Silicon nitride (Si3N4) is used for high-speed rotating bearings in machine tools, aircraft, and turbo pumps due to its excellent material properties such as high-temperature strength, hardness, and fracture toughness. Grinding with fixed abrasives enables high shape accuracy and high efficiency in machining brittle materials. However, it is difficult to completely remove surface damage, which limits its use in products requiring a nano surface. These defects also result in reduced reliability and shortened lifespan. Magnetic-assisted polishing (MAP) is a technology that can achieve a fine surface by using a mixture of iron powder and abrasives, but it requires a lot of time due to the low material removal rate (MRR). Therefore, this study developed a hybrid processing technology using a metal-bonded grinding wheel and a slurry with hard abrasives for the high precision of silicon nitride ceramic ball bearings. Experiments were conducted in order to compare and analyze the surface roughness and material removal rate. Through MAP, using a grinding wheel with low grit (#325), high-efficiency machining performance was confirmed with a maximum material removal rate of 1.193 mg/min. In MAP, using a grinding wheel with high grit (#2000), a nano-level surface roughness of 6.5 nm Ra was achieved.
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