Abstract
This paper presents the design and analysis of Capacitive Micro-machined Ultrasonic Transducers (CMUTs) for a resonant frequency of 1.48 MHz. The CMUT has been designed using COMSOL and the results are found to be closely matching with the analytical calculations. The circular CMUT cell consists of polysilicon and silicon dioxide as the top membrane and polysilicon as the bottom membrane with an air gap. The eigen frequency analysis and pull-in analysis of the device has been performed. The solid mechanics module and electrostatic module of COMSOL Multiphysics have been used for performing the simulations. This device can be used for radio frequency applications as it has low displacement.
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