Linewidth Reduction Research Articles

Theoretical study of point defects on transport properties in metallic interconnections

During the line width reduction, electron scattering caused by various defects in metal interconnects increases dramatically, which causes leakage or short circuit problems in the device, reducing device performance and reliability. Point defects are one of the important factors. Here, using density functional theory and non-equilibrium Green's function methods, we systematically study the effects of point defects on the transport properties of metals Al, Cu, Ag, Ir, Rh, and Ru, namely vacancy defects and interstitial doping of C atom. The results show that the conductivity of all systems decreases compared to perfect systems, because defects cause unnecessary electron scattering. Since the orbital hybridization of the C atom with the Al, Cu and Ag atoms is stronger than that metals Ir, Rh and Ru, the doping of C atom significantly reduces the conductivity of metals Al, Cu and Ag compared to vacancy defects. In contrast, vacancy defects have a greater impact than doping on the transport properties of metals Ir, Rh and Ru, which is mainly attributed to the larger charge transfer of the host atoms around the vacancies caused by lattice distortion. In addition, metal Rh exhibits excellent conductivity in all systems. Therefore, in order to optimize the transport properties of interconnect metals, our work points out that the doping of impurity atoms should be avoided for metals Al, Cu and Ag, while the presence of vacancy defects should be avoided for metals Ir, Rh and Ru, and Rh may be an excellent candidate material for future metal interconnects.

Ultra-low frequency noise external cavity diode laser systems for quantum applications

We present two distinct ultra-low frequency noise lasers at 729 nm with a fast frequency noise of 30 Hz2/Hz, corresponding to a Lorentzian linewidth of 0.1 kHz. The characteristics of both lasers, which are based on different types of laser diodes, are investigated using experimental and theoretical analysis with a focus on identifying the advantages and disadvantages of each type of system. Specifically, we study the differences and similarities in mode behavior while tuning frequency noise and linewidth reduction. Furthermore, we demonstrate the locking capability of these systems on medium-finesse cavities. The results provide insights into the unique operational characteristics of these ultra-low noise lasers and their potential applications in quantum technology that require high levels of control fidelity.

Super-resolution NMR spectroscopy

Spectral resolution is one of the limiting factors in nuclear magnetic resonance (NMR) spectroscopy of biological systems where signal overlap often interferes with chemical shift assignment as well as dynamics and structure analysis. This problem can be addressed in part by using higher magnetic field NMR spectrometers operating at up to 1.2 GHz 1H frequency to enhance the resolution proportionally with the field strength, and by deuteration in combination with transverse relaxation-optimized spectroscopy that reduces the transverse relaxation rate and proportionally the resonance linewidth of the peaks yielding higher spectral resolution. As a complement or alternative to these expensive and often insufficient approaches, we present here a generally applicable method to reduce the linewidth of peaks in indirect dimensions of multi-dimensional NMR spectra by increasing the number of scans per time increment exponentially as a function of time in order to compensate, in part, the decay of the signal caused by transverse relaxation. This enables to achieve a user-defined linewidth of the peaks without undue increase of the noise. Optimization by including in the number of scans also a cosine apodization function as well as processing spectra with an exponential-cosine window function in the direct dimension results typically in a resolution enhancement (linewidth reduction) by a factor of 1.5–2 in comparison to a standard measurement with a constant number of scans per time increment. This is comparable to the 2-fold resolution enhancement that can be obtained by going from a 600 MHz 1H frequency NMR spectrometer to a 1.2 GHz instrument, or from 1.2 GHz to a spectrum measured hypothetically at 2.4 GHz 1H frequency. A factor of two resolution enhancement causes thereby a signal to noise loss of a factor of three. The sensitivity gain by dynamic number of scan sampling is thereby ∼20 % over the use of a digital apodization function.

Versatile, fast, and accurate frequency excursions with a semiconductor laser

Achieving accurate arbitrary frequency excursions with a laser can be quite a technical challenge, especially when steep slopes (GHz/µs) are required, due to both deterministic and stochastic frequency fluctuations. In this work we present a multistage correction combining four techniques: pre-distorsion of the laser modulation, iterative correction, opto-electronic feedback loop, and feed-forward correction. This combination allows us not only to compensate for the non-instantaneous response of the laser to an input modulation but also to correct in real time the stochastic frequency fluctuations. We implement this multistage architecture on a commercial DBR laser and verify its efficiency, first, with monochromatic operation, and second, with highly demanding frequency excursions. We demonstrate that our multistage correction not only enables a strong reduction of the laser linewidth but also allows steep frequency excursions with a relative RMS frequency error well below 1% and a laser spectral purity consistently better than 100 kHz, even in the midst of gigahertz-scale frequency excursions.

Experimental study of the influence of variable external optical feedback on visible laser diode speckle.

This study employs an experimental setup with a variable feedback fraction (fext), external cavity length (ECL), and pump current (J) to investigate their relationships with optical linewidth and external optical feedback-induced speckle contrast (SC) reduction in a visible laser diode. In total, speckle contrast and optical linewidth data for seven feedback fractions, two pump currents, and three external cavity lengths were collected. Achieving optical linewidths up to 3.90 nm (1/e2 width) and a reduction in speckle contrast of up to 41.6%, we also revealed negative correlations between speckle contrast and optical linewidth, and speckle contrast and feedback fraction, and a positive correlation between optical linewidth and feedback fraction.

Linewidth reduced cascaded Raman fiber lasers and their harmonic conversion for visible laser sources

Cascaded Raman Fiber Lasers (CRFLs) are wavelength versatile sources that can provide power at any wavelength in the Near-Infrared (NIR) region. Conventional CRFLs with broadband feedback are widely wavelength tunable but have broad line widths. A feedback mechanism must be used to reduce the broadening of the linewidth without compromising the wavelength tunability. Here, we propose to use a dual feedback mechanism that combines broadband feedback at all wavelengths, using a flat cleave, with filtered feedback at a desired wavelength due to a grating filter. This allows substantial linewidth reduction of CRFLs up to the 6th Raman shifts, from 1100 nm to 1500 nm, and can be extended further. Significantly reduced linewidth with multi-watt in-band output power is achieved with fine wavelength tuning within each Raman Stokes band using a fixed wavelength pump. As an application of linewidth narrowed output, we performed frequency doubling of CRFL output to generate over 100 mW of wavelength tunable yellow-green and yellow output with enhanced efficiency.

Narrow-linewidth Fano microcavities with resonant subwavelength grating mirror

We report on the theoretical and experimental investigations of optical microcavities consisting in the plane-plane arrangement of a broadband high-reflectivity mirror and a suspended one-dimensional grating mirror possessing a high-quality factor Fano resonance. By varying the length of these cavities from the millimeter to the few-micron range, we observe at short lengths the reduction of the spectral linewidth predicted to occur for such a Fano cavity as compared to a conventional broadband mirror cavity with the same length and internal losses. Such narrow linewidth and small modevolume microcavities with high-mechanical quality ultrathin mirrors will be attractive for a wide range of applications within optomechanics and sensing.

Strong Light-Matter Coupling in Lead Halide Perovskite Quantum Dot Solids.

Strong coupling between lead halide perovskite materials and optical resonators enables both polaritonic control of the photophysical properties of these emerging semiconductors and the observation of fundamental physical phenomena. However, the difficulty in achieving optical-quality perovskite quantum dot (PQD) films showing well-defined excitonic transitions has prevented the study of strong light-matter coupling in these materials, central to the field of optoelectronics. Herein we demonstrate the formation at room temperature of multiple cavity exciton-polaritons in metallic resonators embedding highly transparent Cesium Lead Bromide quantum dot (CsPbBr3-QD) solids, revealed by a significant reconfiguration of the absorption and emission properties of the system. Our results indicate that the effects of biexciton interaction or large polaron formation, frequently invoked to explain the properties of PQDs, are seemingly absent or compensated by other more conspicuous effects in the CsPbBr3-QD optical cavity. We observe that strong coupling enables a significant reduction of the photoemission line width, as well as the ultrafast modulation of the optical absorption, controllable by means of the excitation fluence. We find that the interplay of the polariton states with the large dark state reservoir plays a decisive role in determining the dynamics of the emission and transient absorption properties of the hybridized light-quantum dot solid system. Our results should serve as the basis for future investigations of PQD solids as polaritonic materials.

Tilted magnetic anisotropy-tailored spin torque nano-oscillators for neuromorphic computing

Spin torque nano-oscillators (STNOs) hold significant promise for communication and bio-inspired computing applications. However, their modulation capability is constrained by a dilemma between frequency window and linewidth reduction, particularly in hypercritical conditions like the presence of an external magnetic field. This poses a notable challenge in the practical application of STNOs. Here, we report a unique type of all-electrical compact STNOs that employ the tilted magnetic anisotropy (TMA), which can efficiently promote the linewidth Δf reduction and precisely modulate oscillation frequency ranging from 495 to 556 MHz. The developed STNOs consist of a ferromagnetic reference layer with tunable TMA, wherein the spin transfer torque along the tilted spin polarization direction elaborates a self-oscillation of magnetic moments in the free layer without application of magnetic field. The free layer equips in a magnetic droplet oscillation mode, and the oscillation frequency can be modulated either synergistically or independently by varying the current intensity and/or the TMA angle. Nevertheless, the TMA angle primarily governs the deformation of the magnetic droplet and the corresponding oscillation frequency and linewidth. Moreover, a unique 4 × 4 STNO array with optimized input current and TMA configuration is proposed to execute the reservoir computing hardware training based on nonlinear dynamic oscillation phase-coupling characteristics, promising a diverse synchronization map with high kernel quality and low generation rank for highly reliable pattern classification implementation. The developed STNOs possess a simple structure, nonlinearity, high frequency tunability, and compatibility with CMOS processes, enabling them a fundamental component for large-scale integration of advanced hardware in neuromorphic computing.

Nanoscatterer-Assisted Fluorescence Amplification Technique.

Weak fluorescence signals, which are important in research and applications, are often masked by the background. Different amplification techniques are actively investigated. Here, a broadband, geometry-independent and flexible feedback scheme based on the random scattering of dielectric nanoparticles allows the amplification of a fluorescence signal by partial trapping of the radiation within the sample volume. Amplification of up to a factor of 40 is experimentally demonstrated in ultrapure water with dispersed TiO2 nanoparticles (30 to 50 nm in diameter) and fluorescein dye at 200 μmol concentration (pumped with 5 ns long, 3 mJ laser pulses at 490 nm). The measurements show a measurable reduction in linewidth at the emission peak, indicating that feedback-induced stimulated emission contributes to the large gain observed.

Edge-Confined Excitons in Monolayer Black Phosphorus.

Quantum confinement of two-dimensional excitons in van der Waals materials via electrostatic trapping, lithographic patterning, Moiré potentials, and chemical implantation has enabled significant advances in tailoring light emission from nanostructures. While such approaches rely on complex preparation of materials, natural edges are a ubiquitous feature in layered materials and provide a different approach for investigating quantum-confined excitons. Here, we observe that certain edge sites of monolayer black phosphorus (BP) strongly localize the intrinsic quasi-one-dimensional excitons, yielding sharp spectral lines in photoluminescence, with nearly an order of magnitude line width reduction. Through structural characterization of BP edges using transmission electron microscopy and first-principles GW plus Bethe-Salpeter equation (GW-BSE) calculations of exemplary BP nanoribbons, we find that certain atomic reconstructions can strongly quantum-confine excitons resulting in distinct emission features, mediated by local strain and screening. We observe linearly polarized luminescence emission from edge reconstructions that preserve the mirror symmetry of the parent BP lattice, in agreement with calculations. Furthermore, we demonstrate efficient electrical switching of localized edge excitonic luminescence, whose sites act as excitonic transistors for emission. Localized emission from BP edges motivates exploration of nanoribbons and quantum dots as hosts for tunable narrowband light generation, with future potential to create atomic-like structures for quantum information processing applications as well as exploration of exotic phases that may reside in atomic edge structures.

Effect of thermal annealing on the magnetization reversal and spin dynamics in ferrimagnetic TbCo thin films

“Ferrimagnetic rare earth-transition metal alloys are promising materials for high-speed and low-power spintronic device applications due to their wide tunability in magnetic properties as a function of temperature and composition. Here, we report the influence of thermal annealing on the magnetization reversal and spin dynamics of ferrimagnetic Tb10Co90 thin films. We have used the co-sputtering technique for the deposition of two different thicknesses (20 nm and 25 nm) of the TbCo films. Annealing of the samples has been carried out in the vacuum at 350 °C for 1 h. The magnetization reversal and dynamic properties of the as-deposited and annealed films are studied using the magneto-optical Kerr effect and broadband ferromagnetic resonance measurements at room temperature, respectively. The hysteresis loops reveal an anisotropic reversal process. The anisotropy field reduces from 66 Oe to 38 Oe for 20-nm-thick films and 98 Oe to 31 Oe for 25-nm-thick films upon annealing. Consequently, thermal annealing has led to a large reduction (∼70 %) in inhomogeneous linewidth broadening of the ferromagnetic resonance modes. Gilbert damping constant is found to decrease from 0.027 to 0.021 for 20-nm-thick films, whereas it decreases from 0.043 to 0.019 for 25-nm-thick films. The results have been attributed to the enhanced crystallinity of the films as observed in the structural analysis using grazing incidence X-ray diffraction.”

SERF-like magnetometry in room-temperature environment.

We demonstrate an atomic magnetometry using amplitude-modulated pumping and hyperfine repumping techniques in a paraffin-coated cell. By exploiting the constructive interference between spins polarized by the pump beam and an additional repump beam, we observe a three-fold increase in the amplitude of magnetic resonance, along with a reduction in linewidth by approximately two times. The implementation of the repump beam effectively narrows the linewidth, demonstrating successful suppression of spin-exchange relaxation. This reduction in relaxation rate, combined with the enhanced signal, significantly improves the sensitivity of the magnetometer. Consequently, our technique offers a promising approach for achieving SERF-like magnetometry with sub-fT-level sensitivity in Earth-field range and room-temperature environment.

Imaging-Assisted Single-Photon Doppler-Free Laser Spectroscopy and the Ionization Energy of Metastable Triplet Helium.

Skimmed supersonic beams provide intense, cold, collision-free samples of atoms and molecules and are one of the most widely used tools in atomic and molecular laser spectroscopy. High-resolution optical spectra are typically recorded in a perpendicular arrangement of laser and supersonic beams to minimize Doppler broadening. Typical Doppler widths are nevertheless limited to tens of MHz by the residual transverse-velocity distribution in the gas-expansion cones. We present an imaging method to overcome this limitation that exploits the correlation between the positions of the atoms and molecules in the supersonic expansion and their transverse velocities, and thus their Doppler shifts. With the example of spectra of (1s)(np) ^{3}P_{0-2}←(1s)(2s) ^{3}S_{1} transitions to high Rydberg states of metastable triplet He, we demonstrate the suppression of the residual Doppler broadening and a reduction of the full linewidths at half maximum to only about 1MHz in the UV. Using a retroreflection arrangement for the laser beam and a cross-correlation method, we determine Doppler-free spectra without any signal loss from the selection, by imaging, of atoms within ultranarrow transverse-velocity classes. As an illustration, we determine the ionization energy of triplet metastable He and confirm the significant discrepancy between recent experimental [G. Clausen etal., Phys. Rev. Lett. 127, 093001 (2021)PRLTAO0031-900710.1103/PhysRevLett.127.093001] and high-level theoretical [V. Patkós etal., Phys. Rev. A 103, 042809 (2021)PLRAAN2469-992610.1103/PhysRevA.103.042809] values of this quantity.

Chemically Amplified Molecular Glass Photoresist Regulated by 2-Aminoanthracene Additive for Electron Beam Lithography and Extreme Ultraviolet Lithography.

2-Aminoanthracene was used as a nucleophilic additive in a molecular glass photoresist, bisphenol A derivative (BPA-6-epoxy), to improve advanced lithography performance. The effect of 2-aminoanthracene on BPA-6-epoxy was studied by electron beam lithography (EBL) and extreme ultraviolet lithography (EUVL). The result indicates that the additive can optimize the pattern outline by regulating epoxy cross-linking reaction, avoiding photoresist footing effectively in EBL. The EUVL result demonstrates that 2-aminoanthracene can significantly reduce line width roughness (LWR) for HP (Half-Pitch) 25 nm (from 4.9 to 3.8 nm) and HP 22 nm (from 6.9 to 3.0 nm). The power spectrum density (PSD) curve further confirms the reduction of roughness at medium and high frequency for HP 25 nm and the whole range of frequency for HP 22 nm, respectively. The study offers useful guidelines to improve the roughness of a chemically amplified molecular glass photoresist with epoxy groups for electron beam lithography and extreme ultraviolet lithography.

Wideband frequency-tunable optoelectronic oscillator with ultra-narrow linewidth based on stimulated Brillouin scattering

We propose and theoretically analyze a wideband frequency-tunable optoelectronic oscillator based on stimulated Brillouin scattering (SBS) and gain–loss superposition with ultra-narrow linewidth. Typically, the linewidth of optoelectronic oscillator (OEO) based on SBS is difficult to narrow because of the relatively fixed 3-dB bandwidth of SBS. In the structure, three generated new pump lights with certain frequency intervals generated by optical modulation on the pump laser light are launched in a highly nonlinear fiber (HNLF) from the direction opposite to the phase modulated signals, where the SBS effect occurs. The gain spectrum of one pump light is superimposed with the loss spectra of the other two pump lights. As a result the linewidth of the output signal reduces highly compared with conventional OEOs based on SBS. Consequently, a microwave signal with wide tunable range of 1 GHz to 40 GHz and near 60% linewidth reduction at most is realized in theory. Particularly, the theoretical simulation of the phase noise is about −112.5 dBc/Hz at 10 kHz offset when the wavelength of the continuous wave laser is 1550 nm and the frequency of the output signal is 35 GHz. In addition, the proposed method can be generalized, theoretically, to any OEO based on SBS to effectively reduce its linewidth. Overall, the proposed structure improves the quality of generated signals prominently and has vast potential in microwave generation.

Generalized performance optimization for massively-parallel electron-beam systems

The massively-parallel e-beam system (MPES) provides a large number of programmable beams of which the optimal use is critical to maximizing the efficiency of the system. In our previous study of proximity effect correction (PEC) under the constraints of the MPES, the critical dimension error and the line edge roughness were minimized by reducing the feature area to be exposed and varying the dose spatially. In another study, a method to reduce the exposing time while still ensuring a near-optimal PEC result was developed. In this method, the maximum dose difference between two regions of a feature was carefully decreased after first obtaining the optimal linewidth reduction and the spatial dose distribution for the PEC. However, this method designed with an emphasis on the PEC and simplicity may miss the optimal result due to the fixed order of performance metrics considered and was developed for a single feature. To address these limitations, an adaptive optimization method that can handle any combination of performance metrics in a cost function is proposed. It allows for more flexible optimization and can achieve better results than the old method. Additionally, the optimization method is extended for large-scale patterns with uniform features, such as line-space patterns. Also, an effective way to handle the recursive effect among critical locations in a large-scale pattern is described. The simulation results show that the proposed optimization method outperforms the old method in terms of the cost function and linewidth uniformity among the features.

Hybrid integrated narrow-linewidth semiconductor lasers.

Integrated narrow-linewidth lasers are the key devices in compact coherent optical systems of metrology, sensing, and optical microwave generation. Here, we demonstrate a hybrid integrated laser based on an optical negative feedback scheme. The laser is composed of a commercial distributed feedback (DFB) laser diode and an on-chip micro-resonator with a Q-factor of 0.815 million. The feedback optical field is coupled back to the laser cavity through the back facet. Therefore, the laser can maintain the lasing efficiency of the DFB laser diode. The linewidth of the DFB laser diode is compressed from 2MHz to 6kHz, corresponding to the linewidth reduction factor of 25.2dB. The theoretical result shows that the laser performance still has a huge improvement margin through precise control of the detuning between laser frequency and the micro-resonator, as well as the phase delay of the feedback optical field. The hybrid narrow-linewidth laser diode has wide application prospects in coherent optical systems benefitting from the low cost and volume productivity.

Strain-Induced Indirect-to-Direct Bandgap Transition, Photoluminescence Enhancement, and Linewidth Reduction in Bilayer MoTe2.

Two-dimensional (2D) layered materials provide an ideal platform for engineering electronic and optical properties through strain control because of their extremely high mechanical elasticity and sensitive dependence of material properties on mechanical strain. In this paper, a combined experimental and theoretical effort is made to investigate the effects of mechanical strain on various spectral features of bilayer MoTe2 photoluminescence (PL). We found that bilayer MoTe2 can be converted from an indirect to a direct bandgap material through strain engineering, resulting in a photoluminescence enhancement by a factor of 2.24. Over 90% of the PL comes from photons emitted by the direct excitons at the maximum strain applied. Importantly, we show that strain effects lead to a reduction of the overall linewidth of PL by as much as 36.6%. We attribute the dramatic decrease of linewidth to a strain-induced complex interplay among various excitonic varieties such as direct bright excitons, trions, and indirect excitons. Our experimental results on direct and indirect exciton emission features are explained by theoretical exciton energies that are based on first-principles electronic band structure calculations. The consistent theory-experimental trend shows that the enhancement of PL and the reduction of linewidth are the consequences of the increasing direct exciton contribution with the increase of strain. Our results demonstrate that strain engineering can lead to a PL quality of the bilayer MoTe2 comparable to that of the monolayer counterpart. The additional benefit of a longer emission wavelength makes the bilayer MoTe2 more suitable for silicon-photonics integration due to the reduced silicon absorption.

Effective linewidth compression of a single-longitudinal-mode fiber laser with randomly distributed high scattering centers in the fiber induced by femtosecond laser pulses.

Femtosecond lasers can be used to create many functional devices in silica optical fibers with high designability. In this work, a femtosecond laser-induced high scattering fiber (HSF) with randomly distributed high scattering centers is used to effectively compress the linewidth of a fiber laser for the first time. A dual-wavelength, single-longitudinal-mode (SLM) erbium-doped fiber laser (EDFL) is constructed for the demonstration, which is capable of switching among two single-wavelength operations and one dual-wavelength operation. We find that the delayed self-heterodyne beating linewidth of the laser can be reduced from >1 kHz to <150 Hz when the length of the HSF in the laser cavity increases from 0 m to 20 m. We also find that the intrinsic Lorentzian linewidth of the laser can be compressed to several Hz using the HSF. The efficiency and effectiveness of linewidth reduction are also validated for the case that the laser operates in simultaneous dual-wavelength lasing mode. In addition to the linewidth compression, the EDFL shows outstanding overall performance after the HSF is incorporated. In particular, the optical spectrum and SLM lasing state are stable over long periods of time. The relative intensity noise is as low as <-150 dB/Hz@>3 MHz, which is very close to the shot noise limit. The optical signal-to-noise ratios of >85 dB for single-wavelength operation and >83 dB for dual-wavelength operation are unprecedented over numerous SLM fiber lasers reported previously. This novel method for laser linewidth reduction is applicable across gain-medium-type fiber lasers, which enables low-cost, high-performance, ultra-narrow linewidth fiber laser sources for many applications.