Abstract. In view of the problems that the permanent scatterer synthetic aperture radar interferometry (PS-InSAR) technology was limited by the difference of processing algorithms and the professional level of data processing personnel, and its monitoring results were still difficult to fully achieve the theoretical accuracy, a new technical process suitable for the detection of PS-InSAR surface deformation monitoring results was proposed in this paper. Based on the analysis of the characteristics of monitoring results, the inspection work was carried out by means of overall inspection. The test parameters, test objects and test items to be tested, as well as the test methods of different test parameters were determined; The key links of PS-InSAR surface deformation monitoring data processing were analyzed in detail, and the technical flow of mathematical accuracy detection was given. Finally, the quality detection of surface deformation monitoring results based on PS-InSAR technology of 3000 square kilometres were carried out, the results showed that the proposed technical route was feasible and quality evaluation result was objective.