The identification of Fe, Ni and Cr nitrides formed by nitrogen-ion implantation (4×10 17 N + cm -2, 50 keV) in austenitic steels is performed by X-ray diffraction under very low glancing angles (0.00 ⩽ i ⩽ 1.5°). Spectra obtained with increasing angles i permit the investigation of layers with depths varying from 20 to more than 1000 Å. This non-destructive technique allows the surface to be controlled at each step of the treatments. Spectra were recorded on polished steel prior to and after implantation, with or without electrochemical attack. A 100 Å martensitic layer formed during the mechanical polishing is observed on the austenitic substrate. This layer is destroyed by an anodic attack before implantation of the samples. After implantation a CrN or carbonitride overlayer of a few tens of Å in thickness, may be observed. In the subjacent layers several iron and nickel nitrides are present, mainly ϵ-Fe 2N-Fe 3N, ς-Fe 2N and Ni 3N.