Abstract The design, materials, process, and fabrication of a heterogeneous integration of 4 chips by a FOPLP (fanout panel-level packaging) method are investigated in this study. Emphasis is placed on (a) the application of a dry-film EMC (epoxy molding compound) for molding the chips, and (b) the application of a special assembly process called Uni-SIP (uni-substrate-integrated-package) for fabricating the RDLs (redistribution layers) of the FOPLP. The ABF (Ajinomoto build-up film) is used as the dielectric of the RDLs and is built up by the SAP (semi-additive process). The electroless Cu is used to make the seed layer, the LDI (laser direct imaging) is used for opening the photoresist, and the PCB (printed circuit board) Cu plating is used for making the conductor wiring of the RDLs. The panel dimensions are 508mm × 508mm. The package dimensions of the FOPLP are 10mm × 10mm. The large chip size and the small chip sizes are, respectively 5mm × 5mm and 3mm × 3mm.
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