Based on a fully coupled model of electro-thermo-mechanical multiple physical fields, the guided wave in a piezoelectric semiconductor (PSC) plate is studied. The non-Fourier heat conduction (G-N III-type) and non-Fick diffusion are included in the model. By the appropriate definition of the extended displacements and stresses, the system of second-order differential coupled equations degrades to a first-order matrix differential equation. The transfer matrix of the PSC plate is derived from the first-order matrix differential equation. Some combinations of mechanical, electric and carrier boundary conditions are applied to obtain the dispersion relations. The influences of various boundary conditions and typical parameters on the dispersion and attenuation are investigated numerically. The gradient profiles of the inhomogeneous plate are also discussed. Based on the numerical results, it is found that the dispersion characteristics are mainly affected by the mechanical boundary conditions, while the attenuation characteristics are mainly affected by the transport of carrier and heat. In addition, the gradient profiles of inhomogeneous plates affect both dispersion and attenuation characteristics.