Microcrystalline Fe-M-C (M=Ti, Zr, Hf, V, Nb, Ta) films crystallized from amorphous state are suitable for use in magnetic heads. The crystallization of these films is supposed to be initiated by nucleation of fine M carbides because of the strong affinity of M for carbon. The precipitated Fe-rich phase was found to be a supersaturated solid solution which has a tetragonally deformed lattice, and it gradually changes to bcc phase as the annealing temperature increases. In these alloys, the change in soft magnetic properties with annealing temperature seems to be strongly affected by grain size rather than a change in crystal structure or magnetostriction. The coercivity increased at high anneling temperature caused by grain growth of Fe. The upper limit of annealing temperature is as high as 1000 K for Fe-Hf-C and Fe-Ta-C films which shows a relative high crystallization temperature.
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