Abstract
This paper presents the design, fabrication and characterization of quartz tuning fork temperature sensor which is based on new ZY-cut-quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor has been conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor cause by an external temperature. The sensor prototype was successfully fabricated and calibrated from operating from 0°C to 100°C with sensitivity of 70ppm/°C. Experimental results show the sensor has high thermal sensitivity, good stability and well reproducibility. This work represents high precision and low power temperature sensor using the comprehensive thermal characterization of ZY-cut-quartz tuning fork resonator.
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