Quartz Tuning Fork Temperature Sensor Research Articles

Piezoelectric Resonant Temperature Sensor

This paper describes a piezoelectric resonant tuning fork designed for temperature sensor. The sensor is based on a directly detection and analyses of relationship between frequency shift and temperature change. The main working components of quartz tuning fork temperature sensor are quartz tuning fork resonator (QTFR) and driving circuit, according to the piezoelectric effect principle of quartz crystal, researching on correlative incentive mode, selecting cut type and setting electrodes reasonably, and applying finite element method and Matlab to simulate and analyze the vibration mode as well as temperature and frequency characteristic. The experimental result indicates that the sensitivity of this sensor can reach 70ppm/°C in the temperature range from -30 to 100°C, it guarantees that precision is 0.05°C, the resolution is 0.02°C, and the response time is 4S.

High Precision Low Power Quartz Temperature Transducer

This paper presents the design, fabrication and characterization of quartz tuning fork temperature sensor which is based on new ZY-cut-quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor has been conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor cause by an external temperature. The sensor prototype was successfully fabricated and calibrated from operating from 0°C to 100°C with sensitivity of 70ppm/°C. Experimental results show the sensor has high thermal sensitivity, good stability and well reproducibility. This work represents high precision and low power temperature sensor using the comprehensive thermal characterization of ZY-cut-quartz tuning fork resonator.

High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation

This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 °C with the thermo-sensitivity of 70×10−6/°C. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.

Micro-Temperature Sensor Based on Quartz Tuning Fork Resonator

In this study, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested. The quartz tuning temperature sensor is designed using flexural vibrating mode with a new thermo-sensitive cut. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. When an external temperature is change, there is a shift in its natural frequency. Finite Element Method (FEM) is used to analyze the vibratory modes and optimize the structure of the sensor. The resonance frequency of tuning fork is about 37 kHz with a sensitivity of rough 80 ppm/°C. The experimental results shown that a temperature accuracy of 0.01°C and a resolution of 0.005°C within temperature range from 0 to 100°C, respectively.

Design, Development and Testing of Quartz Tuning Fork Temperature Sensor

In this paper, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested. The quartz tuning temperature sensor is designed vibrating in flexural mode with a new thermo-sensitive cut. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. When an external temperature is change, there is a shift in its natural frequency. Based on this principle, a resonant thermometer is designed. Finite element method is used to analyze the vibratory modes and optimize the structure. The whole structure is 500μm thickness, the length of tuning fork arm is 3076μm and the width of tuning fork arm is 600um, the frequency of tuning fork is about 37kHz with a sensitivity of rough 85 ppm/°C. The experimental results shown that a temperature accuracy of 0.01 °C and a resolution of 0.005 °C within temperature range from 0 °C to 100 °C. All these research are helpful to design satisfactory performance of the sensor for temperature measurement.

Development of a High-Precision Temperature Measurement Instrument Based on Quartz Tuning-Fork Temperature Sensor

This paper presents a high precision temperature measurement instrument based on quartz tuning-fork temperature sensor (QTTS) using Artificial Neural Networks (ANN). The advantage of QTTS is a great sensitivity which makes possible to determine the temperature with the accuracy of 0.01 °C , but the QTTS based temperature measurement instrument often appears as erroneous temperature reading when using standard polynomial calibration techniques over a large temperature range. For high precision temperature measurement, a new method is presented to compensate non-linearity of QTTS based instrument using non-linearity compensation model using ANN by Levenberg-Marquardt algorithm to settle its non-linear problem. The hardware and software parts of the system are integrated in a PC-based instrument used for operation and calibration. ANN based modelling and correction technique has been evaluated experimentally, followed by experimental results obtained by applying the method to QTTS calibration.

Development of an Ultra-Small Smart Temperature Sensor with Quartz Tuning Fork Resonators

This paper discusses a smart temperature sensor system that comprises of a high performance quartz tuning fork temperature sensor, interface with CMOS circuitry and control algorithm for reconfiguration. The ideal thermo-sensitive cut for quartz tuning fork resonators is analyzed with the theory, and is optimized by FEM (Finite Element Method). The specific cut quartz tuning fork was fabricated using photolithography and the etching technology. And the tuning fork sensing element (4 3 2 . 0 1 mm × × ) is so small that can be housed in the capsule ( 6 2× Φ mm). The smart temperature sensor along with the interface IC to FPGA and special control algorithm may easily realize the sensor reconfiguration and the auto-calibration in the field. The experimental result indicates that the sensitivity of this sensor can reach C ppm o / 65 in the temperature range from-20 to 140 C o , it guarantees that precision is C o 01 . 0 , the resolution is C o 001 . 0 , and the response time is 1s.

Theoretical model and optimization of a novel temperature sensor based on quartz tuning fork resonators

To accurately measure temperatures, a novel temperature sensor based on a quartz tuning fork resonator has been designed. The principle of the quartz tuning fork temperature sensor is that the resonant frequency of the quartz resonator changes with the variation in temperature. This type of tuning fork resonator has been designed with a new doubly rotated cut work at flexural vibration mode as temperature sensor. The characteristics of the temperature sensor were evaluated and the results sufficiently met the target of development for temperature sensor. The theoretical model for temperature sensing has been developed and built. The sensor structure was analysed by finite element method (FEM) and optimized, including tuning fork geometry, tine electrode pattern and the sensor's elements size. The performance curve of output versus measured temperature is given. The results from theoretical analysis and experiments indicate that the sensor's sensitivity can reach 60 ppm °C−1 with the measured temperature range varying from 0 to 100 °C.