Abstract
In the present work, the comparative studies of relative yields, mass distributions and kinetic energy spectra of secondary Nbn+ ions (n=1–16) sputtered from niobium target by atomic and polyatomic Aum− projectiles (m=1–3) with the energy E0=6–18 keV/atom have been carried out. The strong effect of anomalously high non-additivity of metal sputtering as positive large cluster ions under polyatomic ion bombardment was found. The comparison and discussion of the results obtained for Nb and for Ta are presented.
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