Welding on thin aluminum alloy material is still relatively difficult, so that appropriate welding technology is needed to joint the ultra-thin aluminum material. One of the processing welding capable of solving to ultra-thin aluminium is micro friction stir spot welding μFSSW). The micro FSSW process is an adaptation of the FSW process where solid-state processes allow the welding process without changes in the basic characteristics of the workpiece. The purpose of this study was to analyze the effect parameters used in this study are pinless tool diameter and plunge depth on micro FSSW. The material used in this study was A1100 with a thickness of 0.42 mm using lap joint. The welding parameters used in this study are tool diameter and plunge depth, where each parameter has three levels. While the response variables observed were mechanical and fractures properties. To analyze maximum shear strength/load using response surface methodology (RSM). Experimental results and analysis of influence tool diameter and plunge depth on micro-friction stir spot welding μFSSW) analysis show that tool diameter and plunge depth are directly proportional to maximum shear load. Furthermore, the smallest hook defect occurs on the tool diameter 5 mm with plunge depth 500 μm.