Abstract
A new method for calculating the transmittance function of a multilevel diffractive optical element is described. Multiple internal reflections in the diffractive optical element induce phase and amplitude modulation errors that deviate from the conventional transmittance function model. A transmittance function model of a multilevel diffractive optical element is devised, taking these multiple internal reflections into account. The results show that a surface relief profile of a multilevel diffractive optical element without phase modulation errors can be constructed based on the proposed model.
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