Micro-machined Ultrasonic Transducer Research Articles

Fabrication and Evaluation of MUT‐Type Acoustic Metamaterial for Impedance Matching

A micromachined ultrasonic transducer (MUT)‐type acoustic metamaterial that achieved acoustic impedance matching between materials with different acoustic impedances was successfully fabricated. The fabricated device consisted of a thin membrane that vibrated when acoustic waves impinged on the surface of the device, along with tapered trench structures located beneath the membrane. The device fabrication process consisted of seven steps, using four silicon wafers. An acoustic evaluation of the system with the fabricated MUT‐type acoustic metamaterial showed that the water‐to‐silicon transmission property was 30% higher than that of a system without the MUT‐type acoustic metamaterial. This result confirms that MUT‐type acoustic metamaterials are useful for matching the acoustic impedance between materials with different acoustic impedances. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer.

Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm2. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5-7 m/s and the relative error of correction is within 4%.

Design and Finite Element Simulation of a Novel 3D-CMUT Device for Simultaneous Sensing of In-Plane and Out-of-Plane Displacements of Ultrasonic Guided Waves.

In this study, we introduce a physical model of a three-dimensional (3D) guided wave sensor called 3D-CMUT, which is based on capacitive micro-machined ultrasonic transducers (CMUTs). This 3D-CMUT sensor is designed to effectively and simultaneously obtain 3D vibration information about ultrasonic guided waves in the out-of-plane (z-direction) and in-plane (x and y-directions). The basic unit of the 3D-CMUT is much smaller than the wavelength of the guided waves and consists of two orthogonal comb-like CMUT cells and one piston-type CMUT cell. These cells are used to sense displacement signals in the x, y, and z-directions. To ensure proper functioning of the 3D-CMUT unit, the resonant frequencies of the three composed cells are set to be identical by adjusting the microstructural parameters appropriately. Moreover, the same sensitivity in the x, y, and z-directions is theoretically achieved by tuning the amplification parameters in the external circuit. We establish a transient analysis model of the 3D-CMUT using COMSOL finite element simulation software to confirm its ability to sense multimode ultrasonic guided waves, including A0, S0, and SH0 modes. Additionally, we simulate the ball drop impact acoustic emission signal on a plate to demonstrate that the 3D-CMUT can not only utilize in-plane information for positioning but also out-of-plane information. The proposed 3D-CMUT holds significant potential for applications in the field of structural health monitoring (SHM).

In-Plane-Sensing Analysis of Comb-Like Capacitive Micro-Machined Ultrasonic Transducers (CMUTs) Using Analytical Small-Signal Model and FEM

In this work, capacitive micro-machined ultrasonic transducers (CMUTs) were developed into comb-like shapes, to make these comb-like shaped structures work for sensing in-plane vibrations of ultrasonic guided waves. On this basis, an analytical small-signal model, which is mainly a combination of the forced vibration theory and the simplified parallel-plate capacitor model, was proposed to satisfy the requirements of theoretical design. Through the proposed model, the in-plane-sensing behaviors of a comb-like CMUT cell can be predicted, including vibrating velocity, output current, and sensitivity. Compared with the results calculated from the finite element method (FEM) simulation, it was found that the static state and the frequency-domain results of analytical small-signal model agree well with those of FEM simulations, if the used 1 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">st</sup> natural frequencies of these two methods are identical. Considering the fringing field capacitance could further improve the accuracy of the analytical small-signal model. At last, influences of some external parameters, i.e., DC bias voltage, air damping, and input in-plane displacement, on the sensitivity of a comb-like CMUT cell were discussed by the analytical small-signal model and FEM simulation. Relevant results reveal the way to design a comb-like CMUT, and indicates the conditions when the analytical small-signal model is accurate. Our work develops the theory on the in-plane-sensing comb-like CMUT, and is expected to be combined with the theory on the previous out-of-plane-sensing CMUT, to realize 3D-CMUT for sensing three-dimensional guided waves.

An Ultrasonic Target Identification System Based on Piezoelectric Micromachined Ultrasonic Transducers

In this paper, an ultrasonic target identification system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed to improve the productivity efficiency of industrial production. The proposed system can accurately identify targets of different shapes. Two pieces of 3 × 3 PMUTs arrays with a resonant frequency of 115 kHz are used as the transmitter and receiver of the PMUTs-based ultrasonic sensor. The sensor is small in size and has high instability. In addition, the PMUTs based ultrasonic sensors have lower environmental requirements than vision sensors and are less expensive than laser sensors. Therefore, the sensors are suitable for large-scale use in industry. The characteristics of the proposed system are investigated in the shape experiments on the square, circle, frame, and ring targets. The four kinds of targets are acrylic plates with a thickness of 5mm. The experimental results show that the system can accurately identify the shapes of the four targets through the grid-based scheme. Besides, the identification process is automatically completed by the 3D mobile platform. The proposed system has demonstrated a cost-effective method to identify targets of different shapes, which can more efficiently guide the robotic manipulator’s grasping and other behaviors.

A Front-End CMOS Interface Circuit With High Voltage Charge Pump and Oscillator for Capacitive Micromachined Ultrasonic Transducers

Label-free biosensors, combined with miniaturized micro-electromechanical sensory platforms, offer an attractive solution for real-time and facile monitoring of biomolecules due to their high sensitivity and selectivity without the need for specifically labeling. Resonators have been acknowledged as an efficient technology for measuring biomolecular binding events including those involving nucleic acid and antibody. Among these, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a promising candidate for biosensing. However, their usage is often limited by the requirement for high voltage supply and continuous frequency tracking, which can result in significant parasitic effects and measurement errors. In this paper, we present a novel front-end interface circuit for a CMUTs-based biosensor. The circuit, fabricated using TSMC 0.18-μX;Jm Bipolar-CMOS-DMOS (BCD) technology, incorporates an on-chip high voltage charge pump and feedback frequency monitoring. The CMUTs array features 20×20 circular cells, fabricated using a low-temperature direct bonding technology, with an experimental parallel-resonant frequency of 1.724 MHz and a high quality factor of up to 40.9. To fit the measured electrical characteristics, a five-element equivalent lumped element model is proposed. The high voltage charge pump provides an output voltage of 20 V, while the feedback oscillator has a ms-level start-up time and a total power dissipation of 3.8 mW. The proposed front-end interface is designed to function as a stand-alone chip for CMUTs-based resonant biodetection.

An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays with the resonant frequency of 115 kHz are used as transmitter and receiver of the PMUTs-based ultrasonic sensor. Then, the sensor system can calculate the target's position through the signal received by the above receiver. The static and dynamic performance of the proposed prototype system are characterized on black, white, and transparent targets. The experiment results demonstrated that the proposed system can detect targets of different colors, transparencies, and motion states. In the static experiments, the static location errors of the proposed system in the range of 200 mm to 320 mm are 0.51 mm, 0.50 mm and 0.53 mm, whereas the errors of a commercial laser sensor are 2.89 mm, 0.62 mm, and N\A. In the dynamic experiments, the experimental materials are the targets with thicknesses of 1 mm, 1.5 mm, 2 mm and 2.5 mm, respectively. The proposed system can detect the above targets with a maximum detection error of 4.00%. Meanwhile, the minimum resolution of the proposed system is about 0.5 mm. Finally, in the comprehensive experiments, the proposed system successfully guides a robotic manipulator to realize the detecting, grasping, and moving of a transparent target with 1 mm. This ultrasonic target detection system has demonstrated a cost-effective method to detect targets, especially transparent targets, which can be widely used in the detection and transfer of glass substrates in automated production lines.

A High-Sensitivity Bowel Sound Electronic Monitor Based on Piezoelectric Micromachined Ultrasonic Transducers.

Bowel sounds contain some important human physiological parameters which can reflect information about intestinal function. In this work, in order to realize real-time monitoring of bowel sounds, a portable and wearable bowel sound electronic monitor based on piezoelectric micromachined ultrasonic transducers (PMUTs) is proposed. This prototype consists of a sensing module to collect bowel sounds and a GUI (graphical user interface) based on LabVIEW to display real-time bowel sound signals. The sensing module is composed of four PMUTs connected in parallel and a signal conditioning circuit. The sensitivity, noise resolution, and non-linearity of the bowel sound monitor are measured in this work. The result indicates that the designed prototype has high sensitivity (-142.69 dB), high noise resolution (50 dB at 100 Hz), and small non-linearity. To demonstrate the characteristic of the designed electronic monitor, continuous bowel sound monitoring is performed using the electronic monitor and a stethoscope on a healthy human before and after a meal. Through comparing the experimental results and analyzing the signals in the time domain and frequency domain, this bowel sound monitor is demonstrated to record bowel sounds from the human intestine. This work displays the potential of the sensor for the daily monitoring of bowel sounds.

Modeling and Measurement of an Ultrasound Power Delivery System for Charging Implantable Devices Using an AlN-Based pMUT as Receiver.

Ultrasound power delivery can be considered a convenient technique for charging implantable medical devices. In this work, an intra-body system has been modeled to characterize the phenomenon of ultrasound power transmission. The proposed system comprises a Langevin transducer as transmitter and an AlN-based square piezoelectric micro-machined ultrasonic transducer as receiver. The medium layers, in which elastic waves propagate, were made by polydimethylsiloxane to mimic human tissue and stainless steel to replace the case of the implantable device. To characterize the behavior of the transducers, measurements of impedance and phase, velocity and displacement, and acoustic pressure field were carried out in the experimental activity. Then, voltage and power output were measured to analyze the performance of the ultrasound power delivery system. For a root mean square voltage input of approximately 35 V, the power density resulted in 21.6 µW cm-2. Such a result corresponds to the data obtained with simulation through a one-dimensional lumped parameter transmission line model. The methodology proposed to develop the ultrasound power delivery (UPD) system, as well as the use of non-toxic materials for the fabrication of the intra-body elements, are a valid design approach to raise awareness of using wireless power transfer techniques for charging implantable devices.

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system's performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer's sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented.

FEM-based analysis on sensing out-of-plane displacements of low-order Lamb wave modes by CMUTs

It is well known that acoustic emission (AE) signals, generated by external impacts or damages such as crack initiation, mainly propagate in the form of Lamb waves in plate-like structures. In this work, MEMS-based resonant capacitive micro-machined ultrasonic transducers (CMUTs), which are designed for sensing out-of-plane displacements, have been verified by finite element method (FEM) modeling and theoretical analysis for their feasibility of detecting low-order Lamb waves (A0 and S0). First, combining the propagation theory of Lamb waves and the “spring-mass-damper” model of CMUTs, the out-of-plane sensing mechanism has been explained, together with the analytical expression of sensitivity. Then, simulations based on FEM have been carried out to show that the designed CMUTs are sensitive to out-of-plane displacements, while extremely insensitive to in-plane displacements. Meanwhile, a transient analysis has found the potential abilities of CMUTs for sensing A0 and S0 lamb waves. Besides, the sensing characteristics of CMUTs have also been investigated, including the influence of squeezed-film damping, the amplitude of the input signal, the cell number, and cell space. Finally, the ball drop impact is simulated to show the potential of identifying the location of the AE source by CMUTs. Our studies reveal the out-of-plane sensing behaviors of CMUTs for Lamb waves and may have the potential in promoting the miniaturization and integration of AE sensors.

Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion

An alternative implementation of an electrostatic MUT (Micromachined Ultrasonic Transducer), relying on multiple beams that displace along the chip’s surface instead of a single membrane displacing perpendicular to it, is presented in this work. With this approach, a design requiring a low bias voltage (24 V) and occupying a small area (3.3 ×3.3 mm², 2 D / λ ≈ 0.77 ) was shown to generate a sound pressure level of 82 dB (re. 20 µPa-rms) at 40 kHz and a distance of 8.9 cm. The high level of damping allows this transducer to operate in a wide frequency range (35–63 kHz). The operation of this device as an ultrasonic receiver was also proven. An implementation of this transducer as a rangefinder requires a strong reduction in the noise level, particularly coming from radio-frequency interference, in order to increase its detection range. • A transducer concept based on lateral motion (instead of vertical) is used for transmitting and receiving airborne ultrasound. • A high fluidic damping was observed, enabling a transmission bandwidth of nearly an octave (35–65 kHz). • This electrostatic device is based on an array of microbeams and has a sidelength smaller than half a wavelength.

A Handheld Imaging Probe for Acoustic Angiography With an Ultrawideband Capacitive Micromachined Ultrasonic Transducer (CMUT) Array.

This article presents an imaging probe with a 256-element ultrawideband (UWB) 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for acoustic angiography (AA). This array was fabricated on a borosilicate glass wafer with a reduced bottom electrode and an additional central plate mass to achieve the broad bandwidth. A custom 256-channel handheld probe was designed and implemented with integrated low-noise amplifiers and supporting power circuitry. This probe was used to characterize the UWB CMUT, which has a functional 3-dB frequency band from 3.5 to 23.5 MHz. A mechanical index (MI) of 0.33 was achieved at 3.5 MHz at a depth of 11 mm. These promising measurements are then combined to demonstrate AA. The use of alternate amplitude modulation (aAM) combined with a frequency analysis of the measured transmit signal demonstrates the suitability of the UWB CMUT for AA. This is achieved by measuring only a low level of unwanted high-frequency harmonics in both the transmit signal and the reconstructed image in the areas other than the contrast bubbles.

Review of Ultrasonic Ranging Methods and Their Current Challenges.

Ultrasonic ranging has been widely used in automobiles, unmanned aerial vehicles (UAVs), robots and other fields. With the appearance of micromachined ultrasonic transducers (MUTs), the application of ultrasonic ranging technology presents a more extensive trend. This review focuses on ultrasonic ranging technology and its development history and future trend. Going through the state-of-the-art ultrasonic ranging methods, this paper covers the principles of each method, the signal processing methodologies, the overall system performance as well as key ultrasonic transducer parameters. Moreover, the error sources and compensation methods of ultrasonic ranging systems are discussed. This review aims to give an overview of the ultrasonic ranging technology including its current development and challenges.

Adaptive under-actuated control for capacitive micro-machined ultrasonic transducer based on an accurate nonlinear modeling

A capacitive micromachined ultrasonic transducer (CMUT) due to many benefits is being considered as an imaging and therapeutic technology recently. The critical challenge is to stabilize the system beyond the pull-in voltage considering imposed perturbations. The CMUT system, on the other hand, has a low range of movement and it is intrinsically unstable, which can result in a pull-in phenomenon. Consequently, in order to use the CMUT systems in a variety of medical applications that require high tuning ratio, a closed-loop control technique has been designed for these systems aims at increasing the maximum capacitance and enhancing tunability as well. In this study, using the closed-loop control, the resistance of micro-plate against the pull-in phenomenon has been examined. Also, in the description of the system a more accurate nonlinear modeling has been considered in the presence of an under-actuated sliding model control strategy with finite convergence time. Besides, adaptive protocols with unknown upper bounds have been designed to compensate the effects of uncertainty, unmodeled dynamics and external disturbances. The performance of controller in terms of improving output pressure, stabilizing the CMUT and its robustness to imposed perturbations have been investigated. Finally, numerical simulations are presented to verify the usefulness and applicability of the proposed control strategy.

Applications of Capacitive Micromachined Ultrasonic Transducers: A Comprehensive Review.

Capacitive micromachined ultrasonic transducer (CMUT) was introduced as an alternative to the piezoelectric thick-film-based transducers in medical imaging applications. Gradually, CMUTs have been investigated in almost all the applications in acoustics due to their superior transduction properties. CMOS compatible process flow and limitless possibilities of miniaturization made CMUT a preferred choice for the ultrasound industry. This article comprehensively reviews all the applications in which CMUT was used until now. Such a complete review of the practical applications of CMUT has not been reported elsewhere. A topicwise presentation approach is adopted, and wherever possible, the necessary details of the device properties and experimental niceties were briefly covered.

Breast Transmission Ultrasound Tomography Based on Capacitive Micromachined Ultrasonic Transducer Linear Arrays

Ultrasound computed tomography (USCT) has become a useful means of breast cancer imaging detection. In this paper, a novel breast ultrasound tomography system based on capacitive micromachined ultrasonic transducer (CMUT) linear arrays is built. Implementation method of parallel beam filtered back-projection algorithm in the background of USCT is derived. The feasibility of breast ultrasound tomography system based on CMUT and the applicability of image reconstruction algorithm are preliminarily proved by simulation experiment and breast phantom experiment. Sound speed image and sound impedance image are fused to obtain the breast ultrasound tomography image with edge information and structure information simultaneously. According to experimental results, size reconstruction deviation of simulated tumor in the breast phantom is about 14%, which is reduced by 57.14% after multimodal image fusion ultimately. The research results in this study provide the theoretical basis and technical support for the application of CMUT in the field of medical imaging.

Design and analysis of CMUT device using COMSOL for Radio frequency applications

This paper presents the design and analysis of Capacitive Micro-machined Ultrasonic Transducers (CMUTs) for a resonant frequency of 1.48 MHz. The CMUT has been designed using COMSOL and the results are found to be closely matching with the analytical calculations. The circular CMUT cell consists of polysilicon and silicon dioxide as the top membrane and polysilicon as the bottom membrane with an air gap. The eigen frequency analysis and pull-in analysis of the device has been performed. The solid mechanics module and electrostatic module of COMSOL Multiphysics have been used for performing the simulations. This device can be used for radio frequency applications as it has low displacement.

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications.

This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS process and the IC is implemented in the AMS 0.35 µm technology. Simulation results for the PMUT are compared to the measurement results, and an equivalent circuit has been derived to allow a better approximation of the load of the PMUT on the IC. The control circuit is composed of a high-voltage pulser to drive the PMUT for transmission and of a transimpedance amplifier to amplify the received echo. The working frequency of the system is 1.5 MHz.