The current development of microelectronics requires mature micro energy storage devices. Such devices include, among others, micro batteries. The working principle of such micro batteries does not differ from traditional batteries. However, there are some particular aspects that distinguish them. The first one is that organic liquid electrolytes should be avoided due to their flammability and risk of leakage. Additionally, a great attention must be paid to the energy density of the included materials, since the final aim is the miniaturization [1]. In this sense, the use of thin film deposition techniques becomes crucial for micro batteries fabrication [2,3]. Among these techniques, sputtering constitutes an interesting choice, due to the possibility it offers to transfer the composition of a source target material to a substrate. As a result, thin compact layers with a well-controlled thickness can be obtained.Regarding the solid-state electrolyte, LiPON is an interesting candidate due to the stability it reportedly offers for lithium plating-stripping [4]. A stable lithium cycle is fundamental for its use as metallic lithium anode or, taking a step further, for an anode-free configuration. Indeed, such king of configuration allows a great degree of device compactness, which is convenient when the miniaturization prosecuted [5].This works aims at shed some light into the compatibility of LiPON thin films with different current collector materials. Sputtered LiPON thin films have been deposited in contact with different metals, and the produced samples have been characterised with electrochemical techniques such as Charge-Discharge, combined with materials characterization ones such as SEM. The obtained results have allowed to individuate how the plating-stripping of lithium is sustained by LiPON coupled with the different materials. 1] L. Y. e. al, "On-Chip Batteries for Dust-Sized Computers," Advanced Energy Materials, vol. 12, p. 2103641, 2022. [2] B. J. Neudecker, N. J. Dudney and J. B. Bates, ""Lithium‐Free" Thin‐Film Battery with In Situ Plated Li Anode," J. Electrochem. Soc., vol. 147, no. 517, 200. [3] T. Yamamoto, H. Iwasaki, Y. Suzuki, M. Sakakura, Y. Fujii, M. Motoyama and Y. Iriyama, "A Li-free inverted-stack all-solid-state thin film battery using crystalline cathode material," Electrochemistry Communications, vol. 105, 2019. [4] P. Albertus, S. Babinec, S. Litzelman, A. Newman, “Status and challenges in enabling the lithium metal electrode for high-energy and low-cost rechargeable batteries,” Nature Energy, pp 16-21, 2018 [5] A.G.A.M.S. Nanda, “Anode-Free Full Cells: A pathway to High-Energy Density Lithium-Metal Batteries,” Advanced Energy Materials, vol. 11, 2021.
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