Multilevel Diffractive Optical Elements Research Articles

Four-level diffractive photon sieves by deep-UV femtosecond laser ablation

A growing demand for complex light manipulation and miniaturization of optics necessitates advanced optical elements, operating on light diffraction phenomena, capable not only of reshaping the intensity distribution but also integrating many optical functions in a compact, durable device. The prevailing fabrication methods for these elements often involve multi-step lithographic processes. In contrast, direct laser ablation offers a single-step, cost-effective, and maskless alternative. However, using solid-state laser systems’ fundamental wavelength (in the IR range) for ablation lacks the precise depth control required for multi-level diffractive optical element fabrication. In this paper, we present the first experimental proof that femtosecond direct laser ablation in the UV spectral range is a reliable method for fabricating diffractive optical elements. We demonstrate the high-quality production of compact photon sieve focusing elements with the shortest focal length ever reported at 9 mm. Furthermore, we report an efficiency of 3.3%, which, to our knowledge, is the highest for elements with such a small focal length and not far from the theoretical efficiency limit of 4.46% (considering perfect cylindrical ablated pits). Moreover, our fabricated elements focus light to a 2.3% smaller focal spot if compared to the refractive lens with the same parameters. This fabrication method shows great promise for advanced applications that require precise depth control in wide band gap materials, such as the fused quartz used in this study.

Thermally Triggered Multilevel Diffractive Optical Elements Tailored by Shape-Memory Polymers for Temperature History Sensors.

The morphological transitions induced by external stimuli in shape-memory polymers (SMPs) can be exploited with the real-time response of far-field diffraction patterns in diffractive optical elements (DOEs). In this paper, we combine the temperature characteristics of SMPs and the display characteristics of DOEs to obtain an optical temperature sensing film where the temperature information is taken as a change of far-field diffraction images. This process was achieved by imprinting the micropatterns of the DOEs on the epoxy-based SMP film, which can be programmed to hold a temporary optical image and revert to its original image upon exposure to a specific temperature. Furthermore, the specific temperature at which the image transformation occurs can be customized by varying the chain flexibility of the SMP. Based on a range of transition points, by imprinting the desired combination of SMP-DOEs on a film, a sensor that can record and inform the temperature history is demonstrated. As for the feasible application of this technique, it can be used for the compact and reliable optical temperature indicators, which can be applied in temperature-sensitive industries such as food and pharmaceuticals.

Simulating multilevel diffractive optical elements on a spatial light modulator.

Multilevel diffractive optical elements (DOEs) offer a solution to approximate complex diffractive phase profiles in a stepwise manner. However, while much attention has focused on efficiency, the impact on modal content in the context of structured light has, to our best knowledge, remained unexplored. Here, we outline a simple theory that accounts for efficiency and modal purity in arbitrary structured light produced by multilevel DOEs. We make use of a phase-only spatial light modulator as a "testbed" to experimentally implement various multileveled diffractive profiles, including orbital angular momentum beams, Bessel beams, and Airy beams, outlining the subsequent efficiency and purity both theoretically and experimentally, confirming that a low number of multilevel steps can produce modes of high fidelity. Our work will be useful to those wishing to digitally evaluate modal effects from DOEs prior to physical fabrication.

High‐Fidelity Far‐Field Microscopy at λ/8 Resolution

AbstractThe emergence of far‐field super‐resolution microscopy has rejuvenated the possibility for nanoscale imaging. Approaches to far‐field super‐resolution that utilize point scanning often depend on spatially reducing the size of the focused spot. However, the focused spot always achieves high resolution at the expense of extremely low light efficiency for the probing mainlobe and high‐intensity sidelobes, which limits the applications in nanoscale imaging and might cause misinterpretation of samples. Here, a sharp probing spot is reported with the diffraction efficiency of 3.76% at the resolution of 38% of the Airy spot size assisted by the 2D multilevel diffractive optical element (DOE) experimentally. The diffraction efficiency of DOE is improved by at least two orders of magnitude at the same resolution by breaking the limitation of circular 0–π binary structure superoscillatory lens. To eliminate the influence of the high‐intensity sidelobes, high‐fidelity images are reconstructed based on the modified deconvolution algorithm by virtue of the prior knowledge. Finally, high‐fidelity far‐field microscopy (HiFi‐FM) is constructed and experimental results show that HiFi‐FM allows the resolution of spatially complex samples better than 69 nm while acquiring high fidelity.

Etch-free additive lithographic fabrication methods for reflective and transmissive micro-optics.

With the widespread application of micro-optics in a large range of areas, versatile high quality fabrication methods for diffractive optical elements (DOEs) have always been desired by both the research community and by industry. Traditionally, multi-level DOEs are fabricated by a repetitive combination of photolithography and reactive-ion etching (RIE). The optical phase accuracy and micro-surface quality are severely affected by various etching artifacts, e.g., RIE lag, aspect ratio dependent etching rates, and etching artifacts in the RIE steps. Here we propose an alternative way to fabricate DOEs by additively growing multi-level microstructures onto the substrate. Depth accuracy, surface roughness, uniformity and smoothness are easily controlled to high accuracy by a combination of deposition and lift-off, rather than etching. Uniform depths can be realized for both micrometer and millimeter scale features that are simultaneously present in the designs. The grown media can either be used directly as a reflective DOE, or as a master stamp for nanoimprinting refractive designs. We demonstrate the effectiveness of the fabrication methods with representative reflective and transmissive DOEs for imaging and display applications.

Flat optics in high numerical aperture broadband imaging systems

Diffractive optical elements (DOEs) remain highly underutilized in broadband optical systems even though different technologies for DOEs including échelette-type gratings (EGs), multilevel DOEs, and metagratings have been introduced. Specifically, nanocomposite-enabled EGs can achieve efficiencies of close to throughout the visible spectrum, but only for relatively small diffraction angles. Therefore, the question remains if they are suitable for high-numerical-aperture (NA) systems. Here we show that this is indeed the case. To this end, we first demonstrate that macroscopic nanocomposite-enabled diffractive lenses (DLs) can achieve perfect broadband focusing up to a NA of 0.03. We then derive analytic relationships and investigate prototypical optical designs to show that this threshold fully covers the requirements of high-end imaging systems with This holistic all-system analysis demonstrates that the individual NA of a DL in a broadband imaging system is one to two orders of magnitude lower than the overall system’s NA. This shows that high-NA flat optical elements are not required for high-NA broadband systems. Therefore, nanocomposite-enabled EGs can unlock the full potential of DOEs for broadband optical systems, whereas other technologies cannot fulfill their high efficiency requirements.

Phase quantization of diffractive optical elements for the formation of predetermined symmetric light distributions

A method for the effective formation of symmetric light fields with a given phase distribution by binary diffractive optical elements is proposed. The design method is based on two-level phase quantisation of multi-level diffractive optical elements that form a basic distribution of light field. Numerical simulation of the formation of predetermined light fields is performed. The possibility of forming such light fields by a spatial light modulator is experimentally demonstrated.

Effects of the spatial frequency composition of the target pattern and the number of quantization levels in diffractive beam shaper design

A mathematical model is derived, and numerical simulation is analyzed for laser beam shaping by using multilevel phase-only diffractive optical elements (DOEs). We used the simulated annealing algorithm to design the beam shapers. The result has an essential effect on the diffractive pattern quality caused by the spatial frequency composition of target patterns for the same incident gaussian beam size and target pattern area. The root mean square error between the diffractive and target patterns is smaller for the target patterns with lower spatial frequencies. Moreover, the effect of spatial frequency composition can be relaxed for the cases of larger incident gaussian beam size. In addition, finer quality control of a diffraction pattern can be obtained by increasing the number of quantization levels at the DOEs.

Large-diameter multi-level diffractive optical elements with high energy efficiency

When large-diameter (100 mm) multi-level diffractive optical elements are applied to high-power laser systems in order to solve the problem of low energy efficiency, the energy efficiency can be greatly improved within uniform focal spot by reducing high diffraction orders. In this paper, we show both theoretically and experimentally that more than 90% energy can be focused into a desired spot as predicted previously by theoretical estimation.

High resolution patterning of sapphire by F2-laser ablation

The ablation behavior of single crystalline sapphire with nanosecond laser pulses at 157 nm wavelength is investigated. Ablation rates of about 10 to 100 nm/pulse are obtained at fluences ranging from 1 to 9 J/cm2. At moderate fluences, incubation behavior is observed, i.e. ablation starts after material modification by a number of laser pulses. The ablation can be utilized to fabricate sapphire micro-optics. The capability of creating lenses or gratings on the tip of sapphire fibers is demonstrated. Multilevel diffractive optical elements and high resolution gratings with 1 μm period are fabricated on planar sapphire substrates.

Multi-level diffractive optics for single laser exposure fabrication of telecom-band diamond-like 3-dimensional photonic crystals

We present a novel multi-level diffractive optical element for diffractive optic near-field lithography based fabrication of large-area diamond-like photonic crystal structure in a single laser exposure step. A multi-level single-surface phase element was laser fabricated on a thin polymer film by two-photon polymerization. A quarter-period phase shift was designed into the phase elements to generate a 3D periodic intensity distribution of double basis diamond-like structure. Finite difference time domain calculation of near-field diffraction patterns and associated isointensity surfaces are corroborated by definitive demonstration of a diamond-like woodpile structure formed inside thick photoresist. A large number of layers provided a strong stopband in the telecom band that matched predictions of numerical band calculation. SEM and spectral observations indicate good structural uniformity over large exposure area that promises 3D photonic crystal devices with high optical quality for a wide range of motif shapes and symmetries. Optical sensing is demonstrated by spectral shifts of the Gamma-Zeta stopband under liquid emersion.

Multi-level diffractive optical elements produced by excimer laser ablation of sol-gel

Material ablation by excimer laser micromachining is a promising approach for structuring sol-gel materials as we demonstrate in the present study. Using the well-known direct etching technique, the behaviour of different hybrid organic/inorganic self-made sol-gel materials is examined with a KrF* laser. Ablated depths ranging from 0.1 to 1.5 microm are obtained with a few laser pulses at low fluence (< 1 J/cm(2)). The aim is to rapidly transfer surface relief multi-level diffractive patterns in such a substrate, without intermediate steps. The combination with the 3D profilometry technique of coherence probe microscopy permits to analyse the etching process with the aim of producing multi-level Diffractive Optical Elements (DOE). Examples of four-level DOEs with 10 microm square elementary cells are presented, as well as their laser reconstructions in the infrared.

Single laser exposure fabrication of diamond-like 3-dimensional photonic crystal microstructures using circularly polarized light

Phase tunable multi-level diffractive optical elements define an attractive approach for single laser exposure fabrication of 3-dimensional photonic crystal microstructures. The significant advantage of these multi-level diffractive optical elements over two-level diffractive optical elements is the flexibility of fabricating a wide range of 3-dimensional periodic structures by manipulating the relative phase of different diffracted beams. Here, phase tuning was applied to demonstrate fabrication of a hybrid 3-dimensional structure intermediate between previously reported diamond-like Woodpile-type structure of tetragonal symmetry and structure having body-centered-tetragonal lattice symmetry. Circularly polarized light was applied for the first time to balance the diffraction order efficiencies and improve the structural uniformity. Design guidelines are presented for generating diamond-like photonic crystal template that possesses complete photonic bandgap when inverted with high refractive index materials.

多台阶衍射光学元件的工艺优化

多台阶衍射光学元件的工艺优化

Phase tunable multilevel diffractive optical element based single laser exposure fabrication of three-dimensional photonic crystal templates

The fabrication of diamond-like three-dimensional photonic crystal templates using a single laser exposure through a diffractive optical element has been demonstrated. An orthogonal combination of two linear phasemasks was used to define a two-dimensional diffractive optical element of multiple phase levels. By adjusting the gap between two phasemasks, a variable phase shift is shown by theory and demonstrated experimentally to control the interlacing position of two orthogonally rotated periodic structures. The transition of formation of diamond-like woodpile structures having tetragonal symmetry to structures having body-centered-tetragonal symmetry and variations in between has been demonstrated.

Optimal quantization method for uneven-phase diffractive optical elements by use of a modified iterative Fourier-transform algorithm

A method based on an iterative Fourier-transform algorithm (IFTA) with phase optimization for phase-only multilevel diffractive optical elements (DOEs) is presented. Phase optimization by minimizing the mean-squared error composed of an amplitude-weighted probability-density function is performed in the IFTA iterations to ensure that the wavefront difference is minimized and thus to improve the DOEs' performance. Using the proposed method, we obtained a small standard deviation of diffraction efficiency of 20 uneven-phase DOEs, showing that DOEs with high diffraction efficiency did not vary significantly with the initial conditions. The simulation results of even- and uneven-phase four-level DOEs designed by use of direct and stepwise quantization IFTA methods are compared.

Backward iterative quantization methods for designs of multilevel diffractive optical elements

Four types of backward iterative quantization (BIQ) methods were proposed to design multilevel diffractive optical elements (DOEs). In these methods, the phase values first quantized in the early quantization steps are those distant from the quantization levels, instead of the neighboring ones that the conventional iterative method began with. Compared with the conventional forward iterative quantization (FIQ), the Type 4 BIQ achieved higher efficiencies and signal-to-noise ratios for 4- level unequal-phase DOEs. For equal-phase DOEs, the Type 4 BIQ performed better when the range increment of each quantization step was large (> 15 degrees ), while the FIQ performed better when the range increment was small (< 15 degrees ).

Review of iterative Fourier-transform algorithms for beam shaping applications

We present a comparison of some of the most used iterative Fourier transform algorithms (IFTA) for the design of continuous and multilevel diffractive optical elements (DOE). Our aim is to provide optical engineers with advice for choosing the most suited algorithm with respect to the task. We tackle mainly the beam-shaping and the beam-splitting problems, where the desired light distributions are almost binary. We compare four recent algorithms, together with the historical error-reduction and input-output methods. We conclude that three of these algorithms are interesting for continuous-phase kinoforms, and two, namely the three-step method proposed by Wyrowski and the over-compensation of Prongué, still perform well with multilevel- and binary-phase DOE.

Calculation of the transmittance function of a multilevel diffractive optical element considering multiple internal reflections

A new method for calculating the transmittance function of a multilevel diffractive optical element is described. Multiple internal reflections in the diffractive optical element induce phase and amplitude modulation errors that deviate from the conventional transmittance function model. A transmittance function model of a multilevel diffractive optical element is devised, taking these multiple internal reflections into account. The results show that a surface relief profile of a multilevel diffractive optical element without phase modulation errors can be constructed based on the proposed model.

High Optical Efficiency Integrated Head for Use in Magneto-Optical Disk Drive

We explain the integrated magneto-optical (MO) head module that contains diffractive optical elements (DOE) and a beam-splitter (BS) with cylindrical surfaces. The optical system for servo signal detection is miniaturized by developing a multi-functional DOE. This system yields precise servo signals, and can eliminate the tracking error signal (TES) and focusing error signal (FES) independently. Power detection system is composed by using a multilevel DOE for high-speed automatic power control (APC). We suppress the distribution of the incidence angle on the BS surface, when divergent light is incident on the BS. It enables our integrated head to increase the coupling efficiency of a collimator without the deterioration of optical characteristics. When we test the head in a MO disk drive, the byte error rate (BER) of 10-6 is achieved. We confirm that this drive has the same commercial level performance for a 1.3 GB MO disk with magnetic super-resolution (MSR) technology.