Abstract
An alternative implementation of an electrostatic MUT (Micromachined Ultrasonic Transducer), relying on multiple beams that displace along the chip’s surface instead of a single membrane displacing perpendicular to it, is presented in this work. With this approach, a design requiring a low bias voltage (24 V) and occupying a small area (3.3 ×3.3 mm², 2 D / λ ≈ 0.77 ) was shown to generate a sound pressure level of 82 dB (re. 20 µPa-rms) at 40 kHz and a distance of 8.9 cm. The high level of damping allows this transducer to operate in a wide frequency range (35–63 kHz). The operation of this device as an ultrasonic receiver was also proven. An implementation of this transducer as a rangefinder requires a strong reduction in the noise level, particularly coming from radio-frequency interference, in order to increase its detection range. • A transducer concept based on lateral motion (instead of vertical) is used for transmitting and receiving airborne ultrasound. • A high fluidic damping was observed, enabling a transmission bandwidth of nearly an octave (35–65 kHz). • This electrostatic device is based on an array of microbeams and has a sidelength smaller than half a wavelength.
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