The importance of metals and ceramics are increasing to microsystem in reproduction and molding techniques because of the mechanical and physical properties. In this study, we have developed a new process using LIGA product as a mold which is able to sintere a microstructure of alloys or ceramics using Spark Plasma Sintering (SPS) machine. Concretely, we apply the mechanical alloying (MA) process as well as a pseudo-superplasticity to produce microstructure made of a TiC/Ti5Si3 ceramic composites. Powders of elements Ti and SiC whose composition was Ti-20 mass% SiC were blended for MA, and Two kinds of the MA powder, which are different particle size and inner state of particle but same composition, were produced and are compared in terms of formability. The comparison results indicates an importance of inner microstructure rather than a particle size of MA powder. Finally, this process proved successful for making the microstructure made by the TiC/Ti5Si3 ceramic composites, whose Vickers hardness is extremely superior to Ni mold produced by general LIGA process.