci OR-PAM offers a new imaging tool for the study of fast physiological and pathological changes.