A-site Ce and B-site Zr codoped Bi1−x Ce x Fe1−y Zr y O3 (BCFZ) thin films with different compositions were successfully prepared on the Pt/Ti/SiO2/Si substrates by chemical solution deposition. The influence of the A-site Ce and B-site Zr codoping on the structure, surface morphology, electrical and magnetic properties of BFO films were investigated, respectively. The comparative study suggested that the A-site Ce doping with various contents have notable influences on the electrical properties of the BFO films, while the B-site Zr doping with different contents affect mainly the magnetic properties of the BFO films. Compared with the other BCFZ films studied here, the Bi0.97Ce0.03Fe0.97Zr0.03O3 film showed the lowest dielectric loss and leakage current density, a well-squared P–E loop and fatigue-free characteristics as well as the strong magnetization.
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