Theoretical model and optimization of a novel temperature sensor based on quartz tuning fork resonators

Abstract

To accurately measure temperatures, a novel temperature sensor based on a quartz tuning fork resonator has been designed. The principle of the quartz tuning fork temperature sensor is that the resonant frequency of the quartz resonator changes with the variation in temperature. This type of tuning fork resonator has been designed with a new doubly rotated cut work at flexural vibration mode as temperature sensor. The characteristics of the temperature sensor were evaluated and the results sufficiently met the target of development for temperature sensor. The theoretical model for temperature sensing has been developed and built. The sensor structure was analysed by finite element method (FEM) and optimized, including tuning fork geometry, tine electrode pattern and the sensor's elements size. The performance curve of output versus measured temperature is given. The results from theoretical analysis and experiments indicate that the sensor's sensitivity can reach 60 ppm °C−1 with the measured temperature range varying from 0 to 100 °C.