Zn1 − x CoxO: 1 at% Al(x = 0−0.3) films were grown on corning 7059 glass by asymmetrical bipolar pulsed dc magnetron sputtering. The c-axis orientation along the (002) plane was enhanced with increasing Co concentration. The ZnCoO thin films are grown to the fibrous grains of tight dome shape. The transmittance spectra showed that sp-d exchange interactions and typical d-d transitions become activated with increasing Co concentration. The electrical resistivity of ZnCoO films increased ranging from ∼10− 3 to ∼10−2 Ω ⋅ cm with increasing Co concentration, especially it increased greatly at 30 at% Co. X-ray photoelectron spectroscopy and alternating gradient magnetometer analyses indicated that no Co metal cluster in the ZnCoO films is formed and room temperature ferromagnetism is exhibited. These electrical and magnetic properties of ZnCoO films suggest a potential application of dilute magnetic semiconductor devices.