Abstract
In this study, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested. The quartz tuning temperature sensor is designed using flexural vibrating mode with a new thermo-sensitive cut. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. When an external temperature is change, there is a shift in its natural frequency. Finite Element Method (FEM) is used to analyze the vibratory modes and optimize the structure of the sensor. The resonance frequency of tuning fork is about 37 kHz with a sensitivity of rough 80 ppm/°C. The experimental results shown that a temperature accuracy of 0.01°C and a resolution of 0.005°C within temperature range from 0 to 100°C, respectively.
Highlights
Precise temperature measurement is an important part of modern technology
The resonance frequency-temperature characteristic of the thermo-sensitive quartz tuning fork resonator is importantly depend on the working mode of vibration and the cut angle of the quartz plate
The frequency of the quartz tuning fork temperature sensor is connected to oscilloscope (RIGOL DS5102ACE) and frequency counter (Agilent 34411A)
Summary
Precise temperature measurement is an important part of modern technology. Over the past two decades, several advances have been made in micro-machined sensor and actuators, a number of research works were focused on quartz sensors, theoretically and in terms of micro fabrication. Due to benefit like high sensitivity, small size, mechanical robustness and cost effective fabrication, piezoelectric resonators have widely been utilized for temperature measurement sensors. Quartz tuning forks are more attractive due to their low power consumption, low cost, high resolution, high precision, long stability and full-digital frequency output signal. The optimal selection of quartz crystal cuts is carried out which yields the best performances It concerns tuning fork resonators vibrating in flexure mode with clamped-free boundary conditions. SENSOR DESIGN In this study, micro-machined quartz tuning fork resonators vibrating in a flexural mode are adopted. The resonance frequency-temperature characteristic of the thermo-sensitive quartz tuning fork. Corresponding Author: Jing Ma, Department of Automation, Harbin University of Science and Technology, Harbin, 150080, China In this analytical model, Let us consider cantilever of thickness T, width W and length L.
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