It is known that electrophotochromism of a WO 3 film dramatically depends on its microstructure. To probe the influence of the microcomposition and the microstructure on the electrophotochromism of the VE-WO 3 film, we employed a method based on laser microprobe mass spectrometry to simulate the sublimation process of WO 3 with conditions mimicking those in vacuum evaporation. Both positive and negative ion clusters containing no more than six tungsten atoms were generated from direct laser vaporization of WO 3 powder. The fragment valence calculation on the ion clusters showed that a valence of six was the ideal oxidation state for tungsten. The X-ray photoelectron spectroscopy results also confirmed the formation of stoichiometric units in the deposited film. Based on experimental results, (WO 3) x , especially (WO 3) 3 and (WO 3) 4, were found to be the major component units in the vacuum evaporated (VE) film.
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