Abstract
This paper presents the design and dynamic response of a proposed non- Micro-Electro Mechanical Systems (MEMS) 1D torsional spring resonant scanner. The torsional spring was selected as the compliant structure of the device, and it was fabricated using aluminum with dimensions of 49 x 3.50 x 0.18 mm (L x W x T). An Analysis of Variance (ANOVA) test was performed to determine the difference in mean between the operating resonant frequency and the three types of materials, which are aluminum, stainless steel, and carbon steel. The device operates at a resonant frequency of 80.65 Hz, yielding a maximum scanning angle of 58.06 ˚. Hysteresis was observed from the frequency response chart of the system. By comparing the resonant frequency of the experimental results with the dynamic analysis of this device, the percentage error of the resonant frequency and optical scanning angle was found to be 6.67% and 16.84%, respectively.
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