Langmuir Probe Measurements Research Articles

Absolute continuum intensity diagnostics of a novel large coaxial gridded hollow cathode argon plasma

This paper reports a novel coaxial gridded hollow discharge during operation at low pressure (20 Pa–80 Pa) in an argon atmosphere. A homogeneous hollow discharge was observed under different conditions, and the excitation mechanism and the discharge parameters for the hollow cathode plasma were examined at length. An optical emission spectrometry (OES) method, with a special focus on absolute continuum intensity method, was employed to measure the plasma parameters. The Langmuir probe measurement (LPM) was used to verify the OES results. Both provided electron density values (ne) in the order of 1016 m−3 for different plasma settings. Taken together, the results show that the OES method is an effective approach to diagnosing the similar plasma, especially when the LPM is hardly operated.

Broadband microwave characteristics of a novel coaxial gridded hollow cathode argon plasma.

The interaction between microwave and large area plasma is crucially important for space communication. Gas pressure, input power, and plasma volume are critical to both the microwave electromagnetic wave phase shift and electron density. This paper presents a novel type of large coaxial gridded hollow cathode plasma having a 50 cm diameter and a 40 cm thickness. Microwave characteristics are studied using a microwave measurement system that includes two broadband antennae in the range from 2 GHz to 18 GHz. The phase shift under varying gas pressure and input power is shown. In addition, the electron density ne, which varies from 1.2 × 10(16) m(-3) to 8.7 × 10(16) m(-3) under different discharge conditions, is diagnosed by the microwave system. The measured results accord well with those acquired by Langmuir Probe measurement and show that the microwave properties in the large volume hollow cathode discharge significantly depend on the input power and gas pressure.

Note: Refined possibilities for plasma probe diagnostics.

In an earlier publication, the ion mass determination technique was proposed using the Langmuir probe measurement results for low-pressure Maxwellian plasmas and their analysis, based on the Bohm effect and the Child-Boguslavsky-Langmuir (CBL) probe sheath model, allowing for probe sheath thickness and ion mass evaluations after the Bohm coefficient CBCyl ≈ 1.13 for cylindrical probes had been determined. In the present study, the step-front sheath model, being physically closer to the reality of gas discharge plasmas, was considered in order to correct the CBL sheath model results. At this stage, more real Bohm coefficient (CBCyl ≈ 1.23) for cylindrical probes was found to provide a more reliable method of probe sheath thickness and ion mass determination.

SiNx Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content.

Reactive high power impulse magnetron sputtering (rHiPIMS) was used to deposit silicon nitride (SiNx) coatings for biomedical applications. The SiNx growth and plasma characterization were conducted in an industrial coater, using Si targets and N2 as reactive gas. The effects of different N2-to-Ar flow ratios between 0 and 0.3, pulse frequencies, target power settings, and substrate temperatures on the discharge and the N content of SiNx coatings were investigated. Plasma ion mass spectrometry shows high amounts of ionized isotopes during the initial part of the pulse for discharges with low N2-to-Ar flow ratios of <0.16, while signals from ionized molecules rise with the N2-to-Ar flow ratio at the pulse end and during pulse-off times. Langmuir probe measurements show electron temperatures of 2-3 eV for nonreactive discharges and 5.0-6.6 eV for discharges in transition mode. The SiNx coatings were characterized with respect to their composition, chemical bond structure, density, and mechanical properties by X-ray photoelectron spectroscopy, X-ray reflectivity, X-ray diffraction, and nanoindentation, respectively. The SiNx deposition processes and coating properties are mainly influenced by the N2-to-Ar flow ratio and thus by the N content in the SiNx films and to a lower extent by the HiPIMS frequencies and power settings as well as substrate temperatures. Increasing N2-to-Ar flow ratios lead to decreasing growth rates, while the N content, coating densities, residual stresses, and the hardness increase. These experimental findings were corroborated by density functional theory calculations of precursor species present during rHiPIMS.

GPS and in situ Swarm observations of the equatorial plasma density irregularities in the topside ionosphere

Here we study the global distribution of the plasma density irregularities in the topside ionosphere by using the concurrent GPS and Langmuir probe measurements onboard the Swarm satellites. We analyze 18 months (from August 2014 till January 2016) of data from Swarm A and B satellites that flew at 460 and 510 km altitude, respectively. To identify the occurrence of the ionospheric irregularities, we have analyzed behavior of two indices ROTI and RODI based on the change rate of total electron content and electron density, respectively. The obtained results demonstrate a high degree of similarities in the occurrence pattern of the seasonal and longitudinal distribution of the topside ionospheric irregularities derived from both types of the satellite observations. Among the seasons with good data coverage, the maximal occurrence rates for the post-sunset equatorial irregularities reached 35–50 % for the September 2014 and March 2015 equinoxes and only 10–15 % for the June 2015 solstice. For the equinox seasons the intense plasma density irregularities were more frequently observed in the Atlantic sector, for the December solstice in the South American–Atlantic sector. The highest occurrence rates for the post-midnight irregularities were observed in African longitudinal sector during the September 2014 equinox and June 2015 solstice. The observed differences in SWA and SWB results could be explained by the longitude/LT separation between satellites, as SWB crossed the same post-sunset sector increasingly later than the SWA did.

A theoretical interpretation of the main scrape-off layer heat-flux width scaling for tokamak inner-wall limited plasmas

The International Tokamak Physics Activity Topical Group on scrape-off layer and divertor physics has amassed a database comprising hundreds of reciprocating Langmuir probe measurements of the main scrape-off layer heat-flux width in inner-wall limited discharges. We have carried out an analysis, based on turbulent transport theory, of the variation of with respect to the dimensionless plasma parameters. Restricting our analysis to circular plasmas, we find that a model based on non-linearly saturated turbulence can well reproduce the values found in the database.

Probe measurements of magnetron discharge parameters

Langmuir probe measurements have been carried out in a positive column discharge of a planar magnetron with a titanium target. In this work concentration and temperature of electrons is measured in positive column of magnetron discharge with Langmuir probe. Concentration of electrons is found to be on the level of 1016 m-3 at a notable distance (over 200 mm). Two groups of electrons exist: «cold» and «hot» with average temperature of 16 000 and 41 000 K respectively. Dependence of discharge parameters on working gas pressure is measured.

Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas

The Emission Spectra of gallium, indium and tin droplet-based laser produced plasmas are presented in the Vacuum Ultraviolet (VUV) emission range from 30nm to 160nm. The Ga ion transitions are investigated in detail as a function of background pressure level and laser irradiance. Different wavelength emission regions were detected according to the level of background gas. At short wavelengths (i.e. 30–50nm) the line emission from the higher charge states is reduced with increasing pressure, while at longer wavelengths (i.e. 100–160nm) the trend is inverted, as the plasma emission intensity of the lower charge states increases with higher background gas pressure level. The emitted lines are fitted with Voigt profiles to determine the electron density. The electron temperature is obtained from a fit based on the Planck distribution. These estimations are then used to identify the relevant processes that lead to the different charge state emissions as a function of background gas. Langmuir Probe measurements are also reported for evaluating the ion kinetic energy as a function of background gas. The gallium spectra are calibrated in units of spectral radiance, together with spectra from indium and tin. This calibration allows absolute power estimations from the light source in the VUV region. The presented experimental results are relevant as fundamental plasma emission spectroscopic measurements in an almost unexplored wavelength region as well as for applications such as Extreme Ultraviolet Lithography to determine the so-called Out-of-Band (OoB) radiation emission and for metrology applications for future inspection tools.

Optical diagnostics with radiation trapping effect in low density and low temperature helium plasma

Low density (ne &amp;lt; 1011 cm−3) and low temperature (Te &amp;lt; 10 eV) helium plasma was generated by hot filament discharge. Electron temperature and density of neutral helium plasma were measured by Langmuir probe and were determined by line intensity ratio method using optical emission spectroscopy with population modelings. Simple corona model and collisional-radiative (CR) model without consideration for radiation trapping effect are applied. In addition, CR model taking into account the radiation trapping effect (RTE) is adopted. The change of single line intensity ratio as a function of electron temperature and density were investigated when the RTE is included and excluded. The changes of multi line intensity ratios as a function of electron temperature were scanned for various radiative-excitation rate coefficients from the ground state and the helium gas pressures related with the RTE. Our CR modeling with RTE results in fairly better agreement of the spectroscopic diagnostics for the plasma temperature or density with the Langmuir probe measurements for various helium gas pressures than corona modeling and CR modeling without RTE.

Comparison between IRI and preliminary Swarm Langmuir probe measurements during the St. Patrick storm period

Preliminary Swarm Langmuir probe measurements recorded during March 2015, a period of time including the St. Patrick storm, are considered. Specifically, six time periods are identified: two quiet periods before the onset of the storm, two periods including the main phase of the storm, and two periods during the recovery phase of the storm. Swarm electron density values are then compared with the corresponding output given by the International Reference Ionosphere (IRI) model, according to its three different options for modelling the topside ionosphere. Since the Swarm electron density measurements are still undergoing a thorough validation, a comparison with IRI in terms of absolute values would have not been appropriate. Hence, the similarity of trends embedded in the Swarm and IRI time series is investigated in terms of Pearson correlation coefficient. The analysis shows that the electron density representations made by Swarm and IRI are different for both quiet and disturbed periods, independently of the chosen topside model option. Main differences between trends modelled by IRI and those observed by Swarm emerge, especially at equatorial latitudes, and at northern high latitudes, during the main and recovery phases of the storm. Moreover, very low values of electron density, even lower than 2 × 104 cm−3, were simultaneously recorded in the evening sector by Swarm satellites at equatorial latitudes during quiet periods, and at magnetic latitudes of about ±60° during disturbed periods. The obtained results are an example of the capability of Swarm data to generate an additional valuable dataset to properly model the topside ionosphere.

RF compensation of single Langmuir probe in low density helicon plasma

Interpretations of Single Langmuir probe measurements in electrode-less radio frequency (RF) plasmas are noteworthy tricky and require adequate compensation of RF. Conventional RF compensation technique is limited only at high density (>1017m−3) RF plasmas. RF compensation of single Langmuir probe at low density RF plasmas (∼1016m−3) is presented in this paper. In RF driven plasmas, where the RF voltage is high (∼50V) and density is in the range (∼1016m−3), the primary RF compensation condition (Zck>>Zsh) is very difficult to fulfill, because of high sheath impedance (Zsh) at 13.56MHz and the construction limitation of a self-resonant tiny chock (Zck) with very high impedance. Introducing a large auxiliary electrode (Ax), (Ax>>>Ap), close to the small Langmuir probe (Ap) tip, connected in parallel with probe via a coupling capacitor (Ccp), significantly reduces the effective sheath impedance (Zsh) and allows probe bias to follow the RF oscillation. Dimensional requirements of the auxiliary electrode and the role of suitable coupling capacitor are discussed in this paper. Observations show proper compensation leads to estimation of more positive floating potentials and lower electron temperatures compared to uncompensated probe. The electron energy probability function (EEPF) is also obtained by double differentiating the collected current with respect to the applied bias voltage using an active analog circuit.

Spectroscopic diagnostics of low-pressure inductively coupled Kr plasma using a collisional–radiative model with fully relativistic cross sections

A collisional–radiative (C–R) model for krypton plasma using fully relativistic distorted-wave cross sections for electron excitations was developed. The model was applied to the characterization of inductively coupled Kr plasma with cylindrical geometry over the pressure regime 1–50 mTorr. Radially averaged emission intensities from transitions of Kr (4p55p → 4p55s) in the range 500–900 nm were recorded at 17 cm from the planar RF-driven coil, with the plasma operated in the inductive regime (H mode). The measured emission intensities were then fitted by varying the electron density, ne, and electron temperature, Te, in the C–R model. At both low and high pressures, variations of the electron density by over two orders of magnitude had only a minor role on the relative emission intensities. On the other hand, Te values deduced from the comparison between experiment and model decreased from 6.7 to 2.6 eV as pressure increased from 1 to 50 mTorr. These results are found to be in good agreement with the effective electron temperature determined from Langmuir probe measurements and the predictions of a model based on the particle balance equation of charged particles.

Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma

The properties and performance of thin films deposited by plasma assisted processes are closely related to their manufacturing techniques and processes. The objective of the current study is to investigate the modification of plasma parameters occurring during hydrogen addition in N2 + Ar magnetron plasma used for titanium nitride thin film deposition, and to correlate the measured properties of the deposited thin film with the bulk plasma parameters of the magnetron discharge. From the Langmuir probe measurements, it was observed that the addition of hydrogen led to a decrease of electron density from 8.6 to 6.2 × (1014 m−3) and a corresponding increase of electron temperature from 6.30 to 6.74 eV. The optical emission spectroscopy study reveals that with addition of hydrogen, the density of argon ions decreases. The various positive ion species involving hydrogen are found to increase with increase of hydrogen partial pressure in the chamber. The thin films deposited were characterized using standard surface diagnostic tools such as x-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometry (SIMS), x-ray diffraction (XRD), Raman spectroscopy (RS), scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDS). Although it was possible to deposit thin films of titanium nitride with hydrogen addition in nitrogen added argon magnetron plasma, the quality of the thin films deteriorates with higher hydrogen partial pressures.

On the Mechanism of Pulsed Electron Beam Production From an Uninterrupted Plasma Cathode

Electron extraction from a hollow cathode plasma discharge through a primary anode, biased with a dc accelerating potential, is modulated to produce pulsed or continuous electron beams without the interruption of the plasma cathode discharge. This is achieved with the addition of a secondary anode, within the hollow cathode. When this secondary anode is electrically connected to the primary anode, beam production ceases; when the secondary anode is electrically isolated, beam production resumes. Previous works demonstrated the utility and operation of this device; however, the precise physical principles allowing beam modulation were not well characterized. In this paper, we show that beam modulation can be understood in terms of changes in plasma potential within the hollow cathode that either promote or prevent the formation of an electron sheath at the exit of the hollow cathode, which is mediated by the electrical state of the secondary anode. Maintaining a plasma within the hollow cathode during a state change of the secondary anode depends on the secondary anode meeting the criteria for global nonambipolar flow. These effects are explored with both the Langmuir probe measurements within the hollow cathode during the steady-state operation, and the high-speed current and voltage monitoring during beam pulses.

Note: The expansion of possibilities for plasma probe diagnostics.

The determination of ion mass for low-pressure Maxwellian plasmas has been proposed. It can be done using Langmuir probe measurements and the Bohm formula for the ion current density to a floating probe, due to this formula's reliance on ion mass. This goal was achieved by accurate measurements of xenon plasma parameters in the inductive discharge at pressure p = 2 ⋅ 10(-3) Torr using the Plasma Sensors VGPS-12 probe station with the cylindrical Langmuir probes. The analysis of measurement data showed that in these conditions, the Bohm effect was valid with engineering-level precision, resulting in the experimental Bohm coefficient CBCyl ≈ 1.13 for cylindrical probes.

Plasma Density Analysis of CubeSat Wakes in the Earth’s Ionosphere

Spinning or tumbling CubeSats with Langmuir probes deployed on booms will render spin-modulated plasma densities as the probes move in and out of the spacecraft wake. It is traditionally assumed that the lower-density measurements from the spin cycle are made in the spacecraft wake, and the higher-density measurements are outside the wake. Although this assumption is valid for larger spacecraft in the Earth’s ionosphere, this paper scrutinizes its validity for CubeSats in similar conditions. Spacecraft–plasma interactions (surface charging, plasma sheaths, and wakes) are less understood for CubeSats, and the small CubeSat dimensions must be considered with respect to characteristic length scales of the space plasma environment, namely, the Debye length. Spacecraft Plasma Interaction Software, a spacecraft charging analysis tool, is used to investigate CubeSat interactions with the mesothermal plasma environment. For low-density and cold-plasma ionospheric conditions, the CubeSat dimension of 10 cm is comparable to the sheath thickness. The simulations show that, under such circumstances, a negatively charged CubeSat in mesothermal ionospheric conditions creates an ion focus region in the far wake. An independently written, first-principles code in MATLAB demonstrates that this feature is a direct result of the CubeSat behaving like a Langmuir probe in the thick-sheath model. The work performed in this paper cautions the community toward assuming CubeSats to have density depletion in their wake and stresses the necessity of having an accurate attitude solution and proper boom length design to derive ambient plasma densities from spin-modulated Langmuir probe measurements on CubeSats.

Time evolution of the electron energy distribution function in pulsed microwave magnetoplasma in H2

Time evolution of the Electron Energy Distribution Function (EEDF) is measured in pulsed hydrogen microwave magnetoplasma working at 2.45 GHz. Analysis is performed both in resonance (B = 0.087 T) and off-resonance conditions (B = 0.120 T), at two pressures (0.38 Pa and 0.62 Pa), respectively, and for different incident microwave powers. The important effect of the magnetic field on the electron kinetic is discussed, and a critical analysis of Langmuir probe measurements is given. The Electron Energy Distribution Function is calculated using the Druyvesteyn theory (EEDF) and is corrected using the theory developed by Arslanbekov in the case of magnetized plasma. Three different components are observed in the EEDF, whatever the theory used. They are: (a) a low electron energy component at energy lower than 10 eV, which is ascribed to the electron having inelastic collisions with heavy species (H2, H, ions), (b) a high energy component with a mean energy ranging from 10 to 20 eV, which is generally ascribed to the heating of the plasma by the incident microwave power, and (c) a third component observed between the two other ones, mainly at low pressure and in resonance conditions, has been correlated to the electron rotation in the magnetic field.

Experimental estimation of tungsten impurity sputtering due to Type I ELMs in JET-ITER-like wall using pedestal electron cyclotron emission and target Langmuir probe measurements

The ITER baseline scenario, with 500 MW of DT fusion power and Q = 10, will rely on a Type I ELMy H-mode and will be achieved with a tungsten (W) divertor. W atoms sputtered from divertor targets during mitigated ELMs are expected to be the dominant source in ITER. W impurity concentration in the plasma core can dramatically degrade its performance and lead to potentially damaging disruptions. Understanding the physics of the target W source due to sputtering during ELMs and inter-ELMs is important and can be helped by experimental measurements with improved precision. It has been established that the ELMy target ion impact energy has a simple linear dependence with the pedestal electron temperature measured by Electron Cyclotron Emission (ECE). It has also been shown that Langmuir Probes (LP) ion flux measurements are reliable during ELMs due to the surprisingly low electron temperature. Therefore, in this paper, LP and ECE measurements in JET-ITER-Like-Wall (ILW) unseeded Type I ELMy H-mode experiments have been used to estimate the W sputtering flux from divertor targets in ELM and inter-ELM conditions. Comparison with similar estimates using W I spectroscopy measurements shows a reasonable agreement for the ELM and inter-ELM W source. The main advantage of the method involving LP measurements is the very high time resolution of the diagnostic (∼10 μs) allowing very precise description of the W sputtering source during ELMs.

Time-resolved curling-probe measurements of electron density in high frequency pulsed DC discharges

A plasma-induced shift in the resonance frequency of a curling probe measured by using a network analyzer (NWA) yields the electron density. This technique was applied here for measuring time-varying electron density in pulsed DC glow discharges. Using the NWA in an on-sweep synchronization mode with the discharge pulse allows measuring at pulse frequencies below 0.5 kHz. For higher pulse frequencies, an on-point mode was introduced which enabled time-resolved measurements of electron density at pulse frequencies reaching 25 kHz, with the minimal time interval of 2 µs, typically for nitrogen discharge at 10 Pa. In the afterglow regime, the decay time constant of electron density was measured for nitrogen and argon discharges at 40 Pa. In the case of argon, the electron density was observed to decrease in three steps. This characteristic behavior was tentatively attributed to a bi-Maxwellian electron energy distribution and Ramsauer effect, supported by Langmuir probe measurements.

Direct measurements of classical and enhanced gradient-aligned cross-field ion flows in a helicon plasma source using laser-induced fluorescence

Direct laser induced fluorescence measurements are shown of cross-field ion flows normal to an absorbing boundary that is aligned parallel to the axial magnetic field in a helicon plasma. We show Langmuir and emissive probe measurements of local density and plasma potential in the same region, as well as floating probe spectra near the boundary. With these measurements, we investigate the influence of ion-neutral collisionality on radial ion transport by varying the ratio of the ion gyro-radius, ρi, to the ion-neutral collision length, λ, over the range 0.34 ≤ ρiλ−1 ≤ 1.60. Classical drift-diffusion transport along density and potential gradients is sufficient to describe flow profiles for most cases. For two parameter regimes (ρiλ−1 = 0.65 and 0.44), low-frequency electrostatic fluctuations (f &amp;lt; 10 kHz) and enhanced cross-field bulk ion flow to the boundary are observed.