For applications in vacuum metrology, gas flowmeters have to deliver pure gas flows with well-knownmolar flow rates of low (< 10-6 mol/s) and very low values. Accurate flowmeters are used to generate pressures in continuous expansion systems, to measure leak rates, and to measure pumping speeds of ultrahigh-vacuum pumps. At the Physikalisch-Technische Bundesanstalt (PTB) a new, fully automated, all-metal flowmeter was commissioned for use with a continuous expansion system in the pressure range 10-10 Pa to 3 × 10-2 Pa. It delivers gas flows with molar flow rates between 4 × 10-13 mol/s and 10-6 mol/s (throughputs 10-6 Pa l/s to 3 Pa l/s at 23 °C) withrelative standard uncertainties ranging from 1.45% at 4 × 10-13 mol/s down to 0.14% at 10-6 mol/s.
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