Nanosecond pulse discharge plasma has many prospects in industrial applications, and high-voltage repetitive nanosecond pulse generators with compact design and light weight have become one of the key issues limiting its development in some applications. This paper presents a high voltage series-connected silicon carbide (SiC) metal-oxide -semiconductor field effect transistor ( MOSFET s) module which can be served as the main switch in a repetitive high-voltage nanosecond pulse generator. This kind of series-connected MOSFET s module with only single external gate driver requiring very few components is very suitable for compact assembly. By analyzing the working principle, three topologies of series-connected MOSFET s module are proposed. The switching behaviors of the three different topologies with four SiC MOSFET s series-connected are compared experimentally. The variation of switching characteristics of series-connection SiC MOSFET s module with different numbers of devices are investigated. The layout is also optimized to shorten pulse front time and improve output pulse quality. Furthermore, a 10 kV SiC MOSFET s module with a turn- on transition time ∼10 ns is developed. The double pulse test result demonstrates excellent switching performances. Finally, a compact and high-voltage pulse generator composed of three 10 kV SiC MOSFET s module is tailored, with a typical rise time ∼40 ns and peak voltage of ∼30 kV.