The paper presents the effect of substrates on the characteristics of PbZrxTi1−xO3 (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al2O3), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.